Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q AH AG S U W K L B R A AL I J AI AJ AP 4 x AK hole AA AB V Y + Stroke X Z + Stroke For 4 x AO AG AN AI Cutout window AM Mounting dimensions (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O A 11 11 112 125 82 95 6.6 9 65 115 M6 25 108 30 55 60 80 25 45 M6 x 1 depth 9 90 75, 100, 125, 150, 200 14 13 134 150 92 108

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108 55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25

VFS

type 01C 01F 10 Control equipment Symbol Nil A AP M MP F G C E Air filter with auto-drain Connector mounting direction Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Symbol Applicable base With connector Stations D side mounting None D Nil 01, 01T, 10 02 2 stations U 01C, 01F U side mounting 15 15 stations Junction cover

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

auto-drain Control equipment Symbol Nil A AP M MP F G C E VQ7 Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Connector mounting direction Stations Symbol Applicable base With connector 02 2 stations D Nil D side mounting None 01, 01T, 10 15 15 stations U 01C, 01F U side mounting Base type 01, 01T, 10 2 to 15 stations 01C, 01F

Series AP500

Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP

Made to Order

V Width across flats 12 Element AL R Q Z + Stroke Y + Stroke A X AA AB 8 x AF AD AC AE Standard Stroke (mm) Bore size (mm) Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G GC GK GL GQ GR H I J 20 25 32 40 75, 100, 125, 150, 200 120 12 16 10 100 35 9 35 135 20 80 118 6.6 18 5.5 6 8 4 40 73 M6 x 1 depth 12 11 depth 8 M10 x 1.5 depth 18 M8 x 1.25 depth 16 M12 x 1.75 depth 21 140 16 19

LEH_C

AP PNP PNP (m) () 8 8 8 8 L L 1.5 1 1.5 1 A A 10 10 3 3 3 3 B B 15 15 5 5 5 C C 20 20 5 () () R R S S / P.42 7.3 <> (NPNPNP) LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

VZS

VQ7 0.1 to 1.0 MPa EVS How to Order VFN VV5ZS3 1 08 01 5 AP D 51F Coil voltage of air release valve Series VZS3000 Manifold Note) How to take out the lead wire of air release valve is the same method as the other valve equipped on the same manifold.

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Series AK1000

Please contact SMC. 3) Mass, including individual boxed weight, may vary depending on connections or options. 46 Series AK1000 Single Stage Regulator for General Applications Low to intermediate flow AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity

VQ4000

Note 4) Combination with pressure switch (AP and MP type) is not possible. Note 5) The release valve and the pressure switch on S kit are connected to another power supply. Cable length is 0.6 m.

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Ap 222. l@2 + r-013) .

EX500-GPR1A.eng

Confirm that the connector portion does not move. 14.9 Gray: Ground Black: DC24V 10% ( power supply for input and control ) Blue: 0V ( for input and control ) White: DC24V+10%/-5% ( for solenoid valves/output ) 18 48 34 Straight connector Type Angle connector Type EX500-AP -S EX500-AP -A 6 30 5 50 31.3 28.3 6 Socket Connector Pin Layout 4 3 1 5 30 5 50 2 B. Single power supply system A.

SMC Basic Pneumatics

Ap 222. l@2 + r-013) .

42

Note 4) Combination with pressure switch (AP and MP type) is not possible. Note 5) The release valve and the pressure switch on S kit are connected to another power supply. Cable length is 0.6 m.

Electric Grippers

1 Controller/Driver type Step Motor (Servo/24 VDC) Nil 6N 6P 1N 1P AN AP Nil S R Nil 1 3 5 8 A B C Without controller/driver Without cable 1.5 3 5 8 Without cable Standard cable Robotic cable (Flexible cable) LECP6 (Step data input type) NPN PNP NPN PNP NPN PNP LECP1 (Programless type) LECPA (Pulse input type) The standard cable should be used on fixed parts.

Process Gas Diaphragm Valve

The traditional flow direction is INLET to OUTLET, but AP Tech valves may be employed in either flow direction. End connections are specified in numerical order per the diagram's numbered arrows.

Note 3) The process gas equipment is manufactured by AP Tech Corporation of the United States.
The AP/AZ/AK series catalog can be found here.

LEF-OM006xx

LEFS 25 B 6N 1 20 0 1 DIN 1 6 16 25 25 I/O 32 32 40 40 1.5 m 1 1 3m 3 3m 3 5m 5 5 5m 40 16 25 32 40 16 25 32 ( ( DC24V NPN NPN A A LECP6/LECA6 6N 6N PNP PNP DC24V 6P 6P NPN NPN LECP1 1N * 1N * LECP1 PNP PNP 40 32 25 16 1P * 1P * 40 32 25 16 NPN NPN A A 10 mm 12 mm 16 mm 20mm AN * LECA6 AN * LECA6 PNP PNP B B 5 mm 6 mm 8 mm 10mm AP * AP * 100 mm 100 8m 8m 100 8 8 10m