Vacuum Unit

Refer to ) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to ) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B. (Be careful not to break the connector clip.) 5) Remove the tension bolt. 6) Remove the end plate D assembly. 7) Remove the connector housing assembly from the end plate D assembly.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 21 7 35 17.5 A A A A A 20.9 (DIN 22.1) (DIN 6.7) 1/8 (P, R port) 3.5 5.5 (Pitch) P = 16 18 Built-in speed controller (Station 1) (Station n) Max. 13.5 47.5 (Light/surge voltage suppressor) 52.6 [59.6] + + + 37.2 A A 18.5 5.5 24 B B (Pitch) P = 16 23 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 85.4 77.9 52.6 [59.6] 66.6 M8 x 1 57.1

Rubber seal 5 Port Solenoid Valve Series SYJ7000

B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 107.5 100 74 [81] M8

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Series VCL

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

o

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

ZQ-OM01401

-B 3.3 3.3.1 1 2 3ISO8573-1: 2010 (JIS B 8392-1: 2012)2:6:3 ISO8573-1: 2010 (JIS B8392-1: 2012) AFM AFF AF AR 2 : 6 : 3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 oC) ( (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 13 - No.ZQ-OM01401-B 3.4 3.4.1 M546 0.3 to 0.5[MPa

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

SYJ72R is only for manifold use. 35 Series SYJ700 Construction c f a e b d N.C. N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No.

3M/SMseries

-1.8WDC WF333O Exhaust Conter NVF343O GNced Center (B) (A) (B) (a) 01 c2 \ t \ T I'f E I J E Z (R2)(PxFl) (R2XPXR1) Prssure Center NVF3530 (B) (A) Spej;ifications -, Flurd-Art f Operatangprssurcrange2Positionsingle2O-12gPSlS(1.5-9kgF) U 2 pooition double-1 5 1 28 PSI (1 9kgf/cm'?

VT317

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

CM2x-OM0230Q

D-A90A93A96A90VA93VA96V 3. <> () () 6080 D-M9A(V) M3M3 0.6 0.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1) (M2.5) 2) M3 BM5 12 - 13 - 3. 14 - 1) 2)1 (30) * *(NC=b )(D-M9E(V)) 15 - / 16 - 3.