I

|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)

Compact Vacuum Unit Ejector/ Vacuum Pump System

When increasing the number of stations, order the required number of single unit of the body type 3 valve (b) and the required number of either the pressure sensor (d) assembly (c) or the vacuum pressures switch assembly (d).

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Order with the option symbol -D to specify DIN rail mounting style.

VDW30/40-XF

/Dimentions Male Quick Fastener Dimensions Table A 60.15 Port size (Quick fastener) Port size (Quick fastener) P7 P10 P7 P10 A B C D E 7 0 0.05 9.90.05 15 10 0 0.05 12.850.05 20 Clip part no. A B C D VDW30-CP7 26 7 9 14 VDW40-CP10 28 10 10 15 C D 2.50.1 9 or less 1.6 or more 2.5+0.25 0 2.5+0.25 0 D B 120.1 13 17 O-ring 2 or more O-ring dimentions P7 P10 (Nominal no.)

ZB-OM00301

U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22 28 34 41 47 53 60 66 72 79 85 ++ 5 40g 5 + 5g 5 + 41g 266g 37 - No.ZB-OM00301 0.3 N.C. / ZB03-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.4 N.C. / ZB04-K1/J1 (0.35MPa ) [L/min(ANR)]

Size: 2 (Series 20), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: S (Stainless Steel), Seal Material: F (FKM), Orifice Diameter/Port Size: 702 (Orifice Diameter: ø7.1mm; Port Size: 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Oil-free Option: None, Bracket: B (w/ Stainless Steel Bracket)

1

(mm) Auto Switch Mounting Height Auto switch model Band mounting D-H7l/H7lW D-H7NF D-H7BA D-C7l/C80 D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9l D-M9lW D-M9lA D-A9l D-H7C D-C73C D-C80C Hs Hs Hs Hs Hs 6 15 16 15 18 17.5 10 17 18 17 20 19.5 16 20.5 21 20.5 23.5 23 Bore size (mm) Auto switch model Rail mounting D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-F7l/J79 D-F7lW/J79W D-F7BA/F79F

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) Auto switch model D-A9 D-M9 D-M9W D-M9A D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G59F D-F5 D-J59 D-F5W D-J59W D-F59F D-F5NT Note 2) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44C D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A9V D-M9V D-M9WV D-M9AV Note 2) D-P4DW D-P3DW Hs Ht Hs Ht Hs Hw Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs

Air Cylinder Series CM2

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

SMC Pneumatic Clean Series

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

CJ2X/CUX/CQSX/CQ2X/CM2X

/C8 D-C73C/C80C D-B5/B6 D-B59W D-A3/A4 D-A3A/A44A D-A3C/A44C D-A7/A8 D-A7H/A80H D-A73C/A80C D-A79W D-A5/A6 D-A59W D-A9 D-A9V D-Z7/Z8 D-H7 D-H7C D-H7BAL D-H7F D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F7F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F5F D-F5NTL D-G39C/K39C D-M9 D-M9V D-F9W D-F9WV D-F9BAL D-Y59A/Y7P/Y59B

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

90

D-G

VZ5000

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Manifold Specifications

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

Manifold Specifications

Note Manifold block assembly C6: A, B port with One-touch fitting for 6 C8: A, B port with One-touch fitting for 8 C6 C8 VQ7 VZ5000-50A-1q (a) Bolt (Both sides) For D side, With D-sub connector and P/R port with One-touch fitting for 10 For U side, With D-sub connector and P/R port with One-touch fitting for 10 SUP/EXH block assembly VZ5000-51A-1D w EVS D side SUP/EXH block assembly End block

Manifold Specifications

O.D.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations.