High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

VFS

2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

Spacer Type: Individual SUP Spacer, Individual SUP/EXH Spacer Assembly: Straight, Port Size: ø12

Modular Type Lubricators Series AL

AV C4SL-3W C4SL-6 C4SL-36 AF Nylon C4SL-36W C4SL-2 C4SL-23 C4LL-8 C4LL-38 Metal Metal bowl with level gauge 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

SYJ3000/5000/7000

How to Order Applicable solenoid valve Refer to page 1-5-38.

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

VFR

0, Terminal i, Connection bracket q, w, Gasket e, r, O-ring y, u, Receptacle assembly 02 03 C8 C10 Plug-in type VVFS3000-1A-1Manifold block assembly Note) !0 Manifold block o, Connection bracket q, w, Gasket e, r, O-ring y, u 02 03 C8 C10 Non plug-in type VVFS3000-1A-2End plate (U) !

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

Table of Contents

Blanking plate assembly Fitting assembly Refer to page 14-4-38.

XM, XY

AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi

Modular Design with Uniform Body Style

-A C4LL-38-A *1 The bowl assembly comes with a bowl seal.

SYJ300/500/700

In the case of 2000 mm of lead wire For AC SYJ312-1LO-M3 SY100-30-1A-20 For DC SYJ312-5LO-M3 SY100-30-4A-20 VKF VQZ VZ Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. cover diameter: 1.7 mm VS VFN Hook Insulation 3.

Modular F.R.L. Units

-A C4LL-38-A * Bowl seal is included for the AL20-A to AL60-A.

Modular F.R.L. Unit

Optional specifications Note 2) With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model V 38 38 45 45 B 176 179 216 218 B 114 156 159 196 198 B 150 153 190 192 B 151 154 191 193 AC20C AC25C AC30C AC40C AC40C-06 10 F.R.L.

modular-press-e

C3SL-36W w C1SL-2 C2SL-2 C3SL-2 C4SL-2 e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 C4SL-23 C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 C4LL-8 C3LL-8 Metal bowl with level gauge r i C3LL-38 C4LL-38 C3LL-38 121538-1A 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2

Modular F.R.L. Pressure Control Equipment

C3SL-36W w C1SL-2 C2SL-2 C3SL-2 C4SL-2 e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 C4SL-23 C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 C4LL-8 C3LL-8 Metal bowl with level gauge r i C3LL-38 C4LL-38 C3LL-38 121538-1A 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2

LEC-OM02904

(2) a FVD5.5-4 YNT-1210S (1)b 8-4NS YHT-8S c FVD14-6 YF-1E-4 YNE-38 DH-112DH-122 d FVD22-6 DH-113DH-123 (1)e 38-6 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)f R60-8 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111DH-121 m FVD14-8 YF-1E-4 YNE-38 DH-112DH-122 n FVD22-8 DH-113DH-123 (1)p R38-8 YPT-60-21 TD-112TD-124 YF-1E

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.