LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

V

Note 4) Grommet type (G) is also available for C-kit, single type of VQ0/1000/2000.

Compact Cylinder

Stroke S1 S2 50 55 to 75 80 to 100 55 to 75 80 to 100 55 to 75 50 55 to 75 23 (33) + Stroke S1 29.5 (39.5) + Stroke S1 30.5 (40.5) + Stroke S1 36 (46) + Stroke S1 43.5 (53.5) + Stroke S1 53 (63) + Stroke S1 Bore size 145.4 (155.5) + Stroke S1 161.5 (171.5) + Stroke S1 164 (174) + Stroke S1 171 (181) + Stroke S1 189.5 (199.5) + Stroke S1 210.5 (220.5) + Stroke S1 170.5 (180.5) + Stroke S1

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Battery-less

LEF32 LEF40 2000 2000 2000 2000 1500 1500 1500 1500 L1 L1 [mm] L1 [mm] L1 [mm] L1 [mm] 1000 1000 1000 1000 X 500 500 500 500 0 0 10 20 30 40 50 0 0 0 0 5 10 15 20 25 30 0 10 20 30 40 50 60 0 2 4 6 8 10 12 14 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400

Vacuum Module Series ZX

E D P F Nil Model ZX1 K1 Vacuum switch (E) (D) Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K1-E (Release to atmospheric pressure) Spacer 1 (ZX1-S1) (For side mounting) Pressure sensor 78 Rc 1/8 EXH port (EXH.)

LEC-OM02704CN

1000 80 80 0 0 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 1000 2000 80 80 0 0 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 8 1000 1000 100 100 0 0 LEC-MR-J3BAT 1000 1000 100 100 0 0 C N 4 ( 3 ) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.

Table of Contents

Cylinder Speed Chart Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 VK Horizontal actuation A VZ VF 0 1000 VFR 900 800 700 600 500 400 300 200 100 0 VP4 Courtesy of Steven

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or less 1000 or less 1600 or less 140 1000 or less 1000 or less 1600 or less 160 1200 or less 1200 or less 1600 or less -XC27: Double clev!

20

After improvement Before improvement Conventional coil tube model Filter regulator Conventional coupler model S coupler 1 2 1 2 Coil tube L L VMG Air gun Nozzle 2.5 Nozzle 3 S2 S0 to S1 S2 S0 to S1 Effective area ratio 3.04 : 1 Effective area ratio 0.69 : 1 Before improvement After improvement Coupler S coupler Conventional model Piping Equipment TCU1065-1-20-X6 Conventional coil tube model

20

(I.D. 5, equivalent length 5 m) Air gun VMG (Nozzle size 2.5) Conventional model (Nozzle size 3) Coupler, Piping (S0) 13.45 mm2 5.1 mm2 Effective area Air gun (S1) 30 mm2 6 mm2 Nozzle (S2) 4.4 mm2 6.3 mm2 0.69 : 1 3.04 : 1 Effective area ratio (S0 to S1: S2) Impact pressure 0.011 MPa (at a distance of 100 mm) 0.011 MPa (at a distance of 100 mm) Regulator pressure 0.4 MPa 0.5 MPa Pressure

Dedicated Controller Series LC1 Uniaxial Type

CN1: Control terminal Model LC1-1-1000 User connector (CN1: Control terminal) Model LC1-1-1050 Dedicated communication cable (Halfpitch) (for NEC PC-98 Series) Model LC1-1-RH Cable length 02 2m 04 4m 03 3m 05 5m 0.5m Cable is connected to LC1-1-1000. 10326-52A0-008 Halfpitch hood (26P) Made by 3M PC Controller 10126-3000VE Halfpitch plug (26P) Made by 3M Cable length: 2 to 5m CN2: General-purpose

Multi-Axis Step Motor Controller

For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0

42

Bore size CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] Series 40 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal VQ4100--03 VQ4101--03 1100 1000 900 800 700 600 500 400 300 200 100 0 VQ5100--04 VQ5101--04 Values at extension

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

ZX

ZH 600 3 Gray (2 pcs.) 1000 1500 2000 2500 3000 ZU ""30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum release D port ZY Valve Unit ZQ Air supply release A port 57.4 Pilot exhaust PE port Normally closed 7 38.1 9.3 2 1 11.5 ZF Air supply PV port 21.6 64.6

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

modular-press-e

[IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2 IS400-2 Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

Modular F.R.L. Pressure Control Equipment

[IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2 IS400-2 Note) Bowl O-ring (or seal) is included for the AL20 to AL60.