Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) ( ): denotes without sub-plate. 60 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY3000 [ ]: AC 2 position single Grommet (G), (H): 10-SY3140(R)-01 G H (A, B port) 1/8 14.5 13.5 38.1 17 19 17 19 Manual override (For mounting) 2 x 3.2 5 35 3 22 A B + B A X PE P EB EA (External pilot port) M5 x 0.8 M5 x 0.8 2 (Pilot EXH port) 44.7 66.9 [69.1]

Large Size Vacuum Module: Series ZR

) port M5 Ejector unit (600) 80 Release pressure supply (PD) port M5 EXH PE PE PD PD A 81.5 80.8 PD PD PS PS 56.5 PV PV 52 50 PD PS 42 35.5 31.5 33 28 16.5 13.5 17 PV PV PV 12 Common exhaust (EXH) port 1/2 (Rc, NPTF, G) Common release pressure supply (PD) port 2 x M5 Pilot pressure supply (PS) port M5 3 1.5 1 Common pilot supply (PS) port 2 x M5 4.5 2.5 Air pressure supply (PV) port Rc 1/

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Grommet (G) Grommet (G) (H) DC without light/ surge voltage suppressor L2 L1 6.5 (Distance between ports) 28 20.5 (17) 13 72.2 53.2 53.2 50.5 (Distance between ports) PE PE PE PE R P R R R 204.7 202.3 185.7 183.3 55 71 79 P 1.3 27.5 91.7 92.9 (27.3) 3/8 [1(P), 5(R), 3(R) port] M5 x 0.8 4 x 7 (For mounting) 1.2 (PE port) (Pitch) P = 33 74.8 (Lead wire length) 30 G: Approx. 300 H: Approx. 600

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

Series: JSY1 (1000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: T (w/Power Saving Circuit), Electrical Entry: M (M Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 (M5 x 0.8), PE Plate: PE

PE Plate: PE (JSY1: M5, JSY3: Rc1/16, JSY5: Rc1/8)

Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Unit Switching Function, Initial Value psi; Not Allowed for Use in Japan, Option: Panel Mount Adapter, Calibration Certificate: -, Lead Wire: -

Rated Pressure Range: 0.00 to -14.69 psi, Piping: M5 x 0.8, Female Thread, Output Specification: PNP Open Collector 2 Outputs+Analog Voltage/Auto-shift Switching, Unit Specification: Unit Switching Function, Initial Value psi; Not Allowed for Use in Japan, Option: Panel Mount Adapter, Calibration Certificate: -, Lead Wire: -

Series: 1000 Series, Actuation: 2-position, Double, Manifold Type: Body Ported, Power Saving Circuit: w/Power Saving Circuit, Electrical Entry: M Plug Connector w/Lead Wire, 300mm, Cable Length: None, Light/Surge Voltage Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size, Thread Piping: M5 x 0.8, PE Plate: JSY1: M5, JSY3: Rc1/16, JSY5: Rc1/8

Series: 1000 Series, Actuation: 2-position, Double, Manifold Type: Body Ported, Power Saving Circuit: w/Power Saving Circuit, Electrical Entry: L Plug Connector w/Lead Wire, 300mm, Cable Length: None, Light/Surge Voltage Suppressor: with Light/Surge Voltage Suppressor, Manual Override: Push-turn Locking Slotted Type, Port Size, Thread Piping: M5 x 0.8, PE Plate: JSY1: M5, JSY3: Rc1/16, JSY5

5 Port Solenoid Valve Series SV1000/2000/3000/4000

dual 3 port [M12 waterproof connector type] SV200(R)-W-02 18 19 9.5 SJ SY 73.3 17 61.1 17 SV 2 x 4.3 M5 x 0.8 15.5 15.5 48 (For mounting) 9.3 (Pilot EXH port) 4 SYJ A B SMC 35 A B A B SZ PE X EA P EB Manual override A side: Orange B side: Green (External pilot port) (Light/Surge voltage suppressor) VP4 56 5.3 M5 x 0.8 S0700 108.5 (L=300 to 5000) 102.9

ZR

PE port Pilot valve exhaust port M5 PD port M5 PE port Pilot valve exhaust port M5 PD port Non-locking push type Manual override Non-locking push type Manual override Vacuum release pressure port Vacuum release pressure port EXH EXH 109 PE PE PE PE PD PD PD PD 81.5 80.8 80.8 PD PD PD PD PS PS PS PS PV PV PV PV 52 52 13.5 13.5 50 42 42 PD PS PD PS 35.5 35.5 31.5 33 33 28 28 16.5 17 17 PV

ZX

Manual override Release flow rate adjusting needle Release flow rate adjusting needle (PE port) Interface plate 5.4 70 83.9 Interface plate (PE port) 35.4 35.4 (Mounting hole) 1 (PS port) Air supply port for vacuum switch valve (PS port) Air supply port for vacuum switch valve 1 5.4 (Mounting hole) M5 (or M6) (A port) Vacuum pad connection port M5 (or M6) (PV port) Vacuum supply pressure

7.5

(There is a piping of X, PE port in the both sides.)

Micro Mechanical Valve Series VM1000

Panel mounting hole T.T. 23 16.5 1.5 1.5 3 18.5 Max. 6 M5 x 0.8 (Pilot exhaust port) PE EXH.1 SUP.

5 Port Solenoid Valve Series VQZ1000/2000/3000

fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" SJ SY M5 SV D side U side L3 L4 SYJ 4 L5 PE port 1/8 [1(P), 5(R1), 3(R2) port] Output no.

42

D side Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC 461 VQ4000 Series Kit (Terminal block box kit) T 38 91 1/8" PE. port 18 18 17.2 PE 41.7 R1 R2 3 5 P 1 SMC 1/2" 1(P), 5(R1), 3(R2) port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port M5 x 0.8 Ground screw 2 x G3/4 Conduit port 10.7 U side 129.5 126.5 3.5 163

VQZ1000/2000/3000

6 VQ4 M5: M5 thread VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (For C3, C4, C6) 9.5 VQZ (47.5) VQD (For M5) 26.5 25.5 5.4 18.5 23.2 mounting hole 5 10 (47.5) 3-M5 x 0.8 1(P), 3(R2), 5(R1) port 9.9 9.9 5 3 1 2-PE port 22.2 die-cast hole (For manifold gasket

2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

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port 24 X 17.5 (3.8) X 12 M5 x 0.8 External pilot port 1/8, 1/4 1(P) port 19.5 34 39 Refer to page 24 separately when piping to PE port is required.