CM2

Rubber bumper50 to 750 mm/s (Standard equipment) Air cushion50 to 1000 mm/s DReduced piston rod deflection -X The clearance between the bushing and the piston rod, and between the tube and the wear ring have been decreased to achieve higher accuracy.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT Table 11.2 Servo motor leakage current example (lgm) Servo motor power [W] Leakage current [mA] 50 to 750 0.1 Table 11.3 Driver leakage current example (Iga) Driver capacity [W] Leakage current [mA] 100 to 400 0.1 750 0.15 Table 11.4 Earth-leakage current breaker selection example Driver Rated sensitivity current of earthleakage current breaker [mA] LECSB2

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235 255 192 194 65 76 45 20 34 20 205 1000 (1001 to 1500) 133 (140) 18 (29) 150 (180) 92 (100) 180 (220) 54 (60) 215 (227) 0.040 0.073 100 1500 750 750 750 25 133 136 116 136 35.5 130 13.5 13.5 162 50 64 135 212 6.0 43 17 29 258 58 36 256 281 214 206 75 92 50 25 40 25 216 The factors in parentheses are

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

up to 750 50 55 70 80 100 120 C95 FT FX ZZ + Stroke FZ CA1 CS1 Single clevis/(C) Port Cushion valve Single clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX 0.1 ZZ Z U RR L CD 0.3 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

750 750 25 116 112 102 112 31.5 110 13.5 13.5 140 45 61 129 204 4.5 44 16 27 247 48 28 235 255 192 194 65 76 45 20 34 20 205 CY 1000 (1001 to 1500) 215 (227) 133 (140) 18 (29) 150 (180) 92 (100) 180 (220) 54 (60) 0.040 0.073 100 1500 750 750 750 25 133 136 116 136 35.5 130 13.5 13.5 162 50 64 135 212 6.0 43 17 29 258 58 36 256 281 214 206 75 92 50 25 40 25 216 MY The factors in parentheses

NCM

: Double Acting, Single/Double Rod Specifications 075 (3/4") 044 (7/16") 056 (9/16") 088 (7/8") 125 (1-1/4") 200 (2") 106 (1 -1/16") 150 (1-1/2") Bore size (inch) Fluid Air Maximum operating pressure 250 PSI / 1.7 MPa Minimum operating pressure 8 PSI / 0.06 MPa 40 to 140F / 5 to 60 C Ambient and fluid temperature No bumper: 2 to 20 in/sec (50 to 500 mm/sec) Bumper: 2 to 30 in/sec (50 to 750

Single Axis Electric Actuator Series LJ1H

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 1.2 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

Air Cylinder

With auto switch (Built-in magnet) Cylinder with Stable Lubrication Function (Lube-retainer) Specifications Bore size (mm) 20, 25, 32, 40 Action Double acting, Single rod Min. operating pressure 0.1 MPa Piston speed 50 to 750 mm/s Cushion Rubber bumper * Specifications other than the above are the same as the standard type.

Ionizer Gun

600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm]

NCG/CG1

Up to 1000 Up to 750 Note) End boss is machined on the flange for E.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

OPTIONS AND PERIPHERAL EQUIPMENT Table 11.2 Servo motor leakage current example (lgm) Servo motor power [W] Leakage current [mA] 50 to 750 0.1 Table 11.3 Driver leakage current example (Iga) Driver capacity [W] Leakage current [mA] 100 to 400 0.1 750 0.15 Table 11.4 Earth-leakage current breaker selection example Driver Rated sensitivity current of earthleakage current breaker [mA] LECSS2

Gun Type Ionizer

300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance

REA/REB

Speed 600 mm/s REAS20 36.4 10.6 + 2Lo REAS15 15 5 4 74.4 12 + 2Lo 20 REAS10 3 140 13.8 + 2Lo 25 2 258 17 + 2Lo 32 520 20.6 + 2Lo 1 0 500 (650) 750 1000 1500 40 Cylinder stroke (mm) High Precision Guide Type REBH Order Made Auto Switches 3.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z + Stroke ZZ + Stroke Up to 750 Bore size (mm) Applicable pin part no.

MB

to 750 50 55 70 80 100 120 7 9 9 9 12 14 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 141 145 164 164 202 202 MB1 FT FX CA2 FZ ZZ + Stroke CS1 C76 Single clevis: (C) C85 Port Single Clevis CD H10 (mm) C95 Bore size (mm) Stroke range H10 CX 0.1 CD L RR Z U ZZ 0.3 32 40 50 63 80 100 to 500 to 500 to 600 to 600 to 750 to 750 10 10 14 14 22 22 164.5 169 197

Table of Contents

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Magnetically Coupled Rodless Cylinder

Standard Stroke Maximum stroke available (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

REA/REB

Horizontal Operation (Wall mounting) 50 30 Load weight W (kg) 20 REAS40 REAS32 10 (13.6) Bore size (mm) Allowable load weight WA (kg) 12.0 8.4 + 2Lo REAS25 REAS20 Lo: Distance from mounting surface to load center of gravity (cm) 10 REAS15 36.4 10.6 + 2Lo 5 4 15 74.4 12 + 2Lo REAS10 3 20 140 13.8 + 2Lo 2 25 258 17 + 2Lo 32 1 0 500 (650) 750 1000 1500 520 20.6 + 2Lo 40 Cylinder stroke (mm)

2-Color Display Digital Flow Switch Series PFM

(kPa) 300 (kPa) 300 (kPa) Flow rate (l/min) Flow rate (l/min) 100 (kPa) 750 (kPa) 20 10 100 (kPa) 5 10 0 5 10 15 5 10 15 0 Number of needle rotations Number of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40 20 0 5 10 15 0 5 10 15 0 Number