Table of Contents

Lead wire length symbols: 0.5 m Nil(Example) Y59B 3 m L (Example) Y59BL 5 m Z (Example) Y59BZ Z76 5 V IC circuit Reed switch Solid state switch Yes 100 V Z73 12 V Grommet Relay, PLC 24 V 2-wire 100 V or less No 5 V, 12 V Z80 IC circuit Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7P 3-wire (PNP) Y59B 2-wire 12 V Relay, PLC Yes Grommet 24 V 3-wire (NPN) Y7NW Diagnostic indication (2-color

Rotary Actuator

V V K* K* K* -XA46 -XA51 Change of long shaft length (Without keyway) V V V V T, J, K* K* T, K* J* K* MSQ MSZ CRQ2X MSQX -XA52 Change of short shaft length (Without keyway) V V K* K* K* -XA53 Change of double shaft length (Both without keyway) V V V K* -XA54 Change of long shaft length (With four chamfers) V V V X, Z* X, Z* -XA55 Change of short shaft length (With four chamfers)

Table of Contents

3-wire (NPN) S99V IC circuit 5 V,12 V S9P 3-wire (NPN) S9PV R73 Grommet 100 V R73C Connector R80 Grommet IC circuit 48 V, 100 V 24 V, 48 V, 100 V 2-wire Relay, Heavy-duty cord R80C For 20, Connector 24 V PLC 30 and 40 T79 Grommet 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V,12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m 3 m 5 m None Nil L Z N (Example)

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3-wire (NPN) S99V IC circuit 5 V,12 V S9P 3-wire (NPN) S9PV R73 Grommet 100 V R73C Connector R80 Grommet IC circuit 48 V, 100 V 24 V, 48 V, 100 V 2-wire Relay, Heavy-duty cord R80C For 20, Connector 24 V PLC 30 and 40 T79 Grommet 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V,12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m 3 m 5 m None Nil L Z N (Example)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

3-wire (NPN) S99V IC circuit 5 V,12 V S9P 3-wire (NPN) S9PV R73 Grommet 100 V R73C Connector R80 Grommet IC circuit 48 V, 100 V 24 V, 48 V, 100 V 2-wire Relay, Heavy-duty cord R80C For 20, Connector 24 V PLC 30 and 40 T79 Grommet 12 V T79C Connector S79 3-wire (NPN) IC circuit Grommet 5 V,12 V S7P 3-wire (PNP) Lead wire length symbols: 0.5 m 3 m 5 m None Nil L Z N (Example)

Table of Contents

F9NW Y7PW F9PW Y7BW F9BW Standard Standard Standard Standard Standard Standard Standard Standard Standard 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) Solid state switch Relay, PLC 2-wire Grommet Yes 24 V 12 V 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) Diagnosis (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z

smcmaintenancepartslist

AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR40(K)-06 AR60(K) No.

Table of Contents

Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN) 2-wire Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV 100 V or less IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Since there are

ZP

2 F G H J K L M N P Vacuum inlet direction q Pad dia.

Table of Contents

For EE (ZSE4E) 24 V 12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Air Cylinder

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v Grommet 2-wire 12 V M9BV M9B V V V v v Connector H7C V V V V Terminal conduit

ISO Cylinder

Cushion Air cushion V Mounting bracket*1 Nil Rubber bumper (Standard) C Air cushion Applicable mounting bracket Nil None L Single foot M Double foot G Flange U Trunnion N Clevis Action Head cover type Mounting bracket L M G U N Rod boot E V V V V V F V V V V Y V V V V Rubber bumper Nil Without rod boot J Nylon tarpaulin (One end) K Heat resistant tarpaulin (One end) Air cushion E V V

Smooth Cylinder/Low Speed Cylinder

Auto switch model Load voltage Lead wire (m) 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Indicator light Applicable load Pre-wired connector Type Special function Electrical entry Wiring (Output) DC AC Perpendicular In-line M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA P3DW 5 V, 12 V 12 V 5 V, 12 V 12 V 5 V, 12 V 12 V 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN

Made to Order

Relay, PLC 24 V Yes Grommet Diagnostic indication (2-color indicator) 5 V,12 V IC circuit 12 V Magnetic field resistant (2-color indicator) 5 V 100 V 3-wire (NPN equivalent) Relay, PLC IC circuit IC circuit Reed auto switch Grommet Yes No 24 V 12 V 2-wire 100 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example

AC Servo Motor Driver (Pulse input type/Positioning type ）

Approximately 5 mA Approximately 6.2 k Switch TR DICOM VCES 1.0 V 24 V DC 10% 500 mA ICEO 100 A The following is for when CN1-10 pin and CN1-35 pin are used as digital input interfaces. Driver Servo amplifier 24 V DC 10% 300 mA OPC Approx. 1.2 k 10 m or less Approx. 20 mA CN1-10, CN1-35 DOCOM VCES 1.0 V ICEO 100 A SD 3 55 3.

Air Cylinder Series CM2

NPN) A96 5 V IC circuit Yes A93 A90 B54 B64 C73C C80C A33A A34A A44A B59W 100 V 100 V or less IC circuit Grommet No Yes No 100 V, 200 V 200 V or less 24 V or less Relay, PLC Yes No 12 V Connector 2-wire 24 V IC circuit PLC Terminal conduit Yes Relay, PLC 100 V, 200 V DIN terminal Grommet Diagnostic indication (2-color) Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example

5

Load voltage Auto switch model Lead wire length (m) Pre-wired connector Applicable load DC AC Tie-rod mounting Band mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9N V V V v v 3-wire (NPN) G59 V V v v 24 V 5 V, 12 V IC circuit 3-wire (PNP) M9P V V V v v G5P V V v v Grommet 2-wire 12 V M9B V V V v v K59 V V v v Terminal

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40