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DIN terminal (With surge voltage suppressor) Example) VX2 Z Z 1A 1 2 A Electrical option With light Other option Conduit terminal (With surge voltage suppressor) 3A 3B 3C 3D 3E 3F 3G 3H 3V 3J 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC Without DIN connector DIN terminal (With surge voltage suppressor) Options marked with are available for Class H coil.

Size/Port: 3F [One-touch Fitting Type, Applicable Tube OD: ø4, Flow: 30 L/min (ANR)]

AC Servo Motor Driver (CC-Link Type ）

ZSP 0F Variable gain selection CDPS 23 Rough match CPO 24 Home position return completion ZP 25 Position range POT 26 Temporary stop PUS 27 Movement completion MEND 38 Point table No. output 1 PT0 39 Point table No. output 2 PT1 3A Point table No. output 3 PT2 3B Point table No. output 4 PT3 3C Point table No. output 5 PT4 3D Point table No. output 6 PT5 3E Point table No. output 7 PT6 3F

AC Servo Motor Driver (Network card type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 A B C D E F -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F 70 66 62 59 56 53 51 48 46 45 43 41

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Device Setting Device 00 Always OFF 0A Always OFF (Note 2) 01 For manufacturer setting (Note 3) 0B For manufacturer setting (Note 3) 02 RD 0C ZSP 03 ALM 0D For manufacturer setting (Note 3) 04 INP (Note 1) 0E For manufacturer setting (Note 3) 05 MBR 0F CDPS 06 DB 10 For manufacturer setting (Note 3) 07 TLC 11 ABSV (Note 1) 08 WNG 12 to 1F For manufacturer setting (Note 3) 09 BWNG 20 to 3F

LEC-OM02904

10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 7 16 7 7.7 2 2 24.5~2250Hz 2(No.PB45) ()150ms (1) 2 t t 2 2 2 2 7 17 7 (2) No.PB4522 [Hz] PB45 No.PB45 0 2 2 [Hz] [Hz] [Hz] 0 1 2 3 4 5 6 7 8 9 A B C D E F 40.0dB 24.1dB 18.1dB 14.5dB 12.0dB 10.1dB 00 01 02 03 2250 1125 20 21 22 23 24 25 26 27 28 29 2A 2B 2C 2D 2E 2F 30 31 32 33 34 35 36 37 38 39 3A 3B 3C 3D 3E 3F

AC Servo Motor Driver (CC-Link Type ）

ZSP 0F Variable gain selection CDPS 23 Rough match CPO 24 Home position return completion ZP 25 Position range POT 26 Temporary stop PUS 27 Movement completion MEND 38 Point table No. output 1 PT0 39 Point table No. output 2 PT1 3A Point table No. output 3 PT2 3B Point table No. output 4 PT3 3C Point table No. output 5 PT4 3D Point table No. output 6 PT5 3E Point table No. output 7 PT6 3F

OMS0020

14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E ~ 31 1F US 63 3F

OMU0023

14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E ~ 31 1F US 63 3F

FGX-OM-R008

Caution -4- Specifications Model S F E 11 Port size Male thread type Plug-in type One-touch fitting type Max. flow capacity Symbol Port size Symbol Port size Symbol Applicable L/min (ANR) tube O.D. 11 M50.8 3 3A 4 3F 4 30 42 R1/8 4B 6 4G 6 65 52 R1/8 5C 8 5H 8 130 53 R1/4 130 73 R1/4 7D 10 7J 10 200 Accessory (Bracket) S F E B R 3 Symbol Applicable model 3 SFE3 4 SFE4 5 SFE5 6 SFE7

This is a legacy product, and replaced byVFS4100-3F, VALVE SOL/PILOT 110VAC *LQA, VALVE, VFS4000 SOL VALVE 4/5 PORT, 2D, VFS4000, 1.386 lb

Air Pilot Operated Series NVSA

Inc" Air PiSot tlperated Series HV$A ,3f .,'5.

7

DIN terminal (With surge voltage suppressor) VXD XL Lead wire length XL1 XL2 XL3 XL4 600 mm 1000 mm 1500 mm 3000 mm Conduit terminal (With surge voltage suppressor) 3A 3B 3C 3D 3E 3F 3G 3H 3V 3J 24 VDC 100 VAC 110 VAC 200 VAC 230 VAC 48 VAC 220 VAC 240 VAC 24 VAC 12 VDC DIN terminal (With surge voltage suppressor) Enter symbols in the order below when ordering a combination of electrical

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3F (Tube O.D. 1/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3F (Tube O.D. 1/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

STANDARD TYPE IONIZER PACKAGE, BAR IONIZER SEPARATE CONTROLLER, O36, 1783.488 lb

STANDARD TYPE IONIZER PACKAGE, BAR IONIZER SEPARATE CONTROLLER, O36, 1905.488 lb

STANDARD TYPE IONIZER PACKAGE, BAR IONIZER SEPARATE CONTROLLER, O36, 2881.912 lb

STANDARD TYPE IONIZER PACKAGE, BAR IONIZER SEPARATE CONTROLLER, O36, 2593.552 lb

Ionizer/Standard Type, IONIZER ACCESSORIES, IZD, IZE, IZH, 865, 999 lb