CG5-S

(mm) 4 Connection threads Model -01 R 1/8 -02 R 1/4 KGD06-M5 M5 x 0.8 KGLU04-M5 M5 x 0.8 -01 R 1/8 4 -01 R 1/8 6 -02 R 1/4 -02 R 1/4 -03 R 3/8 KGLU06-M5 M5 x 0.8 KGD08-01 R 1/8 -01 R 1/8 6 8 -02 R 1/4 -02 R 1/4 -03 R 3/8 -03 R 3/8 KGD10-02 R 1/4 KGLU08-01 R 1/8 10 -03 R 3/8 -02 R 1/4 8 -04 R 1/2 -03 R 3/8 <R type> KGD12-02 R 1/4 KGLU10-02 R 1/4 -03 12 10 R 3/8 -03 R 3/

CG5-S

(mm) 4 Connection threads Model -01 R 1/8 -02 R 1/4 KGD06-M5 M5 x 0.8 KGLU04-M5 M5 x 0.8 -01 R 1/8 4 -01 R 1/8 6 -02 R 1/4 -02 R 1/4 -03 R 3/8 KGLU06-M5 M5 x 0.8 KGD08-01 R 1/8 -01 R 1/8 6 8 -02 R 1/4 -02 R 1/4 -03 R 3/8 -03 R 3/8 KGD10-02 R 1/4 KGLU08-01 R 1/8 10 -03 R 3/8 -02 R 1/4 8 -04 R 1/2 -03 R 3/8 <R type> KGD12-02 R 1/4 KGLU10-02 R 1/4 -03 12 10 R 3/8 -03 R 3/

smcmaintenancepartslist

7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

VFR

0, Terminal i, Connection bracket q, w, Gasket e, r, O-ring y, u, Receptacle assembly 02 03 C8 C10 Plug-in type VVFS3000-1A-1Manifold block assembly Note) !0 Manifold block o, Connection bracket q, w, Gasket e, r, O-ring y, u 02 03 C8 C10 Non plug-in type VVFS3000-1A-2End plate (U) !

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

port thread type -+ -+ Number of stations P port 1/8 R R P 02 2 stations Nil 00F 00N 00T Rc G NPT NPTF : : R port 1/8 20 20 stations Type 40 (5 port / Base mounted) Applicable solenoid valve 10-SYJ54310-SYJ553Applicable blanking plate assembly SYJ5000-21-4A How to Order 10 SS5YJ5 40 05 M5 P port 1/8 Clean series P, R port thread type Number of stations 02 2 stations Applicable individual

ZP3

w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

Modular F.R.L. Unit

) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e w q e w q r r Note) 3 position pressure center 3 position exhaust center 3 position closed center 3 position pressure center 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B

0.4

e q w VQC1100 VQC1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4 (

5 Port Solenoid Valve Series VQZ1000/2000/3000

/4, 3/8 [1(P), 5(R1), 3(R2) port] 66 ( ): VQZ325-G1-02 L-type plug connector (L): VQZ325 (R)-L10 1 02 03 DIN terminal (Y): VQZ325 (R)-Y10 1 02 03 136.8 [141.2] Approx. 300 (Lead wire length) 57 [64] 152.6 Max. 10 Applicable cable O.D. 3.5 to 7 72.8 Pg7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ325 (R)-M10 1 02 03 68.3 [75.3]

ZP

(Pad diameter: 20 mm or less) ZP T 02 U N A5 From p. 33 p. 115 p. 117 From p. 121 With adapter ZP T 02 U N J 6 B3 A8 From p. 43 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Flat type q Vacuum inlet direction w Pad diameter t Buffer stroke 02 2 16 16 04 4 20 20 06 6 25 25 08 8 32 32 10 10 40 40 13 13 50 50 e Material Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral

Table of Contents

ZP R 16 K20 A10 06 UGN [Pad model no.] Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

SX

-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

0.55

, 3(R) port 1/8 1/2 5(R), 3(R) port 5/3(R) port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold base W = 29n + 21 W = 51n

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

Modular F.R.L. Units

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i o 10 Side ported q Series t Valve stations w Type 1 JSY1000 3 JSY3000 5 JSY5000 L1m: 34 cores L2m: 17 cores Symbol Stations Note 02 2 stations Double wiring*1 Symbol Stations Note 02 2 stations Double wiring*1 16 16 stations 02 2 stations Specified layout*2 (Up to 32 solenoids available) 08 8 stations 02 2 stations Specified