Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: None, Bracket: -, Automatic Cleaning Unit, Louver: -, Filter: -

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: None, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: w/Automatic Cleaning Unit & Adjustable Louver, Filter: w/Filter

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 10m, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: w/Adjustable Louver, Filter: w/Filter

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: None, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: w/Adjustable Louver, Filter: -

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 10m, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: None, Filter: w/Filter

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: None, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: w/Automatic Cleaning Unit, Filter: w/Filter

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: None, Automatic Cleaning Unit, Louver: w/Automatic Cleaning Unit & Adjustable Louver, Filter: w/Filter

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: w/AC Adapter, w/o AC Cord, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: w/Automatic Cleaning Unit, Filter: w/Filter

Type: Fan Type, Indicator: Charged/Discharged Status / Cleaning / Error, Additional Function: Air Volume Adjustment / Error Signal Output, Air Flow/Consumption Amount(m³/min): 4.4, Ion Balance: ±5V, Ion Balance Adjusting Function: Manual, Operating Pressure Range(MPa): -, Power Supply: DC24V, Options: -, Accessories/options: ordered separately: With power supply cable (3 m), I/

Model: 31 (4.4 m³/min)

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

1

P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33 Type

A

I O N S S I D E S U P P O R T U N I T C O U N T E R B O R E D (S I D E S U P P O R T A) D I M E N S I O N S S T R O K E A D J U S T I N G U N I T Stroke adjustment unit Absorber stroke Shock Absorber D I M E N S I O N S S I D E S U P P O R T U N I T TA P P E D (S I D E S U P P O R T B) Cushion screw Model h EA EB EC ED EY FA FB FC FF FH TA TT ML2B25 3.5 10 20 6.5 60 53.5 46.7 33 13 6 12 7

2

INDEX 166 Series AF10-A to AF60-A Dimensions AF10-A/AF20-A AF50-A/AF60-A D U M J N T Bracket (Option) S Bracket (Option) R R B C V Q OUT IN J M U S N T 2 x P (Port size) D R V Q B C IN OUT Clearance for maintenance G Drain A AF30-A to AF40-06-A N T J M 2 x P (Port size) Bracket (Option) U D S V Q IN OUT B C 2 x P (Port size) Clearance for maintenance G Drain A E Clearance for maintenance

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY340 SY540 SY340 SY540 SY340 SY540 SY740 + + + + P. 198 EA P EB Type 41P P. 214 EA P EB In common Type 42 P. 198 + + + + + + + + EA P EB EA P EB SY340 SY540 SY740 Type 42P P. 214 EB P EA In common Type 43 SY940 + + + + P. 208 Base mounted Stacking type Flat ribbon cable Manifold stations can be increased or decreased.

Table of Contents

) MY1C63 Horizontal collision: P = 0.5 MPa Shock absorber 2000 1500 H unit Collision speed (mm/s) 2.

&snac

i O N : S , P S ) f i t t i n s i n g u s e p u r s i n s o f t u b e a T u b e s i z e w i t h o n e t o u c h ( o p t i o n P , P 5 ) f o r p u r g p l e a s e r e f e r t o P . ?

0.4

[Fieldbus system]) EX600 P. 17 VQC1000/2000 S kit (Serial transmission) EX250 P. 21 VQC1000/2000 S kit (Serial transmission) EX126 P. 23 VQC1000/2000 F kit (D-sub connector) P. 25 VQC1000/2000 P kit (Flat ribbon cable) P. 27 VQC1000/2000 T kit (Terminal block box) P. 29 VQC1000/2000 L kit (Lead wire) P. 31 VQC1000/2000 M kit (Circular connector) P. 33 VQC1000/2000 Construction VQC1000/2000