Electric Actuator/Slider Type

26.5 40 82.4 115.4 14.1 123 156 15.8 105 to 400 32 20 to 100 10 60 118 1 34 60 76.6 116.6 17.1 113.4 153.4 17.1 105 to 500 63 Up to 200 16 80 146 4 32.2 60 98.3 138.3 15.6 (16.6) 135.1 175.1 15.6 (16.6) 205 to 500 505 to 800 Motor left side parallel type: LEY L 25 32 63 Motor right side parallel type: LEY R 25 32 63 U S1 U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 T2 T2 Note

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Environment

1 Controller/Driver type*1 !

ITV

15 VDC Vin: Input signal 0 to 5 VDC 0 to 10 VDC 4 IN 1 1 2 4 16 points preset input type 4 points preset input type 2 3 S1 Brown Brown 3 Power supply connector Communication connector S2 Blue White 3 OUT S3 S1 White Blue Vs Vs 1 5 2 4 S4 S2 Black Black CC-Link Gray 3 5 1 4 Vs : Power supply 24 VDC 12 to 15 VDC (Negative common) 4 3 2 Vs : Power supply 24 VDC (No polarity) 2 1 One of the preset

Step Motor Controller

Cable length (L)[m] 1 3 5 8 A B C (30.7) (16.6) (23.7) Connector A1 (12.7) (10.2) (5.6) (10.5) 1.5 3 5 8 (7.0) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 10 (13.5) AB 1 3 15 1 2 (18) 20 AB 15 16 (30.7) (11) L Produced upon receipt of order (14.7) (10) Connector D Connector B With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no. 1 2

Programless Controller Series LECP1

1 to !4.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Title not found

Cable length (L)[m] 1 3 5 8 A B C (30.7) (16.6) (23.7) Connector A1 (12.7) (10.2) (5.6) (10.5) 1.5 3 5 8 (7.0) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 10 (13.5) AB 1 3 15 1 2 (18) 20 AB 15 16 (30.7) (11) L Produced upon receipt of order (14.7) (10) Connector D Connector B With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no. 1 2

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Lateral Figure 1.

LJ1H

1 !2 u @1 Section AA Parts list Material Note No. Description No.

LG1H

1 i !4 Section A-A u Parts list Material Note No. Description No.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Short P3 and P4. 1 4 1.

0.4

P Note 1) U S U S U S w U S U S AXT100-1-J 20 Note 1) AXT100-1-F Note 1) e Note 1) Top entry connector for FU, PU, JU while side entry connector for FS, JS, PS.

SX

1-12.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 1) 25P Note 1) 26P 20P Side entry Side entry Side entry Connector entry direction Connector entry direction Connector entry direction P. 523 P. 527 P. 531 P. 535 Top entry Side entry Top entry Top entry Side entry Side entry Without cable S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 0 1 2 3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable With cable (1.5 m) With cable (3 m) With

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no. Port size M5 x 0.8 Rc Rc Round head combination screw SX3000 SX3000-38-1 A SX5000 SX5000-38-1 A SX7000 SX7000-38-20A 1 8 1 4 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-1 A SX5000 SX5000-39-1 A SX7000 SX7000-39-20A Series Assembly part no. Port size M5 x 0.8 Rc Rc Round head combination screw SX3000 SX3000-38-1 A SX5000 SX5000-38-1 A SX7000 SX7000-38-20A 1 8 1 4 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.