Series: 1000 Series, Actuation: 2-position, Double, Manifold Type: Body Ported, Power Saving Circuit: w/Power Saving Circuit, Electrical Entry: L Plug Connector w/Lead Wire, 300mm, Cable Length: None, Light/Surge Voltage Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Port Size, Thread Piping: M5 x 0.8, PE Plate: JSY1: M5, JSY3: Rc1/16, JSY5

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: LO (L Plug Connector w/o Connector), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE (JSY1

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: MO (M Plug Connector w/o Connector), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE (JSY1

Rated Pressure Range: 0.00 to -14.69 psi, Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Unit Switching Function, Initial Value psi; Not Allowed for Use in Japan, Option: Panel Mount Adapter, Calibration Certificate: -, Lead Wire: -

Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Unit Switching Function, Initial Value psi; Not Allowed for Use in Japan, Option: Panel Mount Adapter, Calibration Certificate: -, Lead Wire: -

PE (JSY1: M5, JSY3: Rc1/16, JSY5: Rc1/8)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) ( ): denotes without sub-plate. 60 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY3000 [ ]: AC 2 position single Grommet (G), (H): 10-SY3140(R)-01 G H (A, B port) 1/8 14.5 13.5 38.1 17 19 17 19 Manual override (For mounting) 2 x 3.2 5 35 3 22 A B + B A X PE P EB EA (External pilot port) M5 x 0.8 M5 x 0.8 2 (Pilot EXH port) 44.7 66.9 [69.1]

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

ZR

PE port Pilot valve exhaust port M5 PD port M5 PE port Pilot valve exhaust port M5 PD port Non-locking push type Manual override Non-locking push type Manual override Vacuum release pressure port Vacuum release pressure port EXH EXH 109 PE PE PE PE PD PD PD PD 81.5 80.8 80.8 PD PD PD PD PS PS PS PS PV PV PV PV 52 52 13.5 13.5 50 42 42 PD PS PD PS 35.5 35.5 31.5 33 33 28 28 16.5 17 17 PV

ZX

Manual override Release flow rate adjusting needle Release flow rate adjusting needle (PE port) Interface plate 5.4 70 83.9 Interface plate (PE port) 35.4 35.4 (Mounting hole) 1 (PS port) Air supply port for vacuum switch valve (PS port) Air supply port for vacuum switch valve 1 5.4 (Mounting hole) M5 (or M6) (A port) Vacuum pad connection port M5 (or M6) (PV port) Vacuum supply pressure

Micro Mechanical Valve Series VM1000

Panel mounting hole T.T. 23 16.5 1.5 1.5 3 18.5 Max. 6 M5 x 0.8 (Pilot exhaust port) PE EXH.1 SUP.

42

D side Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC 461 VQ4000 Series Kit (Terminal block box kit) T 38 91 1/8" PE. port 18 18 17.2 PE 41.7 R1 R2 3 5 P 1 SMC 1/2" 1(P), 5(R1), 3(R2) port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port M5 x 0.8 Ground screw 2 x G3/4 Conduit port 10.7 U side 129.5 126.5 3.5 163

VQZ1000/2000/3000

6 VQ4 M5: M5 thread VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (For C3, C4, C6) 9.5 VQZ (47.5) VQD (For M5) 26.5 25.5 5.4 18.5 23.2 mounting hole 5 10 (47.5) 3-M5 x 0.8 1(P), 3(R2), 5(R1) port 9.9 9.9 5 3 1 2-PE port 22.2 die-cast hole (For manifold gasket

2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

Table of Contents

NH NC DTT UU TT UU Auto switch magnet holder M5 x 0.8 (Port) -X GA GA 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) Cushion needle G G 20GB M5 x 0.8 (Hexagon socket head plug) N A M5 x 0.8 (Port) Data Z + Stroke M5 x 0.8 (WW) (WW) (Hexagon socket head plug) 2 x 2-J depth K M5 x 0.8 (Hexagon socket head plug) XX XX M5 x 0.8 (Port) VV VV 2-M5 x 0.8 (Hexagon socket

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.

Series SV

center [M12 waterproof connector type] SV100(R)-W-01 13.3 14.5 13.5 62.6 51.8 14.3 35 19 19 2-3.2 M5 x 0.8 (External pilot port) 17 17 (Mounting hole) 3 A B 22 A B SMC B A PE X EB EA P Manual override (non-locking) A side: Orange B side: Green (Light/Surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 41 11.3 (L = 300 to 5000) 97.8 92.2 M12 waterproof connector

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 14.5 13.3 13.5 54.1 43.3 35 5.8 19 19 2 x 3.2 M5 x 0.8 (External pilot port) 17 17 (For mounting) 3 A B 22 SMC A B B A PE X EB EA P Manual override 41 2.8 A side: Orange B side: Green (Light/surge voltage suppressor) M5 x 0.8 (Pilot EXH port) 89.3 (L = 300 to 5000) 83.7 M12 waterproof connector 53.5 48.5 24.5 16.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators [With External Pilot Specifications] M5 x 0.8 [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 P 1 P 1 A 4 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [1(P), 3(R) port] Applicable tubing O.D

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer