Table Accuracy: H (High Precision), Size: 10, Max. Rotation Torque: K (High Torque, LER10: 0.3; LER30: 1.2; LER50: 10), Rotation Angle: 3 (External Stopper: 90°), Motor Cable Entry: L (Entry on the Left Side), Actuator Cable: S (Standard Cable), Actuator Cable Length: 5 (5)

Table Accuracy: High Precision, Size: 10, Max. Rotation Torque: High Torque, LER10: 0.3; LER30: 1.2; LER50: 10, Rotation Angle: External Stopper: 90°, Motor Cable Entry: Entry on the Left Side, Actuator Cable: Standard Cable, Actuator Cable Length: 5, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Option: -, Communication Plug Connector or I/O Cable Length for JXC

C95

25 25 5 5 5 5 5 5 11.5 12 14 14 16 16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

l1 Clevis pivot bracket (E) [mm] Bore size [mm] Part no. d2 CK S5 K1 K2 (Max.) l3 (Max.) G1 l1 G2 EM G3 (Max.)

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

A LECSA LECSB LECSC LECSS Pulse input type (For absolute encoder) B Compatible motor type CC-Link direct input type (For absolute encoder) Encoder Capacity 100 W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) Symbol C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Clevis pivot bracket with ball joint (ES) [mm] Bore size [mm] Part no. d3 CN S5 K1 K2 (Max.) l2 G1 G2 G3 (Max.)

C95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94

CP95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

C95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

CP95

CB MB 32 45 48 6.5 6.6 9.5 5.5 32.5 45 26 22 5 12 30 10 26 40 52 56 6.5 6.6 12 5.5 38 51 28 25 5 15 35 12 28 MB1 50 60 64 8.5 9 12 6.5 46.5 64 32 27 5 15 40 12 32 63 70 75 8.5 9 16 6.5 56.5 74 40 32 5 20 45 16 40 CA2 80 90 95 11 11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5

HEC-OM-U015

(OPEN During Alarm) Approx. 800W Approx. 1200W Signal 1000 1000 (Circulating fluid flow rate 3L/min) (Circulating fluid flow rate 3L/min) Facility water temp. 20deg.C 7 Output Cutoff Alarm Common External 500 15 9 500 Circulating fluid Water, Ethylene glycol solution up to 20% temperature Circulating fluid Facility water temp. 35deg.C 8 Output Cutoff Alarm b contact The compatibility of

HEC-OM-R008

Cooling capacity (Set temperature 25C and ambient temperature 25C) Approx. 200W Approx. 400W Approx. 510W Approx. 800W Approx. 1000W (Flow rate 3L/min) (Flow rate 3L/min) (Flow rate 3L/min) (Flow rate 4L/min) (Flow rate 4L/min) Circulating fluid Water, Ethylene glycol solution up to 20% The compatibility of equipment is the responsibility of the person Tank capacity Approx.1.3L who designs

Title not found

(800) 526-7661 Parallel Run LTees 3/8 7/16 1/4 5/16 5/16 1/4 5/16 1/4 8 T1-L1-1 T4-L4-4 T3-L3-3 T2-L2-2 Parallel Run Reducing LTees 3/8 5/16 5/16 5/16 3/4 15/16 5/16 5/16 5/16 5/16 5/16 5/16 1/4 1/4 MEM 27/32 5/8 5/8 3/4 9 RT3-2L-2 RT3-2L-3 RT4-3L-4 RT1-3L-1 RT3-1L-1 RT2-3L-2 1 11/16 Crosses 1/2 15/16 5/16 5/16 11/16 15/16 MEM 1/4 27/32 1 1 33/64 5/8 15/16 3/8 11/16 1 1/8 1/4 5/8 27/32

High-Precision Digital Pressure Switch

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. *2 Fixed unit: kPa, MPa y Option 2 t Option 1 r Piping specification Symbol Description Nil None Symbol Description Nil Without lead wire Symbol Description M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 * For the lead wire with M12 connector, refer to p. 38.

Table of Contents

The manual lever (1.6 x 35l, tip part: M1.6 x 0.35 x 3l) is included with the cylinder. If additional manual levers are required, use the following part number to place an order: CXS06-48BK2777 (for all series). 8-29-19 20 Series CXS Construction: Slide Bearing CXSM6 q e r u !

HEC_W-E

temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 8 L/min Approx.900W(water), 600W(Fluorinert FC-77) Heating capacity Conditions: set temp. 25C, ambient temp. 25C, radiating water temp. 20C, radiating water flow rate 8 L/min Recirculating fluid : Water, Fluorine solvent(GALDEN HT-135 Fluorinert FC-77, FC-3283) Recirculating fluid Reservoir capacity : Approx.3L

A-HEC-OM-J004

If a higher flow rate is supplied, the cooling and heating capacity will be slightly affected, but a flow rate of lower than 3L/min will impair the cooling and heating capacity significantly. Be sure to avoid operating the product without cooling water or with cooling water at extremely low flow rates.

VFR5000 Series

Applicable terminal: 1.25-3.5M, 1.25-3L, 1.25-3M Lead Wire Connection Plug-in type (With terminal block) Remove junction cover for sub-plate (1), depress levers(3) of terminal block assembly (2), pull out terminal block assembly. Terminal block assembly is marked as below. Connect it to power supply side. Caution Ground Terminal No. Internal w iring 1 Sol. A side 2 Sol.