Air Cylinder Series CS1

Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order two foot brackets per cylinder.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Bore size (mm) 125 140 160 180 200 Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 Order two foot brackets per cylinder.

2

Note 4) Refer to pages 34 to 38 for further information on options.

V100

PVT317-53-1A 1 pc.

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

assembly DXT031-38-1A Applicable individual EXH spacer assembly DXT155-17-1A Stations VV5F3 05 40 2 02 R port 02 2 stations P port 20 20 stations A, B port 3-4-25 26 Series VF3000 B Mount (Integrated type) Applicable solenoid valve Bottom ported/Individual EXH type Type 50 VV5F3 05 50 4 02 VF350Applicable blanking plate assembly DXT031-38-1A EXH (R) port (Valve body) Stations 02 2 stations

AC Servo Motor Driver (Pulse input type/Positioning type ）

.1 Servo motor combination error 1 DB 1A Servo motor combination error 1A.2 Servo motor control mode combination error DB 0 1 1 0 1A.4 Servo motor combination error 2 DB 1B Converter alarm 1B.1 Converter unit error DB 0 0 1 0 Encoder initial 1E.1 Encoder malfunction DB 0 1 1 0 1E.2 Load-side encoder malfunction DB 1E communication error 2 Encoder initial 1F.1 Incompatible encoder DB 0 1 1

AC Servo Motor Driver (Network card type ）

The operation direction of Homing method -38 is opposite to that of Homing method -6.

smcmaintenancepartslist

C3SL-36W w e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 Metal bowl with level gauge r i C3LL-38 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

Table of Contents

(27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Spacer Type: Individual SUP Spacer, Individual SUP/EXH Spacer Assembly: Straight, Port Size: ø12

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

Table of Contents

, Contact: 1a) 06 3/4 Note) Terminal box for 24 VDC is available for 5, 6 (LED light).

Valve Single Unit

Port size M5 x 0.8 SX3000 Port size M5 x 0.8 SX3000 SX3000-38-20A SX5000-38-1 A SX7000-38-1 A SX3000-39-20A SX5000-39-1 A SX7000-39-1 A 1 8 1 4 SX5000 1 8 1 4 Note) For protection of the wiring unit section from drain, it should be piped at the EA port so that it will not be directly exposed to exhaust from the valve.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

VFS

2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !