Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

High-Precision Digital Pressure Switch

or less 4 x R3 or less 28 ZSE20(F)/ISE20 Series Function Details Display examples of the main and sub (set value) screens of each mode.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

XLAQ/XLDQ

Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks. Bellows side Chamber Vacuum pump 476 XLAQ/XLDQ Series Specific Product Precautions 2 Be sure to read this before handling the products. Maintenance Caution 1.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 125 140 160 180 200 250 300 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VFS5100-06 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

How to Order L E G 32 M D G B 30 C R1 C5H73 Size Motor type Motor mounting position Bearing type 25 32 40 Symbol Motor Compatible Nil Top mounting M Sliding bearing controller D In-line JXC5H JXC6H JXC9H JXCPH JXCEH High performance G Battery-less absolute Step motor 24 VDC Lead [mm] Actuator cable type/length [m] Symbol LEG25 LEG32/40 Robotic cable[mm] 6 8 Nil None R1 1.5 Stroke [mm] R3

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

37.5 42.5 : AC 2.10-9 VQZ100/200/300 Body Ported Dimensions: VQZ300 Valve single unit C6, C8, C10, 02 Grommet (G): VQZ3l2(R)-lGl-C6, C8, C10, 02 C6: One-touch fittings for 6 C8: One-touch fittings for 8 300 (Lead wire) 75.5 C10: One-touch fittings for 10 60.5 2-4.5 Mounting holes 02: Rc(PT)1/4 41.8 22 2-3.4 Mounting holes 28.5 20 A 4 13 18 SMC 38 Cover dia 1.6 Cross section 0.34mm2 2 46.5 R3

VBA-OM-S002

VBA2: Tightening torque: 22 to 24 Nm (R3/8) VBA4: Tightening torque: 28 to 30 Nm (R1/2) (3) Change of the booster regulator OUT port plug VBA2, 4: Tightening torque: 24 Nm (M10) booster regulator by applying the seal tape. with a monkey spanner. Booster regulator Air tank Groove O-ring (4) O-ring

VBA-OM-P019

/8) VBA4 28~30Nm(R1/2) OUT O Rc1/4 O A B C D E F G H I J K L M O VBA20A VBA22A 481 444 394 Rc3/8 59 VBAT20A1 VBAT20A1 216 700 520 477 429.8 180 200 100 400 Rc1/2 305 236 Rc1/2 85 VBA42A VBA20A VBA22A 531 494 444 Rc3/8 59 IN OUT VBAT38A1 VBAT20A1 252 873 570 527 479.8 205 250 150 500 Rc3/4 355 250 Rc1/2 85 VBA42A IN IN OUT OUT VBA2,4 24NmM10 1 VBA4 4-14-1 , Sotokanda, Chiyoda-ku,

VBA-OM-S009

VBA2: Tightening torque: 22 to 24 Nm (R3/8) VBA4: Tightening torque: 28 to 30 Nm (R1/2) (3) Change of the booster regulator OUT port plug VBA2, 4: Tightening torque: 24 Nm (M10) booster regulator by applying the seal tape. with a monkey spanner. Booster regulator Air tank Groove O-ring (4) O-ring

VBA-OM-S007

3 5207 8249 Fax: +81 3 5298 5362 2010 SMC Corporation All Rights Reserve IN (I) URL http://www.smcworld.com VBAT20S1 VBA40A VBA42A VBAT38S1 VBA40A VBA42A VBA20A VBA22A VBA20A VBA22A VBA4 VBA2 2 () OUT OUT OUT IN OUT IN :VBA2 8VBA4 8 10 O : IN VBA2 22~24Nm(R3/8) VBA4 28~30Nm(R1/2) OUT VBA2,4 24NmM10 () 6 O OUT O

PFxx-OMJ0005CN

+) DC(-)(OUT1) (OUT2) IN -51No.PF-OMJ0005CN-I LoC (46 ) DC(+) DC(-)(OUT1) (OUT2) ( ) 30ms GND 30 ms GND -52No.PF-OMJ0005CN-I -5 (OUT1)80 mA , (OUT2)80 mA ( 1 )"Er4"1 ( 1 ) (45 ) () -53No.PF-OMJ0005CN-I PFM710 PFM725 PFM750 PFM711 N2ArCO2 (JIS B8392-1 1.1.21.6.2ISO8573-1 1.1.21.6.2) N2Ar 0.210 L/min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250

Cylinder with Turntable Series MGT

100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 400 Eccentric distance l (mm) Eccentric distance l (mm) Allowable side load F (N) F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 DMGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 -X F MGTM 199 213 228 246 267 291 221 250

Title not found

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

Series: LEKFS, Size: 32, Motor Mounting Position: L (Left Side Parallel), Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: B (Size 16: 5mm, Size 25: 6mm, Size 32: 8mm, Size 40: 10mm), Stroke: 250, Motor Option: w/o Option, Seal Band Stopper: Standard, Actuator Cable Type, Length: R3 (3)

Series: LEKFS, Size: 32, Motor Mounting Position: In-line, Motor Type: E (Battery-less absolute, 24VDC, Step), Lead: H (Size 25: 20mm, Size 32: 24mm, Size 40: 30mm), Stroke: 250, Motor Option: w/o Option, Seal Band Stopper: N [Roller Type Seal Band Stopper [Grease Free]], Actuator Cable Type, Length: R3 (3), Controller: C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), Controller Mounting: 7

Turntable Cylinder Series MGT

25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246 267 291 221 250

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

x) (24s)10.28 (261) 'r0.91 (2n) 11.9 (293) 1217 (309) 12.ffi (325) 13.,r3 (341) L2 1.57 (40) 2.20 (56) 2.83 \72) 3.46 (88) 4.09 004) 4.72 020) (136) s.98 \152) 6.61 (168) 7.24 (184) 7.47 (200) (26) 9.13 (232) 9.76 \244) 1039 ( 4 ) '11'o2 (280) 11.66 (2e6)12.2a (32) 12.91 (328) t3 0.63 o6) 1.26 (32) 1.89 (4s) (64) 3.15 (80) 3.78 (e6) 4.41 1112) 5.04 (128) (i44) 6.30 (160) 6.93 (176) /.5tt

INFORMATION Step Motor Controller 5 types of communication protocols New New

For single axis Actuator cable type/length Nil Without cable S1 Standard cable 1.5 m S3 Standard cable 3 m S5 Standard cable 5 m R1 Robotic cable 1.5 m R3 Robotic cable 3 m R5 Robotic cable 5 m R8 Robotic cable 8 m*1 Option Caution Nil Without option S With straight type DeviceNet communication plug for JXCD1 T With T-branch type DeviceNet communication plug for JXCD1 [CE-compliant products