4/5 Port Air Operated Valve SYJA3000 Series

)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position closed center 3 position exhaust center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ5000 series are prepared.

Stainless Steel 316

(mm) Connection thread Model R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 R1/4 4 10 R1/8 R3/8 M5 R3/8 12 6 R1/8 R1/2 R1/4 R1/8 Union Tee Union Tee 8 R1/4 Applicable tubing O.D.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

M-E05-1-LQ1

Applicable body size Nut Insert bushing LQ1E2A-SS-R8 2 2-07 LQ1-2N07 LQ1-2B07 3 LQ1E2A-SS-R9 2 2-07 LQ1-2N07 LQ1-2B07 4 LQ1E3A-SS-R1 3 3-11 LQ1-3N11 LQ1-3B11 2 LQ1E3A-SS-R8 3 3-11 LQ1-3N11 LQ1-3B11 4 LQ1E4A-SS-R1 4 4-13 LQ1-4N13 LQ1-4B13 3 LQ1E4A-SS-R2 4 4-13 LQ1-4N13 LQ1-4B13 2 LQ1E4A-SS-R8 4 4-13 LQ1-4N13 LQ1-4B13 5 LQ1E6A-SS-R1 6 6-25 LQ1-6N25 LQ1-6B25 5 5-12 A Space Saving Union Tee LQ1T-S

4/5 Port Air Operated Valve Series SYJA3000 1

port) (R1, R2 port) 5-2-28

Large Size Vacuum Module: Series ZR

(Function plate) ZR1-R1-4 1pc.

Fieldbus System

) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

Refrigerated Air Dryers

/2 Ball valve 1276 1375 Facility water outlet R1/2 (When symbol 4 is specified.)

Title not found

(mm) Connection thread Model 8 R1/4 R3/8 KQGS04-M5 KQGS04-01S KQGS06-M5 KQGS06-01S KQGS06-02S KQGS08-01S KQGS08-02S KQGS08-03S KQGS10-02S KQGS10-03S KQGS12-03S KQGS12-04S M5 4 R1/4 10 R1/8 R3/8 M5 R3/8 6 12 R1/8 R1/2 R1/4 Union Tee Union Tee R1/8 8 R1/4 Applicable tubing O.D.

One-touch Fittings

/8 02 R1/4 03 R3/8 04 R1/2 Applicable tubing O.D.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Note 4) Not applicable for dual 3-port valves 2(B) (A)4 1 (P) (R1) 5 3 (R2) C: Locking type (Manual) 3-position closed center 2(B) (A)4 3 B A 1 (P) (R1) 5 3 (R2) 3-position exhaust center r Coil voltage 2(B) (A)4 D: Slide locking type (Manual) 24 VDC 5 4 1 (P) (R1) 5 3 (R2) t Light/surge voltage suppressor 3-position pressure center 2(B) (A)4 Y es Nil 5 1 (P) (R1) 5 3 (R2) 4-position dual

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 20 ZSE20(F)/ISE20 Series Dimensions With bracket ZSE20(F) ISE20 Option 2 30 A1 25 20 Bracket

Protocol: L (IO-Link), Single Axis, STO Function: F (1 Axis, w/STO Sub-function), Mounting: 8 (DIN Rail Mounting), Actuator: LEY, Body Size: 25, Motor Mounting: D (In-line), Lead: A (16: 10mm; 25: 12mm; 32, 40: 16mm), Stroke: 50mm

Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail Mounting), Cable Connector: None, Actuator: LEY, Type: None, Body Size: 25, Bearing Type: None, Motor Mounting: D (In-line), Lead: A (25: 12mm; 32, 40: 16mm), Stroke: 100mm

Parallel I/O Type: 6 (PNP), Mounting: 8 (DIN Rail Mounting), Cable Connector: 5 (5), Actuator: LEY, Type: None, Body Size: 25, Bearing Type: None, Motor Mounting: D (In-line), Lead: A (25: 12mm; 32, 40: 16mm), Stroke: 50mm