High Vacuum Angle Valve

XLC/XLCV Series How to Order XLC M9N A 16 Flange size 16, 25, 40 XLC M9N A 50 1 Flange size 50, 63, 80, 100, 160 q t y w e r u XLC16 to 40 q Flange size e Pilot port direction w Flange type Rear flange surface Applicable flange 16, 25, 40, 50, 63, 80 100, 160 63, 80, 100, 160 Type Symbol Size 16 25 40 50 63 80 100 160 Symbol Nil K L M Pilot port direction Flange side Left flange surface Rear

Smooth Cylinder/Low Speed Cylinder

80 100 Applicable pin O.D.

Table of Contents

Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

LJ1H

(Incremental encoder) 100 W PNP, A contact 1pc.,B contact 2pcs.

CV/MVGQ

Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 10 35 55 75 80 90 100 100 100 75 80 90 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (

CV/MVGQ

2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side RS H A 15 90 100 110 35 100 100 100 100 1 Different sides RZQ 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2,

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

S2 S3 S6 S7 AC servo motor (Incremental encoder) 100 W PNP 2pcs. AC servo motor (Incremental encoder) 200 W PNP 3pcs.

Hydraulic

(mm) S l R T V W H ZZ e f h Z 40 37 106 11 7.5 8 66 188 55 25 92 214 50 43 112 11 10 9 73 207 60 28 99 233 1/4 stroke 63 47 116 11 12 10 80 216 65 30 106 242 80 57 127 11 16 13 90 243 80 32 116 269 100 66 137 12 20 16 100 263 100 35 123 286 1/5 stroke 125 77 137 12 20 16 100 267 100 35 123 290 160 94 155 12 24 20 108 297 120 38 131 320 94 Series CHA Dimensions Rear flange type: CHAG V T

ISO Cylinder

32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data

Air Cylinder

264 24 20 4 100 M26 x 1.5 106 Rc1/2 122 264 24 20 4 CS1 CS2 * Refer to w/rubber bumper for the female rod end.

CRB2/CRBU2/CRB1

180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 180 190 270 280 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 90 100 10 1.2 1.5 15 2.9 3.7 20 6.1 7.9 30 15 20.2 21 25 40 31.5 41 30 32 49 51 66 68 70 73 94 97 118 121 88 93 138 143 188 193 186 197 281 292 376 387 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5 33 34 48 52 98 104 136 146 272 294 50 Single vane Double vane 63

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

4/5 Port Solenoid Valve

(Example) SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

Mechanically Jointed Rodless Cylinder Series MY1

Stroke Range Series Bore size (mm) Standard stroke (mm) Long stroke (mm) Series Bore size (mm) Standard stroke (mm) Long stroke (mm) 2001 to 5000 (Up to 3000 for 10, 16) 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 10, 20, 30, 40, 50 MY1B 100 to 2000 75, 100, 125, 150 10, 15 CXSW MY1M(W) 100 to 2000 2001 to 5000 (3000 for 16 only, 3000 for MY1MW) 16, 20, 25, 32, 40, 50, 63 10, 20, 30, 40, 50,

5

Bore size (mm) U V W Weight (g) YA-03 32, 40 6 18 56 55 Allowable Eccentricity (mm) YA-05 50, 63 8 22 67 100 Bore size 32 40 50 63 80 100 YA-08 80 10 28 83 195 Eccentricity tolerance 1 1.5 2 YA-10 100 12 36 100 340 Backlash 0.5 Joints are not included with the A or B type mounting brackets. Order them separately. (Example) Bore size 40 Part no.

MY1

100) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

AC Servo Motor Driver (CC-Link Type ）

Regenerative power [W] Driver Built-in regenerative LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSC2-T5 30 LECSC2-T7 10 30 100 LECSC2-T8 10 30 100 LECSC2-T9 20 30 100 (2) Parameter setting Set parameter No.PA02 according to the option to be used.

Basic type / Direct mount type Series CY3B/CY3R

Load Mass W CY1HT32 W Maximum Load Mass (kg) 50 40 30 CY1H25, CY1HT25 25 CY1H20 20 16 CY1H15 Wmax Model 10 9 Load mass kg CY1H10 4.0 CY1H10 5 4 3 CY1H15 9.0 2 CY1H20 16.0 1 CY1H25 25.0 W CY1HT25 0.5 CY1HT32 40.0 70 100 300 500 1000 W Piston speed mm/s Graph (1) Moment M1,M3 M2 Allowable Moment (Static moment/Dynamic moment) 100 100 85 96 CY1HT32 CY1HT25 CY1H25 CY1H20 CY1H15 CY1HT32 CY1HT25

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

100 100 45 32 64 M12 x 1.75 22 Rod end nut L1 7-6-150 151 Compact Cylinder with End Lock Series CBQ2 Allowable Kinetic Energy Allowable Lateral Load at Rod End With Rubber Bumper 0.5 MPa 0.4 MPa With Auto Switch (Anti-lateral load) 200 300 100 100 100 50 40 30 Allowable lateral load W (N) 50 CUJ 80 100 Load weight (kg) 63 CU 80 20 63 10 50 CQS 10 50 40 32 5 40 CQM 5 4 3 25 32 CQ2 25 20 1

Environment

LEFS16/Ball Screw Drive Horizontal Vertical 16 6 14 Lead B Lead B 12 Work load: W [kg] Work load: W [kg] 4 10 Lead A 8 Lead A 6 2 4 2 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 700 800 Speed: V [mm/s] Speed: V [mm/s] LEFS25/Ball Screw Drive Horizontal Vertical 20 30 Lead B 25 15 Work load: W [kg] Work load: W [kg] Lead B 20 10 15 Lead A Lead A 10 5 Lead H Lead H 5 0 0 0 100 200