Option . 6-1 6.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 6.1.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4
11.6 32.5 20.6 13.7 18 6 11.6 14 38.5 22.9 38.9 13.7 36 12 14.2 11.8 7.2 34.7 1.2 31.6 10.6 R 1/8 8 15.2 15.8 44.8 28.2 38.2 18.5 38 6 12.8 43.5 25.2 17 72 18 8 17 15.2 18.5 15 7.2 46.5 28.2 41.7 40.2 1.2 34.7 11 18.5 R 1/4 74 10 18.5 19.7 49.3 31 21 77 6 12.8 48.3 25.2 17 107 20.3 8 15.2 51.3 28.2 18.5 109 19 23 19.8 9.8 53.7 54.8 1.2 49.3 15.4 R 1/4 10 18.5 54.1 32.6 21 113 23.1 12 20.9
1l'" Immj 32 -700 50 7 5 10 64 72 32 36 79 90 25 31 ", 40 -800 55 9 7 10 Cushi()(\ vl\lve Port 4 50 -1000 70 9 12 12 90 45 50 110 120 36,S 39.5 63 1000 80 9 12 12 100 80 1000 100 12 14 16 126 63 153 45.5 J()a, -1000 120 14 1 6 I. 150 75 176 54 FE FT Head Iionge/ (G) Head flange 101m) ' ~," BoreSiW .
ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !
, Fax: 09-6810233 Russia DiskArt UK SMC Pneumatics (UK) Ltd Vincent Avenue, Crownhill, Milton Keynes, MK8 0AN Phone: 01908-563888 Fax: 01908-561185 Latvia Ottensten Latvia SIA Ciekurkalna Prima Gara Linija 11, LV-1026 Riga, Latvia Phone: 371-23-68625, Fax: 371-75-56748 SMC Pneumatik LLC. 36/40 Sredny pr.
D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers
10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/
MXF1675 6 39 45 6 13 125 159 159 170 D I M E N S I O N S MXF20 Model N G H NN J M Z ZZ MXF20-30 4 29 30 4 40 91 91 104 MXF20-50 4 36 45 4 77 113 113 126 MXF20-75 6 40 45 6 125 162 162 175 MXF20-100 6 59 60 6 175 211 211 224 Courtesy of Steven Engineering, Inc. !
Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80
-6-A10 U C ZPT32 -6-A10 U C ZPT25D20-6-A10 ZPT20 -6-A10 116.5 50.5 20 23 1.7 14 23 51 4 ZPT25D30-6-A10 126.5 60.5 25 28 1.8 ZPT25D40-6-A10 162.5 70.5 77 32 35 14.5 23.5 4.5 2.3 ZPT25D50-6-A10 80.5 172.5 Dimensions by Stroke 20, 25 32 Model G E F E F U C ZPT 20-6-A10 U C ZPT 30-6-A10 U C ZPT 40-6-A10 U C ZPT 50-6-A10 U C ZPT 10-6-A10 23 34.5 72.5 35 73 110.5 45 44.5 111 51 54.5 120.5 55 121
AL30/AL40 w Semi-standard/Bowl Assembly Part No. t e Model Semi-standard specifications With switch Bowl material With drain guide With barb fitting With bowl guard IN OUT AL20 AL10 AL60 AL50 AL40-06 AL40 AL30 Lowest limit ON Lowest limit OFF y r u C4SL-3 C1SL-3 C2SL-3 C3SL-3 C2SL-C Polycarbonate C2SL-3C C4SL-3W C4SL-6 C4SL-36 C3SL-3W C1SL-6 C2SL-6 C3SL-6 C1SL-36 C2SL-36 C3SL-36 Nylon
ZH20DA-11-13-13 112.2 62.2 Inch 1 Dimensions when the standard bracket is mounted Body Ported: ZH D A--S L 18 20 Standard bracket A-A 6 2 x 4.2 4 A 6 3.5 10 12 27 36 A Refer to page 233 for handling the bracket. 15 12 Silencer ZH05 to 15DA Model A B ZH05DA---06/07 23.2 11 ZH07DA---06/07 ZH10DA---08/09 30.8 13 ZH13DA---10/11 41.9 16.5 ZH15DA---10/11 B A ZH18/20DA---12 Directly mounted silencer
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
F G H Y Model B C D A E Flat Model ZPY40D10-6-A14 69 137 Flat with ribs U C ZPY50 -6-A14 U C ZPY40D20-6-A14 ZPY40 -6-A14 79 134 50 6.5 40 43 18.5 28.5 46.5 3.3 ZPY40D30-6-A14 89 144 50 53 19.5 29.5 3.8 7.5 47.5 109 189 75 ZPY40D50-6-A14 Dimensions by Stroke 40 50 H Model F G F G U C U C U C U C ZPY 10-6-A14 58.5 126.5 59.5 127.5 ZPY 20-6-A14 68.5 123.5 69.5 124.5 50 ZPY 30-6-A14 78.5 133.5
Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow
Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and
2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Reading offset 2 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D Answer -1.52 deg.C 36 Offset setting (without
connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)
T1, T2Inverter pump . 6-2 6.4 Option YWith feet / Without rack mounting brackets . 6-3 6.4.1 Option YWith feet / Without rack mounting brackets . 6-3 6.4.2 Anti-quake bracket (Optional Accessories) . 6-4 6.5 Option Z . 6-5 6.5.1 Option Z. 6-5 6.5.2 Option Z1. 6-5 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm Buzzer Stop . 7-3 7.3 Troubleshooting
One-touch fitting assembly for 4 One-touch fitting assembly for 6 One-touch fitting assembly for 4 (Elbow type) One-touch fitting assembly for 6 (Elbow type) One-touch fitting assembly for 4 (Long elbow type) One-touch fitting assembly for 6 (Long elbow type) M5 port block assembly One-touch fitting assembly for 6 One-touch fitting assembly for 8 One-touch fitting assembly for 6 (Elbow type