Air Cylinder Series CA2

to 1400 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 13.5 65 204 4.5 20 to 1500 Up to 1500 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 13.5 75 212 6.0 Without rod boot With rod boot P Bore size (mm) 40 50 63 80 100 LY MM N S X Y RT RY LX H ZZ d e f h ZZ l 1/4 stroke 42 70 M14 x 1.5 27 1/4 84 27 13 51 175 56 43 11.2 59 183 50 80 M18 x 1.5 30 3/8 90 27 13 30 76 58 188 64 52 11.2 66

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 783 MXS 1322Air Slide Table Dimensions: MXS8 1322Axial piping (8): MXS8-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control

Metal Seal/Rubber Seal Series VQ Body Ported

VQD AXT661-14A-F AXT661-14AN-F AXT661-13A-F AXT661-13AN-F Positive common Single (2-wire) Negative common Positive common Double (latching) (3-wire) Negative common Note) Lead wire length: 300 mm DIN Rail Mounting Each manifold can be mounted on a DIN rail. Order it by indicating an option symbol for DIN rail mounting style, -D.

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

SMC Pneumatic Clean Series

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4-FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A F FD 10.5 7.5 7.5 7.5 DL Bore size FT 22 17 17 13 B1 66 52 40 40 34 B FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 16 13 13 13 7 7 7 4 4 4 60 60 60 21 19.5 19.5 15.5 24 22 22 18 40 32 25 20 5 24 46.5 37.5 33.5 28 11 8 8 8 82 75 75 75 36

Table of Contents

Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880

Air Cylinder

0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 63.

LX

1 13 PD input Blue E 12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

0.4

C3 C4 C6 M5 With 3.2 one-touch fitting With 4 one-touch fitting With 6 one-touch fitting M5 thread Without one-touch fitting (With clip) F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J/S kit for 2 to 12 stations/Double wiring P/J/S kit for 13 to 24 stations/Double

SY

SS5Y51, #3 + #13 M type plug connector .

NCG/CG1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 114 119 121 139 162 162 196 196 11 11 11 12 13 13 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 12 12 12 13 14 14 20 20 Up to 350 Up to

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Directional Control Valves Air Grippers Modular F. R.

AC

SAC1000, #1 + #2 + #3 + #13 SAC2000, #1 + #2 + #3 + #13 SAC2503, #1 + #2 + #3 + #13 SAC4000, #1 + #2 + #3 + #13 SAC4006, #1 + #2 + #3 + #13 SAC5000, #1 + #2 + #3 + #13 SAC6000, #1 + #2 + #3 + #13 AC1000 AC2000 AC2500, 3000 AC4000 AC4000-06 AC5000 AC6000 1.1-8 Air Combination Filter Regulator + Lubricator AC1010 to 4010 JIS symbol AC3010 AC2010 AC1010 Filter regulator Lubricator Standard Specifications

1

20 13 31 Dimensional Range Not Possible to Machine Additionally B C D A B C D A 91 16 Bore (mm) 20 25 32 40 50 Bore (mm) 20 25 32 40 23 13 31 D LX Model MXH6 MXH10 MXH16 MXH20 18 10 28 12 18 10 28 16 114 20 29 19 36 11 27 23 13 36 13 23 13 36 20 132 25 34 19 44 15.2 32 23 13 36 16 23 13 36 20 156 30 38 19 44 20 38 27 15 42 20 27 15 42 25 186 35 44 26 58 26 43 33 19 52 25 214 40 49 26 64

SMC

20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12 13 15 20 27 KA 82.5 132.5 N 4 4 4 4 6 6 NA 2 2 2 2 4 4 Model F 25 25 40 50 38 50 13-/22-MXS8-10 13-/22-MXS8-20 13-/22-MXS8-30 13-/22-MXS8-40 13-/22-MXS8-50 13-/22-MXS8-75 137 MXS Air slide table 1322Dimensions: MXS8 1322Axial piping type (8): MXS8-P 132232.2 Max. 6.5 13.5 Operating port 2-M5 x 0.8 15 6.5 12 Other dimensions

Magnetically Coupled Rodless Cylinder

S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36