42

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

5 Port Solenoid Valve

) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500 VQC4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts

VQ4000

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double check

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 VQ4551 (A) VQ4550 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description Material Note Number Body Spool valve Piston Aluminum die-casted Stainless steel Resin q w e

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

VQ4000

push style 4 1 (P) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) VP4 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 3 position double check (A) 4 (B) 2 6Note) VQ4 Light and surge voltage suppressor 1 (P) 5 (R1) 3 (R2) E With W/o light/With surge suppressor VQZ Note) Refer to p.1.11-36 for double check style.

Fieldbus System

Note 4) Not applicable for dual 3-port valves 2(B) (A)4 1 (P) (R1) 5 3 (R2) C: Locking type (Manual) 3-position closed center 2(B) (A)4 3 B A 1 (P) (R1) 5 3 (R2) 3-position exhaust center r Coil voltage 2(B) (A)4 D: Slide locking type (Manual) 24 VDC 5 4 1 (P) (R1) 5 3 (R2) t Light/surge voltage suppressor 3-position pressure center 2(B) (A)4 Y es Nil 5 1 (P) (R1) 5 3 (R2) 4-position dual

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

VZS

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating

AC

Accessory (Option)/Part Numbers 0.2 to 1.0MPa Ambient and fluid temperature 2 to 50C (No condensation) Model For VBA2200 For VBA1110-1 For VBA2100 For VBA4100 For VBA4200 Description Lubrication Not required G27-20-R12pcs. G27-10-R1-X2092pcs. G46-10-012pcs. G27-10-R1-X2092pcs. G46-10-012pcs.

Series VQ Base Mounted Metal Seal/Rubber Seal

Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.1MPa 5 to 50C 2.7mm2 (0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

Air Cylinder Series CM2

R1 ND MM ND MM R1 MM E1 ND NX1 A U1 R2 H Z E1 NX U1 L1 A A NX A1 (Min.) A1 U1 L1 Applicable bore size 20 25, 32 40 MM NDH10 R1 L1 NX E1 MM NX1 U1 A1 U1 A R2 Y Z A H NDH10 Part no.

5-Port Solenoid Valve

Connector gasket Specifications Max. operating pressure 1.0 MPa Min. operating pressure 0.1 MPa Ambient and fluid temperatures 10 to 50C D-sub, Flat Ribbon SY3000 0.3 dm3/(sbar) SY5000 0.7 dm3/(sbar) SY7000 1.1 dm3/(sbar) Max. operating frequency 3 Hz Flow rate characteristics: C EX510 Manifold Exploded View Fitting, Plug Part Nos.

VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2

VER2000/4000

JIS Symbol Proportional Solenoid Specifications 1 A VEA25 Applicable power amplifier Max. current 13 (Ambient temperature 20C) Coil resistance 4(A) 4(A) 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) 13 W (Ambient temperature 20C, with maximum current) Rated power consumption 2 (B) 2 (B) Coil insulation type Class H or equivalent (180C) Max. temperature rise 140C (Ambient temperature 50C, with maximum

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Max. operating pressure Min. operating pressure 0.8MPa 0.15MPa 5 to 50C 2.7mm 2 (0.15) 180CPM VVQ1000FPG02 1set VQ1000FPGC6M5D 2pcs.

A

A1 E L MM R1 NZ U1 NDH10 NX A A1 E L MM R1 U1 NDH10 NX I-04 40 69 22 24 55 M 14 x 1.25 15.5 20 12+0.070 0 16-0.1 -0.3 Y-04C 40 22 24 55 M 14 x 1.5 13 38 25 12+0.070 0 16-0.1 -0.3 I-05 5063 74 27 28 60 M 18x 1.5 15.5 20 12+0.070 0 16-0.1 -0.3 Y-05C 5063 27 28 60 M 18x 1.5 15 38 27 12+0.070 0 16-0.1 -0.3 I-08 80 91 37 36 71 M 22 x 1.5 22.5 26 18+0.070 0 28 -0.1 -0.3 Y-08C 80 37 36 71 M 22 x