Table of Contents

02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11 12 Series VFR2000 Construction 2 position single 2 position double VFR210 VFR220 Courtesy

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3.5 15 23.5 20.5 22 10 33 20 14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 15 MM M8 x 1.25 NA 24 NN M20 x 1.5 P M5 x 0.8 RR 9 S 55 U 11.5 Z 98 ZZ 107 Bore size 20 25 32 40 M10 x 1.25 30 M26 x 1.5 M5 x 0.8 9 56 11.5 102 111 M10 x 1.25 34.5 M26 x 1.5 Rc1/8 12 62 14.5 111 123 M14 x 1.5 42.5 M32 x 2 Rc1/8 12 67 14.5 124 136 Pivoting Clevis Bracket (mm) LD 6.8 LF 15 LG 30 LH 30 LP

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Plug-in Nil F G Rc T0806 x 1 m 02 VFS2000 LS C Non plug-in N NPT T1075 x 1 m D Series VFR2000 Rc 1 4 T NPTF VFR2000 LP B 02 Plug-in T1209 x 1 m E VFS2000 LS B 02 Non plug-in Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 1234 Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in

Air Slide Table Series MXJ

Note -X MXJ-LP Common for all models Individual -X 1.5 0.002 0.014 3 175 Series MXJ The graphs below show the table displacement when the static moment load is applied to the table. The graphs do not show the loadable mass. Refer to the Model Selection for the loadable mass.

MXU

Expression of Calculation of Allowable Fp, Fy, Fr Pitch moment Yaw moment Roll moment Fp = Lp x Cp x (St/12) (N) Fy = Lr x Cy (N) Fy = Ly x Cy x (St/12) (N) Lp: Distance between table and loading point (mm) Cp: Correction value of moment center position distance (mm) St: Stroke (mm) Ly: Distance between table and loading point (mm) Cy: Correction value of moment center position distance (

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XB XA H9 XA 25ALEC IP65 equivalent (Dust-tight/Water-jet-proof): LEY63DNll-lP (View Z) LEC S Rc1/8 Vent hole tap LEC SS-T LEC Y When using the dust-tight/water-jet-proof (lP65 equivalent), correctly mount the fitting and tubing to the vent hole tap, and then place the end of the tubing in an area not exposed to dust or water.

CM2

239 264 25 12.5 25 37.5 50 75 100 125 146 159 171 184 209 234 259 155 168 180 193 218 243 268 32 12.5 25 37.5 50 75 100 125 151 164 176 189 214 239 264 163 176 188 201 226 251 276 40 12.5 25 37.5 50 75 100 125 180 193 205 218 243 268 293 192 205 217 230 255 280 319 With Air Cushion Built-in One-touch Fittings Clevis Pivot Bracket Bore size (mm) Bore size (mm) Bore size (mm) LZ LY LV LT LP

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

SL5200

The high pressure (inlet) port is labeled with an HP mark and the low pressure (outlet) port is labeled with an LP mark. In the case of two stage regulator, the monitor port of first stage outlet pressure is labeled with MP mark. Make sure to connect the port labeled with HP mark, to the high pressure.

Size: 30, Thread: N (NPT), Port Size: 04 (1/2), Options: LP (L + P), -A: -A

Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Options: LP (L + P), -A: -A

Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Options: LP (L + P), -A: -A

Size: 40, Thread: N (NPT), Port Size: 03 (3/8), Options: LP (L + P), -A: -A

Size: 20, Thread: N (NPT), Port Size: 03 (3/8), Options: LP (L + P), -A: -A

Size: 40, Thread: Rc, Port Size: 03 (3/8), Options: LP (L + P), -A: -A

Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Options: LP (L + P), -A: -A

Size: 30, Thread: N (NPT), Port Size: 03 (3/8), Options: LP (L + P), -A: -A

Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Options: LP (L + P), -A: -A

Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Options: LP (L + P), -A: -A

Size: 30, Thread: Rc, Port Size: 03 (3/8), Options: LP (L + P), -A: -A