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Z 500 500 500 500 LEH Mep m LEY -X5 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS Calculation of Guide Load Factor 11LEJS Mounting orientation 1.

, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

Move M Spee Pushing Sp mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Absolute 500 100.00 2500 2500 0 0 0 100 0.00 0.00 1.00 1 Absolute 500 0.00 2500 2500 0 0 0 100 0.00 0.00 1.00 When the relative position is required, set Relative Absolute: Distance from the origin position. / General setting method Relative: Feed from the current position. / This is used when simplified data. b < Speed> Transfer

Horizontal Operation (Wall mounting) CY1L40 Model 10 (2.48 1.3 x 103 x ST) = CY3B CY3R 50 Note) Calculate with = 1 for all applications up to 10 300 mmST, 15 500 mmST, 20 500 mmST, 25 500 mmST, 32 600 mmST and 40 600 mmST.

AC servo motor Motor typeV*) Model LEKFS25V6 LEKFS32V7 LEKFS40V8 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310

S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Pressure 0.5 MPa Load factor 50% Stroke 500 mm VZS Average speed (mm/s) Series VFS VS4 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VQ7 VZ514--02 (Piping: 6 x 1 m) EVS VFN AS3301F-02-06/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 8 x 1 m) AS3301F

660 320 500 660 500 660 500 660 500 660 500 660 7.9 0.33 3.0 1 4 (8A) 15 0.61 4.5 4.5 15 0.61 3.0 1 4 (8A) 6 1.1 6 26 26 1.1 3 1.6 8 38 7.9 0.33 1.0 3 8 (10) 4.5 1.9 10 46 15 0.61 6 0.33 3 7.9 26 1.1 Note) Weight of grommet type.

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

SEMI S8 SEMI S8 is a guideline on ergonomics which is more detailed than the ergonomic requirements in Section 14 of SEMI S2. SEMI F47 SEMI F47 is a SEMI standard which stipulates guidelines regarding voltage sag immunity. Semiconductor manufacturers require this standard for temperature control equipment, just like SEMI S2.

T1 T2 T3 T4 L 0.5 V (T1 + T3) V T2 = L : Stroke [mm] (Operating condition) V : Speed [mm/s] (Operating condition) a1: Acceleration [mm/s2] (Operating condition) a2: Deceleration [mm/s2] (Operating condition) 500 0.5 300 (0.1 + 0.1) 300 T1 = V/a1 [s] T3 = V/a2 [s] = P T2: Constant speed time can be found from the following equation. = 1.57 [s] T4 = 0.3 [s] T2 = [s] L 0.5 V (T1

(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

Supply current IP67 Enclosure 10 to 50C Operating temperature range 35 to 85%RH (with no condensation) Operating humidity range Environmental resistance 1500 VAC for 1 min. between external terminals and FG Withstand voltage 10 M or more (500 VDC) between external terminals and FG Insulation resistance 10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized

(mm) Pushing force (N) Size Stroke (mm) Pushing force (N) 25 32 Up to 400 Up to 500 485 588 25 32 63 25 32 485 588 300 25 32 485 736 485 736 1910 Up to 400 Up to 500 Up to 800 300 Features 12 SMC Electric Actuators Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Slide Table Compact type Series LES High rigidity type Series LESH Symmetrical type/L type Symmetrical type/L type Series LESHR

Mount switches in locations where there is no vibration greater than 98m/s2, or impact greater than 490m/s2. 3. Do not use in an area where surges are generated.

R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Please contact SMC regarding the performance. 29 Minimum bending radius [mm] (Reference values) Impact resistance Switch: 1000 m/s2, Connector: 300 m/s2 Insulation resistance 50 M or more (500 VDC measured via megohmmeter) (between lead wire and case) Withstand voltage 1000 VAC for 1 minute (between lead wire and case) Ambient temperature 10 to 60C Enclosure IEC60529 standard IP67

(Manufacturable stroke range: LEJS63-M/ 790 to 1790mm) Note13) The return to origin of stopper type can not be used. 15 - Product Weight Series LEJS40 Stroke [mm] 200 300 400 500 600 700 800 900 1000 1200 Weight (kg) 5.6 6.4 7.1 7.9 8.7 9.4 10.2 11.0 11.7 13.3 Extra weight of lock (kg) S2:0.2 / S6:0.3 / T6:0.2 Series LEJS63 Stroke [mm] 300 400 500 600 700 800 900 1000 1200 1500 Weight (kg