SV

7 w e r !8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

Thermo-chiller/

A Air-cooled refrigeration Pipe thread type Power supply Nil Rc F G (With Rc-G conversion tting set) N NPT (With Rc-NPT conversion tting set) Single-phase 200 to 230 VAC (50/60 Hz) Water-cooled Refrigeration HRR U W 20 012 (UL Standards) Cooling capacity Option 2 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None Y With feet

Thermo-chiller/

A Air-cooled refrigeration Pipe thread type Power supply Nil Rc F G (With Rc-G conversion tting set) N NPT (With Rc-NPT conversion tting set) Single-phase 200 to 230 VAC (50/60 Hz) Water-cooled Refrigeration HRR U W 20 012 (UL Standards) Cooling capacity Option 2 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None Y With feet

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note 3) The weight W is the value for the manifold only. To obtain the weight with solenoid valves attached, add the solenoid valve weights given on page 5 for the appropriate number of stations.

AC Servo Motor Driver (Pulse input type/Positioning type)

7) 0V [1] Power supply input terminals, L1 and L2: Specify power supply to input terminals L1 and L2. [2] Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

High Vacuum L Type Valve

AS568-030-XN1 Note2) Refer to Chapter 4, Construction and Dimensions" (P. 10) for the part indication numbers.

NCX2 seies

D-F7BV D-F7BAL, D-J79W D.A72,D-A72H B i r w n l 8 t u w n (Black) D.F7PW D-E80A D-E73A (Black) o Reed swil.h Beed swltch o e Brue :Ei*" lblack) ked) D.A76H. D-E75A (+) E | 'FesisLort Black ;fi-+4--lrl" (-) o Series NCX2 6.14 10.14 Aub sr.

S

the total amount of vertical deflection NC D X 2 N N O O F A U T O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock

MHL2

MHL2-16D MHL2-16D1 MHL2-16D2 SMHL, #2 SMHL2A, #3 SMHL2A, #4 (#4+#5) 2.2-8 Series MHL2 Dimensions MHL2-20Dl 10 10 11 2-M6 X 1 Thread depth 7 (Mounting thread) D Closed J A cross view (Fingers closed) C B A 4H9 +0 030 0 Depth 4 2-6.6 (Body mounting hole) 52 6.45 5 5 4-M6 X 1 Thread depth 12 (Mounting thread) 5 4H9 +0 030 0 Depth 4 Dimensions of auto switch mounting groove (Enlarged view) 27H9

Air Cylinder NCX2 Series Slide Unit

D-F7BV D-F7BAL, D-J79W D.A72,D-A72H B i r w n l 8 t u w n (Black) D.F7PW D-E80A D-E73A (Black) o Reed swil.h o e Beed swltch Brue :Ei*" lblack) ked) D.A76H. D-E75A (+) E | 'FesisLort Black ;fi-+4--lrl" (-) o Series NCX2 6.14 10.14 Aub sr.

EX500-Sx03_eng

System configuration How to order: EX500-AC 030 SSPS Cable length (L) 003 0.3 [m] Connector Power supply cable GW unit SSPS Socket side: Straight Plug side: Straight With SI unit Valve manifold (SY/SV/VQC/S0700 Series) 005 0.5 [m] Display Description 010 1 [m] SAPA Socket side: Angled Plug side: Angled LED is OFF The power supply for input and control is OFF PWR Thank you for purchasing an

SI Unit for Vacuum Manifold

Specifications Table. 8-1 Specifications Item Specification General Dimensions (W x L x H) in mm 25.5 x 102.4 x 76.5 Weight 150 g Housing materials PBT Maximum number of ejectors 16 Maximum number of sensors 16 Applicable standard CE Marked RoHS directive EN50581:2012 Withstand voltage 500 VAC 1 min.

Classification of Waterproof: 2 (Drip Proof), Pressure Range: 2 (0.05~0.7MPa), Fluid Contact Area Material: 1 (SUS316), Thread: N (NPT), Differential Scale Plate: 1 (Differential Scale), Electric Wire Gland: A Type 20a (Standard), Contacts: W (2ab)

Classification of Waterproof: 2 (Drip Proof), Pressure Range: 2 (0.05~0.7MPa), Fluid Contact Area Material: 1 (SUS316), Thread: R(PT), Differential Scale Plate: 1 (Differential Scale), Electric Wire Gland: A Type 20a (Standard), Contacts: W (2ab)

Classification of Waterproof: Drip Proof, Pressure Range: 0.05~0.7MPa, Fluid Contact Area Material: SUS316, Thread: NPT, Differential Scale Plate: Differential Scale, Electric Wire Gland: A Type 20a (Standard), Contacts: 2ab

Classification of Waterproof: Drip Proof, Pressure Range: 0.05~0.7MPa, Fluid Contact Area Material: SUS316, Thread: R(PT), Differential Scale Plate: Differential Scale, Electric Wire Gland: A Type 20a (Standard), Contacts: 2ab

Electric Actuator

;R W 4 x NA thread effective depth NB A + Stroke M EH S Incremental encoder Absolute encoder Stroke range HB HA EV EH D C B (mm) Size Without lock With lock Without lock With lock W A W A W A W A 274.9 299.9 291.3 321.3 233.4 258.4 251.1 281.1 274.5 299.5 290.6 320.6 238 263 262.7 292.7 15 to 100 136.5 161.5 156 186 25 87 123.9 82.4 123.5 71.5 20 44 45.5 M8 x 1.25 13 101 to 400 20 to 100

HRX-OM-X084

Description Qty Applicable model Anti-quake bracket A Anti-quake bracket B 2 2 4 4 HRR010-A/W-10/20-Y HRR012/018-A/W-10/20-Y HRR-TK001 Nut (M8) HRR024/030-A/W-20-Y Bolt (M8) HRR050-A/W-20-Y Mounting of anti-quake bracket 1. Remove the cap from M8 stud bolt. (4pcs) 2. Mount the anti-quake bracket A. (Recommended torque : 12.5Nm) 3. Mount the anti-quake bracket B.

Aluminum High Vacuum Angle Valve

Maintenance Parts XM XY w Bonnet Assembly Part No. i Bypass Valve Part No.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.