PAB-OM-K007

Precautions for installation P3 3. Description and function of individual port P3 4. How to use P3 to 4 5. Maintenance and check P4 6. Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9.

PSE200

Measuring mode kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value

PSE530/200

kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 ZSE ISE CH1 CH2 CH3 CH4 SET OFF P2 P1 P4 P3 PSE High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Z I SE3 Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON PS MPa Switch output 1 & 2 kPa OFF Z I SE1 2 OUT1 Courtesy of

0.4

C3 C4 C6 M5 With 3.2 one-touch fitting With 4 one-touch fitting With 6 one-touch fitting M5 thread Without one-touch fitting (With clip) F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J/S kit for 2 to 12 stations/Double wiring P/J/S kit for 13 to 24 stations/Double

Base Mounted Metal Seal/Rubber Seal Series VQ

Electrical entry EXH block base assembly U side D side Black screw For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12 stations)/Double wiring For P, G, T, S kit (13 to 24 stations)/Double wiring For P, G, T, S kit (2 to 24 stations)/Single wiring L0 kit L1 kit L2 kit F1 F2 F3 P1 P2 P3

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Measuring mode kPa OUT1 Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Without One-touch fitting (With clip) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J

CE2

Bore size (mm) 80 NLP-80A PDU-25Z PSD-33 x 25 P75 DSM-30 CA80-1609 CA80-1604 P5 Description Material No. 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Without One-touch fitting (With clip) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/J

0.4

VQ7 Enclosure C4 C6 C8 C0 F0 F1 F2 F3 P1 P2 P3 L0 L1 L2 T1 T3 M1 M2 M3 With 4 One-touch fitting With 6 One-touch fitting With 8 One-touch fitting Without One-touch fitting (With clip) Nil W Dust-protected Dust-tight, Water-jet-proof (IP65) Without lead wire F kit for 2 to 12 stations/Double wiring F kit for 13 to 24 stations/Double wiring F kit for 2 to 24 stations/Single wiring P/S kits

CE2

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

Table of Contents

Description Material 40 NLP-40A PDU-16Z PSD-22 x 16 P44 DSM-20 CA40-1606 CA40-1601 P3 50 NLP-50A PDU-20Z PSD-27 x 20 P50 DSM-25 CA63-1608 CA50-1602 P3 63 NLP-63A PDU-20Z PSD-27 x 20 P60 DSM-25 CA63-1608 CA63-1603 P3 100 NLP-100A PDU-30Z PSD-38 x 30 P90 DSM-35 CA100-1610 CA100-1605 P5 Piston seal Rod seal A Rod seal B Brake piston seal Cushion seal Piston gasket Tube gasket Cushion valve seal

PAB-OM-K008

Precautions for installation P3 3. Description and function of individual port P3 4. How to use P4 5. Maintenance and check P4 6. Specification and how to order P5 to 6 7. Discharge capability P7 to 8 8. Troubleshooting P9 to 10 9.

LOCK UP VALVE

NBR 2 JIS B 2401, P8 O ring NBR 2 JIS B 2401, P5 O ring NBR 1 JIS B 2401, P3 O ring NBR 2 -9- -10-10- -11#1 -11-11- Revision A Format change and content review B Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the

ITV

S1 S2 Preset pressure OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 For safety reasons, it is recommended that one of the preset pressures be set to 0MPa. 1.12-16

Proposals for Energy Saving

The P3 pressure will decrease. When the pressure is stabilized, press the SET button. 2. Select a flow rate display unit. Select a flow rate display unit, and then press the SET button. (Flow rate display unit) F_1 U_1 F_1 U_2 SELECT P3 U_2 l/min U_1 Press the SET button. CFM Press the SET button. Complete 4. Calculate the flow.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

.: 9.5 or more) (6.4) 14 14 59o0.05 2 x 6H7 through +0.012 2 x M2.5 x 0.45 (For mounting the D-P3; auto switch mounting bracket) Auto switches can only be mounted on this surface 0 (216) 17.5 4 x 6.6 through 59 Rc1/8 Unlocking port 50.5 7 15.5 42 57.5 Clamp arm position Dustproof cover A B Same as the port side 2 x Rc1/8 Opposite side of the port Rib for mounting Arm the auto switch A B Port

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.