Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table
: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A ZL B B ZY ZQ Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZF ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 ZP 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 2 13 16 49 16 18 32 35 ZCU 40 50 ZPT F-B5-A14 (Without buffer/Male thread) AMJ
S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4 x FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A 66 52 40 40 34 B 22 17 17 13 B1 10.5 7.5 7.5 7.5 DL Bore size FT F FD FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 7 7 7 4 4 4 60 60 60 16 13 13 13 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 5 24 46.5 37.5 33.5 28 47.3 37 37 30 36 50
(mm) With rod boot Stroke range (mm) Bore size (mm) e CD J l B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 34.5 15 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 13 13 88 29 14 98 57 52 25 to 1400 40 23 15 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 52 25 to 1400 1/3.5 stroke 50 28 15 M10 x 1.25 76 145 52
to 1400 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 13.5 65 204 4.5 20 to 1500 Up to 1500 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 13.5 75 212 6.0 Without rod boot With rod boot P Bore size (mm) 40 50 63 80 100 LY MM N S X Y RT RY LX H ZZ d e f h ZZ l 1/4 stroke 42 70 M14 x 1.5 27 1/4 84 27 13 51 175 56 43 11.2 59 183 50 80 M18 x 1.5 30 3/8 90 27 13 30 76 58 188 64 52 11.2 66
Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.
2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 783 MXS 1322Air Slide Table Dimensions: MXS8 1322Axial piping (8): MXS8-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control
VQD AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm DIN Rail Mounting Each manifold can be mounted on a DIN rail. Order it by indicating an option symbol for DIN rail mounting style, -D.
G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F
G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F
G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F
G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F
S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4-FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A F FD 10.5 7.5 7.5 7.5 DL Bore size FT 22 17 17 13 B1 66 52 40 40 34 B FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 16 13 13 13 7 7 7 4 4 4 60 60 60 21 19.5 19.5 15.5 24 22 22 18 40 32 25 20 5 24 46.5 37.5 33.5 28 11 8 8 8 82 75 75 75 36
Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880
0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 63.
1 13 PD input Blue E 12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.
C3 C4 C6 M5 With 3.2 one-touch fitting With 4 one-touch fitting With 6 one-touch fitting M5 thread Without one-touch fitting (With clip) F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J/S kit for 2 to 12 stations/Double wiring P/J/S kit for 13 to 24 stations/Double