Symbol Size 01 R1/8, Rc1/8 02 R1/4, Rc1/4 03 R3/8, Rc3/8 04 R1/2, Rc1/2 Thread connection Applicable tubing O.D.
8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model
M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC
Applicable air dryer IDF-S0189 IDF22E IDF-S0147 IDF37E Applicable air dryer Symbol Thread type and port size Applicable air dryer Male thread A side Female thread B side 601 R1/2 NPT1/2 IDF4E, IDU4E 603 R3/4 NPT3/4 IDF6E to 11E, IDU6E to 11E 604 NPT1 Rc1 IDF22E, IDU22E 605 R1 NPT1 IDF15E1, IDU15E1 606 NPT1 1/2 Rc1 1/2 IDF37E, IDU37E 607 NPT2 Rc2 IDF100F to 150F 609 R3/8 NPT3/8 IDF1E to 3E
Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.
61.5 54 0 1 3 4 5 36 M plug connector (M): VQZ2 2 (R)-M-C4/C6/M5 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 73.5 137.5 160 62 Indicator light 37.5 <42.5> < >: AC 2-7-14 15 15 Body Ported Series VQZ1000/2000/3000 Plug Lead Unit: Single Unit VQZ3000 2 position single Grommet (G): VQZ3120 1(R)-G-C6/C/C10/02 300 (Lead wire length) 19 95 58 24.5 mounting hole 24.4 9 9 R3
8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model
/8 R3/8 R1/2 R1/2 R3/4 R3/4 R1 D H1 A L1 Reference dimension of "R" thread after installation.
IDF125F-W/150F-W: Water-cooled type T A B 4 x Eyebolt I.D. 25 G S Facility water outlet R3/4 (When symbol-W4 is specified.) Terminal block for power supply Ball valve Facility water outlet R3/4 (When symbol-W5 is specified.) Terminal block for signal F C Q R Y-shaped strainer 3/4 (Accessory) Drain tube Facility water inlet Facility water inlet L R3/4 (When symbol-W4 is specified.)
(Ex.) 10-2 1.6MPaADH4 000-04 IDFA4E 15E1-23-L N.O() 1.6MPa 0.051.6MPa (Rc1/2IDFA3E to 11E) 25mm (Rc3/4IDFA15E1) 32mm (R1/2IDFA3E11E) (R3/4 X R1/2IDFA15E1) (R1/2) (L) IDFA Series 10-1 10 1 IDX-OM-W017 10 L 10-3 1. Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 10-4 1. 2. 3.
/8 R3/8 R1/2 R1/2 NPT1/8 NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT3/8 NPT1/2 NPT1/2 Refer to the how to order on page 1 for the sleeve lock mechanism provided type.
FU port FB port FA port R1 port R3 port P port R2 port 26 5-2. Electrical Wiring Diagram Perform wiring according to the connector pin numbers and the wiring diagram. (1) Connector pin numbers (Male side) Pin No.
P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.
/8 R1/2 R3/4 R1 Drain Connection (Outside Diameter of Tubing) 10mm Color Panel: Urbanwhite1Base:Urbangray2 Weight 18kg 22kg 23kg 27kg 28kg 46kg Note1: The data for m3/ (ANR) is referring to the conditions of 20C, 1atm . pressure & relative humidity of 65%.
L2 A L1 D Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 17.8 28.5 33.8 57.1 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 28.0 33.5 38.5 39.0 14 17 19 24 13.6 17.6 25.2 27.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 Kl Ml Hl Dl MS Tl 2.1-78 Series KB 3 Other Piping Material Nipple: KBN Weight (g) Part No.
Replacement part type L shows the parts for LQ-GL and LQ-GM. 33 High Purity Fluoropolymer Fittings & Tubing Series LQ1 2 Dimensions LQ-GJ LQ-GK LQ-GJ 36 30 45 (adjustable) 117 76 24 LQ-GK 36 SET POS. 53 127 43 63 (Max. 50) 114 53 43 63 LQ-GM LQ-GL 50 50 207 85 342 85 LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 4-R3 4-R3 (Max. 91) 325 (Max. 91) 191 87 60 87 60 112 112 34 Series
ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.
Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 117 76 24 LQ-GK VX3 36 SET POS. 53 127 63 43 VXA (MAX.50) 114 VN LVC 53 63 43 LVA LVH LVD LVQ LQ LQ-GM LQ-GL LVN 50 TI/ TIL 50 207 85 PA 342 85 PAX LQ-GL 40 28 SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 PB 6 6 4-R3 4-R3 191 (MAX.91) (MAX.91) 325 87 60
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112