Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10 12 15 25.5 10.5 12 14 17.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 100 35 to 100 75 to 200 75 to 300 45.5 13.5 20.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 5.4 5.4 7 10 25.5 34 45.5 13.5 20.5 24 29.5 55.5 59 14.5 15 19.5 37.5 32.5 27.5 22.5 Inch Long stroke L1 21.5 21.5 22.5 24.5 Standard H OA Bore (mm) Bore (mm) OB Q RA

BP1000

Specifications [Surface finish Ra] Surface finish of the inner surface (wetted parts). A standard for measuring surface roughness which averages the peak to valley of the surface profile over a given distance (stroke). Multiple readings on a part are also averaged for Ra, but for Ra max, the worst reading is the value for that part.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key Key +4 0 0 0 +4 0 9 y 9 A port B port 0 y A port B port a a w 0 w 1 y y e ay e k k 80 w of of y e e ke 1 g g n n f ay ra a o r n n w ge io io at ey n ot at R ra ot k R Angle adjustment range 3 n of io at e +4 0 ot R ng R ot ra at n 80 io io at 1 n ot R ay ra +4

1

) 17 + Stroke J A+ Stroke x 2 Bore size (mm) ML OA OB OL P PA PB X XA YY YL Z NN PW Q S R T RR RB U RA XC XL VA VB XB 12 16 20 25 18 19 25 28.5 34 38 47 55 13 15 12.5 12.5 7 13 9 14 14 16 18 48 54 70 33 33 37 RB0806 RB0806 M4 x 0.7 3 3 10 10 50 56 3 3 6 6 6 6 5 5 37 38 3.5 M5 x 0.8 M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Escapements Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 8-FD through Attachment mounting thread 4-FD through RE A B REC CX CY FF FE FF FE FC MQQ M Attachment mounting thread 2-FD thread depth FG RHC FC FF FE MK(2) FB FA FB RS Q G FA RS H A Stroke adjuster Scraper RZQ MI W S CEP1 (JA) SA CE1 CE2 ML2B Hexagon width across flats RB SB SC 2-RA

2–4

Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB J KA KB L M N OB RA

CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 12 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Escapements Series MIW/MIS

(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Additionally, do not mount the foot bracket with the pressure applied to the port. y 0 A port B port a 1 w y y a e k w of y e e k g n of ra n e io at g ot R n R +4 0 ra ot n io 0 at at ot 8 R io 1 R +4 0 n y ot ra a w n y 0 g at e e k of 9 io 1 n ay ra w n g ey e of k 189

2-Color Display Digital Flow Switch Series PFM

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static. Ra Ru Rh Rd Flow (b) The gas flows from the left side. 931 Series PFM7/PFM5 Component Parts Straight piping No.

Compact Cylinder

(RB) M L B + Stroke E A + Stroke 25 Width across flats K M: Rod end male thread D H Hexagon width across flats B1 Rod end nut H1 C X L1 Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L1 X 13 13 5 5 14 14 10 12 M8 x 1.25 M8 x 1.25 8 10 22 22 16 16 20 25 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q RA RB T 43 45 37 39 10 10 10 12 36 40 5.5 5.5 M6 x 1.0 M6 x 1.0 43

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Escapements Series MIW/MIS

RB RA RC RF RE RD RJ SC SB SA Model MIS20-30 MIS20-20 MIS20-10 MIS12-30 MIS12-20 MIS12-10 8 6 6 M5 x 0.8 14 18 1.8 2.5 8 24 22.5 12 34 26 2.2 4 12 9 M8 x 1 10.5 11 Series MIW/MIS Auto Switch Mounting When mounting an auto switch, insert the switch in the switch mounting groove on the escapement from the bottom.

Flow Sensor Series PFMV

Ra is used to compensate the gas and/or ambient temperature. (a) The gas is static.

Smooth Cylinder/Low Speed Cylinder

Basic style (Through-hole/Both ends tapped common): CQSXB/CDQSXB 12 Auto switch Minimum lead wire bending radius 10 16 H thread effective depth C 2 x M5 x 0.8 2 x 4 x OB counterbore depth RB 2 x 4 x OA effective depth RA Note 1) 4 x N through Flat washer 4 pcs.

39

) XB R XC RW LB PB0.02 PD0.05 PC0.05 PA0.02 GC LA0.1 GB L C 2 x 2 x PH7 Depth D 2 x 2 x MM Depth J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc GA E B RD (mm) Bore size (mm) B C D E GA GC J L LA LB MM N P GB 50 63 92 48 12 13.7 95 166 95.5 12 376.6 155.5 78.4 M8 x 1.25 19 8 110 54 15 16.6 99 171.5 100.5 12 391.6 161 78 M10 x 1.5 22 10 Bore size (mm) PA PB PC PD R RB RC RD RR W XA XB XC RA

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

Compact Cylinder

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flat washer 4 pcs. 2 x 4-OA 20 2 x 4-RA (RB) K L B + Stroke M A + Stroke E 25 Width across flats K M: Rod end male thread H D Hexagon width across flats B1 Rod end nut H1 C X L Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L X 20 25 13 14 10

CQM

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IB RQ IA 2-N through MU T EB EA M D-X KA (KB) 2 x 2-OA V 20(RB) Note) 2 x 2-RA L M Flat washer Data W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Bore size (mm) Stroke range (mm) EB F HB IA IB NN NN EA A