SV

R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Do not drop, bump, or apply excessive impact (PSE530, 540: 980 m/s2, PSE560: 500 m/s2, PSE550: 300 m/s2) while handling. Although the body of the sensor may not be damaged, the inside of the sensor could be damaged and lead to malfunction. 2. The tensile strength of the cord is PSE530: 23 N, PSE540, 550, 560: 50 N or less. Applying a greater pulling force to it can cause malfunction.

Digital Flow Switches

Mount switches in locations where there is no vibration greater than 98m/s2, or impact greater than 490m/s2. 3. Do not use in an area where surges are generated.

PF2A/PF2W

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Exhaust center VFS5410 VFS5400 55 or less 1.14 300 Pressure center VFS5510 VFS5500 55 or less 1.14 300 Double check VFS5610 60 or less 1.99 180 Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.

Digital Flow Switches, Series PF2A, Series PF2W

Withstand voltage 1000VAC for 1 min. between external terminal and case Insulation resistance 50M (500VDC) between external terminal and case 4.9m/s2 10 to 500Hz at whichever is smaller: 1.5mm amplitude or 98m/s2 acceleration in X, Y, Z directions for 2 hrs. each Vibration resistance 490m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000Vp-p, Pulse width 1s, Rise

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300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

LEC-OM071xx

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2. Station Address S1 S2 00H to 02H: Disabled (Do not use these addresses.) 0 0 to 2 03H (Factory setting) 0 3 04H 0 4 EFH E F F0H to FFH: Disabled (Do not use these addresses.)

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Electric Actuator / Low profile slider type

Acceleration Deceleration Can be set in units of 1mm/s2.

LEC-OM069xx

Setting (byte) 1 to 65535 10 Pn80A 1st Linear Acceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80B 2nd Linear Acceleration Constant 1 2 100 reference units/s2 0 to 65535 100 reference Pn80C Acceleration Constant Switching Speed 1 2 0 units/s 1 to 65535 10 Pn80D 1st Linear Deceleration Constant 1 2 100 reference units/s2 1 to 65535 10 Pn80E 2nd Linear Deceleration Constant

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the speed of 300 mm/s.

CATALOG

, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

Air Catch Sensor Series ISA

0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Ex. 1) To detect 300 m, select a 1.0 detection nozzle and supply pressure of 0.2 MPa.

AC Servo Motor Driver (Pulse input type/Positioning type ）

(communication error) 100 ms 100 ms 100 ms 300 ms *Time-out 300 ms 300 ms 300 ms Message Message Message Message PC or PLC...etc Controller side (master station) EOT EOT EOT Servo side (slave station) 14 9 14.

Electric Actuator / Slider Type 《 AC Servo Motor 》

: 4194304 p/rev) [With LECSC-T] Absolute 18bit encoder (Resolution: 262144 p/rev) Type Note 5) No excitation operating type unit Lock spec Holding force [N] 78 131 255 131 197 385 220 330 660 Power consumption [W] at 20 Note 6) 6.3 7.9 7.9 Rated voltage [VDC] 24 0 -10% Product Weight [kg] Series LEFS25 Stroke[mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 S2 2.00 2.14

Basic type / Direct mount type Series CY3B/CY3R

Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.

Solid State Auto Switches

: 300 m/s2 Note 1) Refer to page 1568 for solid state auto switch common specifications.

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VDW 2 0 1 C1 1 VC OUT (2) VDW Series Lead wire length 1 2 3 10 20, 200 30, 300 300 mm 600 mm Nil L1 (1) IN 2 Port Valve VQ Note) Note) Type L1 is optional.