VQ4000

) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double check (A) 4

5 Port Solenoid Valve

N.C. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.O. N.O. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.C.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

, 800 1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000 Made to Order (For details, refer to pages 190 to 199.)

VQ5000

) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position exhaust center Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber 4 Bore 6.1 Bore 6.1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) PUSH TURN LOCK 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 Light/Surge voltage suppressor 1 (P) 5 (R1) 3 (R2) 1 (P)

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available. *1 Please consult with SMC for longer strokes.

Compact 5-Port Solenoid Valve

800 6 CJ2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 60 mm 10 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 63 80 0 100 200 300 400 500 600 700 800 Average speed [mm/s] * Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open. *

Compact Rotary Actuator Series CRQ2

Thin round plate Position of rotational axis: Passing through the diameter r a CRB2 CRBU2 r2 a2 4 = m 12 = m CRB1 MSU 7. Cylindrical Position of rotational axis: Passing through the diameter and the center of gravity 2.

10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

IDX-OM-N030

Ventilation air outlet (The opposite side Drain tube for dripping of condensation Drain tube 20 4x Compressed Air inlet Compressed Air outlet (O.D.10, Length approx. 0.7m) Drain tube direction direction Ventilation Ventilation 107 7001 R2 R2 267 460 1130 1120 Power cable outlet 75 17 or less) (Electric wire diameter Signal cable outlet direction direction Ventilation Ventilation 64 Grommet

IDX-OM-U022

[IDFA125F-38/40] () (10 2m) (100.7m) 20 4x R2 1/2 R2 1/2 1130 78 9351 267 1120 655 75 64 (17 ) 40 1276 1375 R ) (14~18) () P.1-5 P.1-5 P.1-5 7122 20 350 700 752 IDFA100F150F 6 4 6.3 IDX-OM-U022 6.

High Vacuum Angle Valve, XL Series

For further details on solenoid valves, refer to the P/A solenoid valve catalog "SYJ 300, 500, 700" (E143-B). Note 3) Solenoid valves are shipped facing downward (flange side), but can be rotated to face upward.

C85

R2 Note) Please refer to page 6-11-47 for additional options. Only one option can be selected.

Possible to transfer a workpiece at low-speed.

Next, B is entered to find A the moment of inertia for the rotation of shaft (A) as r r2 2 = m A = 2B a b No. of teeth = b D5. Solid sphere Position of rotational axis: Passing through the diameter r 2 r2 5 = m 303 CRQ2X/MSQX Series Load Type Calculation method of necessary torque depends on the load type. Refer to the table below.

C85

R2 Note) Please refer to page 6-11-47 for additional options. Only one option can be selected.

VP4

VQ7 EVS Specifications: 50-VPE500/700 VFN Air Fluid N.C. or N.O.

Vacuum System Peripherals:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Compact 3 port solenoid valve Series SY100, SYJ Compact size: 10 mm (SY100, SYJ300) 15 mm (SYJ500) 18 mm (SYJ700) Low power consumption: 0.5 W ZL SY100 Vol. 4 0.14 M3 x 0.5 M5 x 0.8 , ZY 1 8 1 4 SYJ300/500/700 Vol. 4 0.41 to 2.8 ZQ 3 port solenoid valve

Sine Cylinder Series REC

(mm) (mm) A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 A Applicable bore size (mm) 20 25, 32 40 Bore (mm) 20 25, 32 40 Part no.

Sine Cylinder Series REC

(mm) (mm) A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 A Applicable bore size (mm) 20 25, 32 40 Bore (mm) 20 25, 32 40 Part no.

Sine Cylinder Series REC

(mm) (mm) A H MM NDH10 NX1 U1 R2 Y Z A1 E1 L1 MM NDH10 R1 NX U1 A Applicable bore size (mm) 20 25, 32 40 Bore (mm) 20 25, 32 40 Part no.

VZS2000

VVZS2000-22A-1 VVZS2000-22A-2 VFN G L M KZ D Cylinder side pressure (P2) Check valve Applicable valve model VZS2450-FZ VZS24504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 100 Ncm3/ min or less Solenoid one side 1(P) de-energized Leakage (Supply pressure: 0.5 MPa 100 Ncm3/ min or less Solenoid both sides de-energized 1(P) Piston SUP side pressure (P1) SUP side pressure P1 (MPa) 0 Operating