0.4

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01

VQ5000

) 200 VAC Inrush 2.6 VA (11.7 mA), Holding 2.6 VA (11.7 mA) 220 VAC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Fieldbus System

) 4 (B) 2 (A) 4 (B) 2 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Light/surge voltage suppressor 2 2-position double 3-position pressure center Nil With E Without light, with surge voltage suppressor (A) 4 (B) 2 Rubber (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Coil voltage 3-position double check 5 24 VDC (A) 4 (B) 2 Note) 6 Function 1 (P) 5 (R1) 3 (R2) Nil Standard (0.95

Vacuum Module Series ZX

(For replacement) ZU Blanking plate assembly ZL Individual spacer R1 Philips screw Adapter D ZY (M2.5 x 28) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) Note 1) M5: Suffix -4, M6: Suffix -1 Note 2) M5: Suffix -1, M6: Suffix -2 Philips screw M2.5 x 12 M2.5 x 12 Philips screw ZF Adapter D (1) ZP Individual spacer R1 Adapter D individual spacer R1 assembly Assembly

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

) 4 (B) 2 Rated coil voltage Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B)

ZX

ZX1-R1-1 ZX1-R1-3 ZX1-R16 4 pcs. (Ordering example) ZZX106-R 1 pc. (Manifold base) ZX100-K15LZ-EC 5 pcs. (Vacuum single unit) ZX-BM1 1 pc.

4/5 Port Air Operated Valve Series SYJA3000

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Stainless Steel 316

(mm) Model 4 6 8 10 12 KQGE04-00 KQGE06-00 KQGE08-00 KQGE10-00 KQGE12-00 KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S M5 4 R1/8 M5 6 R1/8 R1/4 R1/8 8 R1/4 R3/8 R1/4 10 R3/8 R3/8 12 R1/2 Features 1 Stainless Steel 316 One-touch Fittings Applicable tubing: Metric size/Connection thread: M, R Series KQG Applicable

Fieldbus System

valve (A) (A) 4 (B) 2 (A) 4 (B) 2 Note) A 1 5 (R1) 3 (R2) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

Large Size Vacuum Module: Series ZR

Example 3) Attached to the first and third stations ZR1-R1-1 ZR1-R1-3 Example 1) ZZR106-R . 1 pc. (Manifold base only) ZR100-K15MZ-EC . 5 pcs. (Unit) ZR1-BM1 . 1 pc. (Blank plate) ZR1-R1-3 . 1 pc. (Individual spacer) BM1 ZR1 Fill the number With reference from valve side, the third station from right side Refer to Example 1).

4/5 Port Air Operated Valve SYJA3000 Series

position exhaust center (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) 5 3 position pressure center 3 position exhaust center 3 position closed center 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) How to Order Manifold Base 3 position pressure center 2(B) (A)4 Same manifolds as SYJ7000 series are prepared.

M-E05-1-LQ1

Seat AXT1094-1-1A Table 2 Tubing size symbols Tubing O.D. Metric size Inch size 3 4 6 8 10 12 19 25 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Type Body class Seat Applicable tubing size Body class Metric size 1, 2 03 (3) 5, 6 19 (19) 6 25 (25) 1 Note) 03 04 Note) 03 Tubing O.D.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.