JXCx-OMT0023

d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

Table of Contents

D 11 13 E 25 30 F 32 40 G 36 46 H 12 15 N 45 49 [ ]: Individual pressure type J 7 9 K 6.5 8.5 M 54 58 17-3-100 5 The VX series will be revised shortly.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single VQ0 (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm The part numbers above are applicable to 2 to 10 stations. 11 to 16 stations: AXT661A(N)-F-425. 13 14 F kit D-sub connector (25 P) P kit Flat ribbon cable connector (26 P) T kit Terminal block (16

CL

CAD CLM2F Bore size Stroke Boss cut (mm) BP Bore Stroke range BN 80 90 90 BQ BZ E FZ 75 75 75 82 D 8 10 12 14 B 34 40 40 52 FD 7 7 7 7 GA GC 8 9 9 8 AL 15.5 19.5 19.5 21 C1 30 37 37 47.3 F 13 13 13 16 GB 8 8 8 11 A 18 22 22 24 FX 60 60 60 66 GK 3.5 4 4 4 B1 13 17 17 22 FT 4 4 4 5 BC 38 45 45 52 GD 55 FY 36 B2 26 32 32 41 20 25 32 40 0 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 to 400 to 450 to 450

ISO Cylinder

27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

CQ2

(mm) Without auto switch With auto switch Bore (mm) Stroke range (mm) J K L C D M E I H P M5 X 0.8 A B F 5.5 P Q 11.5 B A F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 40 36.5 46.5 38.5 48.5 23 33 29.5 39.5 30.5 40.5 Rc(PT)1/8 M8 X 1.25 4.5 14 33 40 7.5 7 10.5 13 16 34 45 60 32 7.5 10.5 Rc(PT)1/8 8 11 Rc(PT)1/8 M8 X 1.25 5 14 39.5 46.5 8 7 11 13 16 40 52 69 Rc(PT)1/8 40 10.5

Combination Cylinder

46 17 17 17 17 3.1-20 Fine Lock Cylinder/Double Acting Single Rod Series CLM2 Axial Foot (L) CLM2L Bore size Stroke CL MLG CNA CNG MNB CNS (mm) CLS Bore Stroke range A 18 22 22 24 AL 15.5 19.5 19.5 21 B 40 47 47 54 B1 13 17 17 22 B2 26 32 32 41 BC 38 45 45 52 BN 80 90 90 BP 1/8 1/8 1/8 1/8 BQ 1/8 1/8 1/8 1/8 BZ D 8 10 12 14 F 13 13 13 16 GA GB 8 8 8 11 GC 8 9 9 8 GD 55 GK 3.5 4 4 4 GL 6 9

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A ZL B B ZY ZQ Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model ZF ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 ZP 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 2 13 16 49 16 18 32 35 ZCU 40 50 ZPT F-B5-A14 (Without buffer/Male thread) AMJ

CA2

refer to page 6-8-13.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4 x FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A 66 52 40 40 34 B 22 17 17 13 B1 10.5 7.5 7.5 7.5 DL Bore size FT F FD FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 7 7 7 4 4 4 60 60 60 16 13 13 13 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 5 24 46.5 37.5 33.5 28 47.3 37 37 30 36 50

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e CD J l B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 34.5 15 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 13 13 88 29 14 98 57 52 25 to 1400 40 23 15 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 52 25 to 1400 1/3.5 stroke 50 28 15 M10 x 1.25 76 145 52

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

F.

Air Cylinder Series CA2

to 1400 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 13.5 65 204 4.5 20 to 1500 Up to 1500 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 13.5 75 212 6.0 Without rod boot With rod boot P Bore size (mm) 40 50 63 80 100 LY MM N S X Y RT RY LX H ZZ d e f h ZZ l 1/4 stroke 42 70 M14 x 1.5 27 1/4 84 27 13 51 175 56 43 11.2 59 183 50 80 M18 x 1.5 30 3/8 90 27 13 30 76 58 188 64 52 11.2 66

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 783 MXS 1322Air Slide Table Dimensions: MXS8 1322Axial piping (8): MXS8-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control

Metal Seal/Rubber Seal Series VQ Body Ported

VQD AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm DIN Rail Mounting Each manifold can be mounted on a DIN rail. Order it by indicating an option symbol for DIN rail mounting style, -D.

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F