Modular F.R.L. Pressure Control Equipment

121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2 IS400-2 Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

0.4

Note) Electric current should be 1A or less (including the mounted valves).

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

0.4

entry (L4) (L3) VQ7 L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight, Water-jet-proof 2 L n Dimensions Formula

Table of Contents

VJ10-36-1A-10 . 2 pcs.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

C4/C6 One-touch fitting C4/C6 One-touch fitting (elbow type) Outstanding seal performance The new rubber seals offer improved durability and performance. Valve failures due to line contaminants have been greatly reduced. (Ozone resistant seals available by special order.)

Large Size Vacuum Module: Series ZR

(VJ3233-X18) Air operated (VJA3130) K3 ZH Common with supply valve C1 ZU Common with supply valve C2 Common with supply valve ZL C3 Common with supply valve C4 ZY Nil Without valve module ZF ZP Table (2) How to Order Valve Plug Connector Assembly Table (3) Pressure Switch for Vacuum/ Lead Wire with Connector SP 4A 20 VJ10 5A 10 ZS DC ZCUK AMJ 1A 36 VJ10 100 VAC (with rectifier) Lead wire

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

] C10: 10 One-touch fitting 2 x G 3/4 Electrical entry (L4) (L3) L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

] C10: 10 One-touch fitting 2 x G 3/4 Electrical entry (L4) (L3) L1 + 0.5 L2 + 0.5 R EXH EXH R 100.5 B B B B B B B B 49 X P X P 24.5 9.5 1B 1A 1 4B 4A 4 3B 3A 3 2B 2A 2 16 A A A A A A A A 120 <126.9> (7.5) (12) P = 16 41 23 C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 6.5 126 80 C10 [1(P) SUP port] C10: 10 One-touch fitting Dust-tight

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Compact Manifold Regulator Series ARM5

Length 136016-1A 136016-2A 136016-3A 136016-4A 136016-5A 136016-6A 136016-7A 136016-8A 136016-9A 136016-10A 16 14 1 SRP 28 2 42 3 SRF 56 4 70 5 ARX20 Tie-rod for centralized supply block 84 6 98 7 VCHR 112 8 126 9 ITV 140 10 For 1 station 14 mm x 1 station = 14 mm Length IC For adding a regulator Tie-rod part no.

Modular F.R.L. Units

Semi-standard specifications Model Bowl material With switch AL30 AL40 AL40-06 AL50 AL60 Lowest limit ON Lowest limit OFF 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank (Metal bowl with level gauge) It is not possible to switch from a polycarbonate, nylon or metal bowl, or from a metal bowl with a level gauge to a 1000

Manifold Specifications

0 Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-3-Port size (1) (-1) (2) Note 1) Bore-01: Rc 1/8, -C4: Embedded type One-touch fitting for 4, -C6: Embedded type One-touch fitting for 6. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly. How to Increase Manifold Base Insertion Method for Pin of D-Sub Connector D-sub connector terminal no.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

-32-C4 SYJ33 1/8 SS5YJ3-S32-M5 SS5YJ3-S32-C4 SS5YJ3-41-M5 Base mounted for internal pilot SS5YJ3-41-C4 SYJ34 1/8 SS5YJ3-S41-M5 SS5YJ3-S41-C4 SS5YJ3-46-M5 SS5YJ3-46-C4 1/8 M5 x 0.8 SYJ34 SS5YJ3-S46-M5 SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the valves and blanking plate assembly to be mounted on

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Type 32P How to Order SS5YJ332P 07 C4 A, B port M5 x 0.8, C4 Applicable connector assembly Refer to page 12.

Table of Contents

, Contact: 1a) 06 3/4 Note) Terminal box for 24 VDC is available for 5, 6 (LED light).