2

R A B C D E F G Part no.

Table of Contents

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

5-Port Solenoid Valve

Connector SS5Y3-50(R)F -01l(D) Stations U D B 1 2 D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override 45.1 (Pitch) P = 12.5 Applicable connector: D-sub equivalent ( ) JIS-X-5101 MIL-C-24308 ( ) Push-turn locking slotted type: Press, then rotate it.

V

(Total Travel) From free position to total travel position P U S H B U T T O N C O L O R R Red G Green B Black S Steel ACCESSORIES M A N I F O L D T Y P E 21 T O P P O R T E D S A F E T Y Caution I f t h e s e v a l v e s a r e u s e d f o r g u a r d i n g o r s a f e t y i n t e r l o c k s y s t e m s , i n s t a l l a t i o n a n d application should be as per BS5304: 1988.

ZP

Form w 1 Material 12 N S U F GN GS 02 2 2.6 1.2 0.5 04 4 4.8 1.6 0.8 06 6 7 2.5 08 8 9 1 ZP U Y C 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 Single unit 10 to 50 w q ZP 10 U N D Model A B C D E Y q Pad dia.

Table of Contents

D-F7WV D-F79F D-A7H D-A80H D-F7 D-J79 D-F7W D-F7BAL D-J79W D-F79F D-F7NTL DD-M9 D-M9V D-F7V D-A7 D-A80 D-F7BAVL D-J79C D-A79W D-A9V D-M9V D-A73C D-A80C D-A79W D-A9 D-A9V Bore size (mm) D-A7 D-A80 D-F7WV D-F9WV D-F9BAL -X D-F9BAL D-F9WV D-F9W 20Data B A B A B A B A B A B A U U U U U U U U U 12 16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18

&snac

S a f e t y c a u t i 0 n s E a c h a n d i n d i v i d u a l p r o d u c t h a v e i t s o \ d n o p e r a t i n g s p e c i f i c a t i o n . 0 p e r a t e p r o d u c t w i t h o u t o f s p e c i f i c a t i o n c o n d i t i o n s c o u l d t e a d t o f a i l u r e o f p r o d u c t .

Table of Contents

D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 40 43 18.5 19.5 6.2 8 6 3.3 32 6.5 10 1.7 12 12 3 27 21 21 50 53 33 7.5 3.8 6.2 12 5 8 8 6 13 1.8 15 12.5 3.5 27.5 21.5 21.5 16 1.2 18 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Stability of suction position,

D D D 48.9 37.6 37.6 48.9 5 5 Width across flats 10 66 63 10 Width across flats 10 83 80 10 D-D D-D 28 28 24 24 12.5 12.5 Dimensions Dimensions Model A B Weight [g]/Pad material N/U/CL S F ZP3E-Y63UMJB10 88.1 148.1 424 421 445 ZP3E-Y63UMJB30 113.1 173.1 453 451 474 ZP3E-Y63UMJB50 133.1 193.1 476 473 497 Model A B Weight [g]/Pad material N/U/CL S F ZP3E-Y80UMJB10 88.1 148.1 478 473 513 ZP3E-Y80UMJB30

Metal Seal/Rubber Seal Series VQ Body Ported

F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P F 25P T2 T1 Type Note) Note) Note) Max. points 14 8 8 16 16 16 16 16 14 Note) Due to the limitation of internal wiring.

ZP

D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 40 43 18.5 19.5 6.2 8 6 3.3 32 6.5 10 1.7 12 12 3 27 21 21 50 53 33 7.5 3.8 6.2 12 5 8 8 6 13 1.8 15 12.5 3.5 27.5 21.5 21.5 16 1.2 18 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc

ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

Modular Design with Uniform Body Style

] Inlet pressure [MPa] 12 AC20-D to AC60-D Series Dimensions AC20-D AC30-D S N F A A J M N F S 2 x P1 (Port size) 2 x P1 (Port size) J M R R V2 V1 Q1 Q1 B C C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D 01C VV5FS3 2 05 02 Thread type Series VFS3000 Manifold Port size Nil N Rc NPT NPTF G Symbol 02 03 A, B P, EA, EB Connector mounting direction U side Plug-in type with multi-connector T 1 4 Rc Rc Rc Mixed F 3 8 1 2 D side mounting U side mounting D U M Option D side Symbol Stations Plug assembly (Option) Refer to page 1227.

Base Mounted Metal Seal/Rubber Seal Series VQ

T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial transmission) Kit F kit (D-sub connector) F 25P U S P 26P U S F A 15P U S P C 20P U S P 16P U S B P A 10P U S S Type T1 T2 Max. points Note) 16 Note) 16 16 16 Note) 16 14 14 8 8 Note) Due to the limitation of internal wiring.

ZP

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

V

30.5 15 46 12 10 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 D I M E N S I O N S PA D D I A M E T E R S 40, 50 F L AT T Y P E F L AT W I T H R I B G:M5x0.8 G:M6x1 Y Model A B C D F L AT T Y P E F L AT W I T H R I B E F E F Flat Flat with rib H:M6x1 H:M8x1 Y ZPT10 U C 10 12 12 17 20 38 25 43 3 1.7 Model A B D E C F G C F G Flat Flat with rib ZPT13 U C 13 15 12 17 20 38 25 43 3 1.8

0.4

EX510 Stations 1 2 3 4 5 6 7 8 9 U side D side 3m F kit P D-sub connector cable AXT100-DS25-030 kit Cylinder port fitting C6: One-touch fitting for 6 J kit Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) T kit SS5Q13-09FD2-D 1 set (F kit 9-station manifold base) SQ1130-51-C6 4 sets (2 position single) SQ1230D-51-C6 4 sets (2 position double) SSQ1000-10A-3 1 set