VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

AC Servo Motor Driver (CC-Link Type ）

PE terminals PE terminals (c) If a leakage current breaker is used to prevent an electric shock, the protective earth (PE) terminals (marked ) of the driver must be connected to the corresponding earth terminals.

AC Servo Motor Driver (CC-Link Type ）

Protective earth (PE) Connect to the earth terminal of the servo motor and to the protective earth (PE) of the control box to perform grounding. 4 7 4.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

AC Servo Motor Driver

PE terminals PE terminals (c) If an earth leakage circuit breaker is used, always earth the protective earth (PE) terminal of the driver to prevent an electric shock. (6) Wiring (a) The cables to be connected to the terminal block of the driver (drive unit) must have crimping terminals provided with insulating tubes to prevent contact with adjacent terminals.

VQ4000

X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/4, 3/8 Electrical entry 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-6 7 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

Vacuum Unit

Vacuum pump system exhausts air from PE port on the spacer. Female thread type (M3) is available by option [C] for PE port of the vacuum pump system. When option [C] is selected for valve type R, operating conditions below apply. Select the type with release pressure supply port (PD) as an option.

HRX-OM-W058

L PE N N For option B PE L PE N L Fig. 3-6 Wiring of power supply cable(Thermo chiller side) 3.3 Installation HRS-R Series 3-12 HRX-OM-W058 Chapter 3 Transport and Setting Up Wiring 1. Connect the power supply cable to the secondary side of the earth leakage breaker and grounding.

HRX-OM-X027

L PE N N PE For option B L PE N L Fig. 3-6 Wiring of power supply cable(Thermo chiller side) 3.3 Installation HRS-R Series 3-12 HRX-OM-X027 Chapter 3 Transport and Setting Up Wiring 1. Connect the power supply cable to the secondary side of the earth leakage breaker and grounding.

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

HRX-OM-T002

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

5 Port Air Operated Valve

How to Order Valve VFA 3 1 3 0 01 VFA 3 1 3 0 01 Pilot port direction Series 1 3 5 Nil: Upward P: Lateral VFA1000 VFA3000 VFA5000 Pilot port Type of actuation 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Pilot port Only 1 and 2 are available with the VFA1000.

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

Vacuum Module Series ZX

ZX1-R 9 R10 R11 R12 R13 R14 R15 R16 PS PS PS PS PV PV PV PV PV PV PV PV R1 R2 R3 R4 R5 R6 R7 R8 R 9 R10 R11 R12 R13 R14 R15 R16 PE PE Caution when ordering manifold PD PD PD PD PE PE The asterisk denotes the symbol for assembly. Prefix it to the ejector part numbers to be mounted. When it is not added, the manifold base and ejector are shipped separately.

Manifold Specifications

wire length) MAX. 10 300 (Lead wire length) : With light/surge voltage suppressor 3-3-80 5 Port Solenoid Valve Base Mounted Series VZ5000 Type 41 Manifold: Side Ported VV5Z5-41Station 1-01 Manual override (Non-locking) PE port (Pilot EXH) Grommet (G), (H) 6-Rc 1/4 (1(P), 3/5(R) port) VK VZ VF VFR (Mounting hole) VP4 (Pitch) G: 300 mm H: 600 mm VZS (Lead wire length) VFS VS4 VQ7 EVS VFN 2n-Rc

7.5

(There is a piping of X, PE port in the both sides.)