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VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Voltage 1A 1B 1C 1U 1D 1E 1F 1G 1H 1V 1J 1K 1L 1M 1W 1N 1P

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

M plug connector, Without lead wire and light and surge voltage suppressor U side D side Port size (Body ported only) Station1 2 3 4 5 VQD1151-5L M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 1.13-8 Series VQD1000 Manifold Option Blank Plate Assembly/Body Ported VVQD1000-10A-2 SY Blank plate assembly includes 2 screws and 1 gasket.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

0 Controller/Driver type*1 11LEFS Nil Without controller/driver 6N LECP6/LECA6 (Step data input type) NPN 6P PNP 1N LECP1*2 (Programless type) NPN 1P PNP !

3

200 10 50 100 150 200 250 15 600 500 400 300 200 100 20 200 400 600 800 1000 25 200 400 600 800 1000 1200 1400 Flow rate Q [kg/h] ( ): Saturated steam holding heat (kcal/kg) ( ): Saturation temperature (C) For Water How to read the graph The pressure differential to generate a flow rate of 25 L/min water is as follows.

101.2kPa., MANIFOLD BASE, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 1.16844 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-41CommonCommon3/8VP5442 to 20 stationsW = 190n + 150

The series is vacuum applicable up to 101.2kPa., MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 3.08647 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-41CommonCommon3/8VP5442 to 20 stationsW = 190n + 150

The series is vacuum applicable up to 101.2kPa., MANIFOLD BASE, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 3.68171 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-41CommonCommon3/8VP5442 to 20 stationsW = 190n + 150

101.2kPa., MANIFOLD BASE, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 3.68171 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-41CommonCommon3/8VP5442 to 20 stationsW = 190n + 150

Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32

NPN ( ) * Produced upon receipt of order (Robotic cable only) LEH 2P PNP 1N LECP1 (Programless type) NPN 1P PNP LEY -X5 MJ LECPMJ (CC-Link direct input type) 11LEFS !0 I/O cable length*1, Communication plug !

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 2.58022 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-41CommonCommon3/8VP5442 to 20 stationsW = 190n + 150

Please contact us for the latest version.sales@ocaire.com, MFLD BASE, VALVE, VP3/5/7 SOL VALVE 3-PORT, HJ, VP3/5/7 BODY PT 3/8, 2.10541 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-42CommonIndividual3/8VP5442 to 20 stationsW = 190n + 150

The series is vacuum applicable up to 101.2kPa., MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 2.16357 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-41CommonCommon3/8VP5442 to 20 stationsW = 190n + 150

The series is vacuum applicable up to 101.2kPa., MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 3.13925 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-41CommonCommon3/8VP5442 to 20 stationsW = 190n + 150

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 1.49914 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-42CommonIndividual3/8VP5442 to 20 stationsW = 190n + 150

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 1.75906 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-42CommonIndividual3/8VP5442 to 20 stationsW = 190n + 150

Please contact us for the latest version.sales@ocaire.com, MANIFOLD BLOCK, VALVE, VP3/5/7 SOL VALVE 3-PORT, GJ, VP3/5/7 BODY PT 3/8, 2.91499 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-42CommonIndividual3/8VP5442 to 20 stationsW = 190n + 150

Please contact us for the latest version.sales@ocaire.com, MFLD BASE 2-POS, VALVE, VP3/5/7 SOL VALVE 3-PORT, HJ, VP3/5/7 BODY PT 3/8, 1.27460 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-42CommonIndividual3/8VP5442 to 20 stationsW = 190n + 150

The series is vacuum applicable up to 101.2kPa., MFLD BASE, VALVE, VP3/5/7 SOL VALVE 3-PORT, HJ, VP3/5/7 BODY PT 3/8, 2.20462 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-42CommonIndividual3/8VP5442 to 20 stationsW = 190n + 150

Please contact us for the latest version.sales@ocaire.com, MFLD BASE, VALVE, VP3/5/7 SOL VALVE 3-PORT, HJ, VP3/5/7 BODY PT 3/8, 2.97624 lb, SeriesBase modelPiping specificationsApplicable valveApplicable stations Note)Manifold base Weight: W [g] Stations: n 1P (SUP)port type3R (EXH)port typePort sizeVP500VV3P5-42CommonIndividual3/8VP5442 to 20 stationsW = 190n + 150