VQ7-6/7-8

VV72-P-03, 04 R1, R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19ASilencer box AXT512-26A 1 2 SMC SMC 223.5 211.5 183.5 171.5 140 PA B 80.5 120.5 PE PE PE PA P PE PE P 78 R2 R1 R1 R2 EA EB EB EA A Individual EXH spacer: VV72-R2-Rc3/8, 1/2 Individual SUP spacer: VV72-P2-Rc3/8, 1/2 R1, R2 individual EXH spacer: VV72-R2-04 2-Rc1/2 Reverse pressure spacer: AXT512-19A2-Rc3

5 Port Solenoid Valve

) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500 VQC4501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component

SX

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

Fieldbus System

) 4 (B) 2 (A) 4 (B) 2 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Light/surge voltage suppressor 2 2-position double 3-position pressure center Nil With E Without light, with surge voltage suppressor (A) 4 (B) 2 Rubber (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Coil voltage 3-position double check 5 24 VDC (A) 4 (B) 2 Note) 6 Function 1 (P) 5 (R1) 3 (R2) Nil Standard (0.95

Valve Single Unit

A: Orange B: Green (Light/Surge voltage suppressor) Manual override G: 300 H: 600 (Press and turn for the locking type.)

Valve Single Unit

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

VZ3000

Applicable base VV5Z3-20 VV5Z3-21 Rc 1/8 1(P) port Gasket Caution Applicable base VV5Z3-20 VV5Z3-21 Mounting Screw Tightening Torques M2.5: 0.45 Nm (5(R1), 3(R2) port) 3-3-25 Series VZ3000 Type 20 Manifold VV5Z3-20Station 1 Grommet (G), (H) (4(A), 2(B) port) (Pitch) (Mounting hole) 6-Rc 1/8 (1(P), 3/5(R) port) G: 300 mm H: 600 mm Manual override (Non-locking) (PE port) (Lead wire length)

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Fieldbus System

) 1 (P) 3 (R2) 5 (R1) 1 (P) N.C.

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 23 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch for General Fluids

Smooth Cylinder/Low Speed Cylinder

ND hole H10 Axis d9 MM NX2 H A L R2 U2 Z (Min.)

Air Cylinder Series CM2

MM ND hole H10 Axis d9 NX2 L R2 U2 A H Z (Min.)

2-Color Display Digital Flow Switch Series PFM

or less 4 x R2 or less Secure mounting of n (2 or more) switches (vertical) 24 or more 31 0 0.4 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Note) If a bend (R) is used, limit it to R2 or less.

5

1000 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 1000 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 1000 Unit: MPa Bore size (mm) 32 40 50 63 80 100 Min. operating pressure 0.02 0.01 Note 1) Intermediate strokes not listed above are

High-Precision Digital Pressure Switch

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. +

Vacuum Module Series ZX

ZX1-R1 R2 R3 R4 R5 R6 R7 R8 Symbol Part no. ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted.