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I sens ALM I sens ALM (1-195) E Power off Turn OFF and ON the power supply for the controller An overflow of the position error counter inside of the controller has occurred. Error counter overflowed (01-196) Err overflow E Make sure there are no obstructions that interfere with the actuator movement.

E Turn OFF and ON the power supply for the controller An overflow of the position error counter inside of the controller has occurred. Error counter overflowed (01-196) Err overflow E Make sure there are no obstructions that interfere with the actuator movement.

<> <> <> ON(SVON ON) (01-193) E <>ONSVON ON <> (01-194) E <> 68 - <> <> (1-195) E <> (01-196) E <> <>EEPROM E (01-197) <> EEPROM 10 <>CPU CPU CPU E CPU (01-198) <> 69 - 17/ A 50mm () 5m 5m 10% 15m 20% [] 70 - 18/ 18.1 : LE ,, () EMG 1000 1 71 - /Best Pneumatics No2 UL , UL1310 Class2 18.2 72 - 18. 3 90100 DC24VSVON a) b) c) d) e) [] D 100 [] 73 - 18.4 : 1.

ALM E Power I sens off An overflow of the position error counter inside of the controller is occurred. Position deviation counter overflow (01-196) overflow E Power Make sure there are no obstructions that interfere with the electric actuator movement.

<> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A () (50mm ) () () 5m 5m 10% 15m 20% 53 - 14 / 141.

RESET Step data ALM2 1-051 B SVON (1) Check if "Operation" of the step data is "Blank (Invalid data)". (2) This product cannot perform test operation by the teaching box or input Controller setting kit.

e. f. -46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52 - 13. / A 50mm () () 5m 5m 10% 15m 20% 53 - 14 / 14.1 LE () EMG 1000 1 54 - /Best Pneumatics No UL UL1310 Class2 14.2 55 - 14.3 90~100 DC24VSVON a) b) c) d) e) 56 - D (100 ) 14.4 1. 2. 3. 4. 5. 6. 7. 8. /-10603585% 57 - 14.5 5 14.6

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF 25 - Step No. 1: Positioning operation a b c d e f g h i j k Step data No.

ON(SVON ON) (1-193) E ON(SVON ON) (1-194) E (1-195) E E EEPROM (1-197) E (EEPROM 10 ) CPU (CPU ) CPU (1-198) CPU E 64 - Revision history No.JXC-OMT0028CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF -17- Step No. 1: Positioning operation a b c d e f g h i j k [ ] Need to be set [] Need to be adjusted as required. [ ] Not used.

e. f. -37- 6.5 (LEFBLEFS -(A) (-(B)) A B LEF16 M2.5x5 LEF16 M2.5x16 LEF25 M3x6 LEF25 M3x20 LEF32 M3x6 LEF32 M4x30 LEFS40 M3x6 LEFS40 M4x35 -38- 7. No. 1) 1 / /P30 4.

Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification 1.1 How to Order L E K F S 32 E A 300 R1 CD17T Motor type Size Motor mounting position Lead[mm] 16 25 32 40 Nil In-line Size E Battery-less Absolute Symbol R Right side parallel 16 25 32 40 (Step Motor 24VDC) L Left side parallel H 20 24 30

Carry out checks to confirm there is no air leakage. 1 1 Cap bolt OUT IN 4 4 3 3 2 2 5 5 6 No Part name Part number IDH4 IDH6 1 Body 2 Element Element assembly AMHEL350 3 Gasket Element assembly AMH-EL250 4 O ring 5 Housing Case assembly AM-CA250C-D [For Option E] AM-CA250C-C Case assembly AM-CA350C-D [For Option E] AM-CA350C-C 6 Auto drain (2) Super mist separator element replacement procedure