VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

VQ4000

X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/4, 3/8 Electrical entry 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-6 7 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

Vacuum Unit

Vacuum pump system exhausts air from PE port on the spacer. Female thread type (M3) is available by option [C] for PE port of the vacuum pump system. When option [C] is selected for valve type R, operating conditions below apply. Select the type with release pressure supply port (PD) as an option.

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

5 Port Air Operated Valve

How to Order Valve VFA 3 1 3 0 01 VFA 3 1 3 0 01 Pilot port direction Series 1 3 5 Nil: Upward P: Lateral VFA1000 VFA3000 VFA5000 Pilot port Type of actuation 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Pilot port Only 1 and 2 are available with the VFA1000.

Vacuum

Individual Vacuum l\,ls o 1lA o o o o o o PS M3 o PS M5 o o PD PD o o PE A EXH 1la A A Individual SUP spacer 1PS,lPD, :PE (R1) PV M5 o 1ta o o o o spa@r (R16) lPV, xPS, IPD,lPE 'Common o o PS t\r3 a PS a a PD PD O o PE EXH 1t8 A A each valve unit.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP(For VQZ1000/VQZ2000) VVQZ2000-CP(For VQZ3000) Used to block an unused cylinder port when using a 4 way valve as a 3 way valve. 1.12-23 VQZ1000/2000/3000 Body Ported Manifold Option Double check block (Externally placed downstream): For VQZ1000 only VQ1000FPGll

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

HRX-OM-S004

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

ZX

1(PV)(PS PD) PD PE PS Table (2) PV Part no.

This is a legacy product, and replaced bySY124A-5LZ, VALVE,PILOT(NORM OPEN), VALVE, VJ100 SOL VALVE 3-PORT, 2B, VJ100 NO SIZE RATING, 0.0286 lb

This is a legacy product, and replaced bySYJ312R-5LZ-M3, VALVE, SOL, BODY PT *LQA, VALVE, SYJ300 SOLENOID VALVE 3-PORT, 1A, SYJ300 OTHER SIZE RATING, .23460 lb

HRX-OM-W002

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

Table of Contents

-06-X214 AS2301F-01-06-X214 2.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

-fl Seies

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)