Pressure Range: 0 to 10 MPa, Piping: NPT 1/4, Orifice: Orifice shipped with the Product, Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -

Rotary Actuator

(Example) For M3: L1 = 6 mm $The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm However, for M5 with T shaft, the maximum dimension L2 is 1.5 times the thread size.

VFS

(External pilot port) n: Stations Stations Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 6-Rc 1/2 L L1 L2 3-8-62 63 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS3000 Manifold with Exhaust Cleaner Manifold Specifications Serves to protect working environment.

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

o

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

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P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

KS/KX

Kl Ml Hl Dl MS Tl 2.1-32 Series KS/KX Male connector: KSH (Standard) Tube O.D. (mm) Connection thread R(PT) Min. hole dia. Effective area (mm2) Nylon Urethane Weight (g) H (Hex.) Part No.

MXW

B L2 1 = W/Wmax = 1/7 = 0.14 L3 C 2. Static moment Mr = W x 9.8 (L3 + C) Examine Mr. (Mp, My values do not apply to this example.)

Vacuum Ejector Series ZM

(kg) -E 0.21 0.21 0.21 -EL 0.26 0.26 0.26 -M 0.27 0.27 0.27 -ML 0.32 0.32 0.32 Without switch 0.17 0.17 0.17 Model ZM2 ZM4 ZM6 ZM1-J ZM3-J ZM5-J ZM1-K ZM3-K ZM5-K ZM1-A ZM3-A ZM5-A ZM1-B ZM3-B ZM5-B ZM0.24 0.28 0.33 0.34 0.39 0.25 0.29 0.34 0.35 0.4 0.25 0.29 0.34 0.35 0.4 0.26 0.3 0.35 0.36 0.41 P Q 0.24 0.28 0.33 0.34 0.39 -04R/L 0.209 0.214 0.219 0.224 0.229 0.234 0.239 0.244 0.249 0.254

MXS

San=a1+a2+a31 3.11-10 Air Slide Table Series MXS Allowable load: W (N) Fig.1 Overhang: Ln (mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Dynamic moment L1 A1 L3 A5 L2 A3 CL W Mp Mr My W W MLGC L3 A6 W L1 A2 L2 A4 CNA W Mey Mep CB L2 A4 CV/MVG A2 L3 Work mounting coefficient: K Fig.3 CXW Table mounting CXS

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1 :1" Ir eiIJ Ml!> ~. . ,. d, .. ",-, , ~ ~~~ " ~-..,+ Pad ke 2,4,6,8,10,13,16, 10,13.16,20, 10,16,25,40 20,25,32,40,50 !

CQS

Yes 100 V 24 V 12 V A93 A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV Solid state switches marked with are produced upon receipt of order. 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 2-wire 12 V 24 V Relay, PLC Grommet 3-wire (NPN) 3-wire (PNP) Diagnostic indication (2-color indication) 5 V, 12 V IC circuit 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A93 3 mL

Compact

o 0.5 1 15 2 2.5 3 Load (kg) a How to use the graph 1. lt work overhangs to the direction of "L1" or "L2'. 70% of appt|cabte toad weight shown in the graph is rhe upper timit. 2. The graph above shows lhe case of horizonlal orientation of actLrator. ll using in verlical, static moment should NOT exceed slatic moment attowanc. 3.

MY1

MY1 HT m2 m3 MY1 W MY1 W Moment (Nm) M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 MY2C L2 L1 L3 Maximum Load Mass MY2 H/HT Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

ISE7xG.eng

: 0.080 MPa/ ISE75G: 0.100 MPa/ISE76G: 0.25 MPa/ ISE77G: 0.50 MPa/ISE78G: 0.80 MPa Sub display In measurement mode, the sub display can be temporarily changed by pressing the UP or DOWN buttons.

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

Pressure Range: ISE76G (0 to 5 MPa), Piping: N02 (NPT 1/4), Orifice: None

Pressure Range: ISE76G (0 to 5 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: None

Pressure Range: ISE76G (0 to 5 MPa), Piping: F02 (G 1/4, ISO 1179-1 Compliant), Orifice: T (Orifice shipped with the Product)

Pressure Range: 0 to 5 MPa, Piping: NPT 1/4, Orifice: None, Unit Specification: -, Lead Wire: -, Bracket: -, Operation Manual/Calibration Certificate: -