A

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z S T R O K E Hundredths Of An Inch

smcmaintenancepartslist

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Modular F.R.L. Units

Applicable Model Model AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 30 AR B 03 X406 q e w y r t 0.4 MPa setting Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphabetic order.

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

ZP

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

Vacuum Pad

@ ZP3-T(04/06/08)B;(JB/K)15-@ ZP3-T(04/06/08)UM(JB/K)20-@ ZP3-T(04/06/08)B;(JB/K)20-@ ZP3B-T2A(J/K)3-B5 Note 1) ; in the table indicates the pad material.

ZP

Basic Type ZP Series Model Connection thread Tightening torque [Nm] ZP(2 to 8)(J/K)--A8 M8 x 1 1.5 to 2.0 ZP(10 to 32)(J/K)--A10 M10 x 1 2.5 to 3.5 ZP(40/50)(J/K)--A14 M14 x 1 6.5 to 7.5 Lock ring Adapter Compact Type ZP3 Series Model Connection thread Tightening torque [Nm] ZP3-(015 to 035)JM6 x 0.75 1.5 to 1.8 ZP3-(015 to 035)KM8 x 0.75 2.0 to 2.5 ZP3-(04 to 16)(J/JB/K)2.

Modular Design with Uniform Body Style

Applicable Models/Drain Capacity Specifications Model AW20(K)-D AW30(K)-D AW40(K)-D AW40(K)-06-D AW60(K)-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 Made-to-order part no.

Table of Contents

-X465 ISE30---L 0.1 to 1 0.001 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K)AR60(K) Model AV Model Set pressure range (MPa) 3/4, 1 1 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 1/8, 1/4 Port size AU Set and display resolution (MPa) Pressure switch Power supply voltage AF 45 mA or less (70 mA or less for current

Compact Hydraulic Cylinder

3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Modular F.R.L. Unit

Specifications Applicable models Part number suffix X465 Model AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) Model ISE30---L Port sizes 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Set pressure range (MPa) 0.1 to 1 Pressure switch Set and display resolution (MPa) 0.001 Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection

High Vacuum Angle Valve

83 7-1 90 u o K flange i 83 KF flange 2-1 0.2 112 q 114 90 O-ring Part No.

CRB2/CRBU2/CRB1

Shaft type W1 = J K T J K T J K T J K T Size L1 = L3 = 50 11.5 to 39.5 1 to 6 Y3 L22 L4 = 50 L12 11.5 to 39.5 1 to 6 X3 L2 = 63 12.5 to 45 Y = Y3 L22 1 to 7.5 63 L12 1 to 7.5 12.5 to 45 X3 80 13.5 to 53.5 Y3 L22 1 to 8.5 80 L12 1 to 8.5 X3 13.5 to 53.5 X = 100 18.5 to 65 Y4 L22 1 to 12.5 W2 100 L12 1 to 12.5 X4 18.5 to 65 (mm) Caution Size Size W1 W2 W1 W2 L1L3 L2L4 L1L3 L2L4 For the shaft

Table of Contents

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: K Applicable shaft types: J, K, T (mm) X L3 max W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size J K T J K T J K T J K T Size W1 = L3 = L1 = 10 10 0.5 to 2 4.5 to 14 0.5 to 2 Y 1 L2 1 6.5 to 14 L1-1 X 3 L4 = 15 15 0.5 to 2.5 Y = 5.5 to 18 0.5 to 2.5 Y 1.5 L2 1 8 to 18 L1-1 X 4 L2 = 20 20 6 to 20 0.5 to 3 0.5 to 3 Y 1.5 L2 1 9 to 20 L1-1 X 4.5 X = 8.5 to 22