Vacuum Pad

47.5 60.5 01 01 01 01 01 01 50 52 36 54 24 35.5 80 83 58 85 37 48.5 01 01 01 01 01 01 125 129 89 135 56 69 01 G H I J Y G H I J Y Model Model 01 ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 109 120 160 171 01 01 G H I J Y Model 47 69 13 144 80 58 21.5 155

Vacuum Pad

47.5 60.5 01 01 01 01 01 01 50 52 36 54 24 35.5 80 83 58 85 37 48.5 01 01 01 01 01 01 125 129 89 135 56 69 01 G H I J Y G H I J Y Model Model 01 ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 109 120 160 171 01 01 G H I J Y Model 47 69 13 144 80 58 21.5 155

Vacuum Pad

47.5 60.5 01 01 01 01 01 01 50 52 36 54 24 35.5 80 83 58 85 37 48.5 01 01 01 01 01 01 125 129 89 135 56 69 01 G H I J Y G H I J Y Model Model 01 ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 109 120 160 171 01 01 G H I J Y Model 47 69 13 144 80 58 21.5 155

Vacuum Pad

47.5 60.5 01 01 01 01 01 01 50 52 36 54 24 35.5 80 83 58 85 37 48.5 01 01 01 01 01 01 125 129 89 135 56 69 01 G H I J Y G H I J Y Model Model 01 ZPX40HB 25-A18 ZPX40HB 50-A18 ZPX40HB 75-A18 ZPX50HB 25-A18 ZPX50HB 50-A18 ZPX50HB 75-A18 ZPX63HB 25-A18 ZPX63HB 50-A18 ZPX63HB 75-A18 ZPX80HB 25-A18 ZPX80HB 50-A18 ZPX80HB 75-A18 109 120 160 171 01 01 G H I J Y Model 47 69 13 144 80 58 21.5 155

Metal Seal/Rubber Seal Series VQ Body Ported

Note) L M G Note) L M G VQ111 (H) (Y) VQ111 (H) (Y) X18 Nil {A side (Bottom side)} {B side (Top side)} X18 Nil {A side (Bottom side)} {B side (Top side)} 3 position (VQ1000) 3 position (VQ1000) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only Note 1) (H): 1.5 W, (Y): 0.5 W, G type: DC only 2-4-99 Series VQ Construction: VQ1000/Plug Lead Unit, Cassette Type Metal

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

5 Port Solenoid Valve Series VQZ1000/2000/3000

T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage Electrical entry Light/surge voltage suppressor Manual override VQZ1000

Modular F.R.L. Units

1 q r e w t i u y o !0 !

VQZ1000/2000/3000

02 DIN terminal (Y): VQZ2250 1(R)-Y-01 02 Indicator light 300 136.5 (Lead wire length) 68 51.5 <56.5> Pg.7 Applicable cable O.D. 3.5 to 7 142.5 Max. 10 71.5 Indicator light Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 82.5 75 M plug connector (M): VQZ2250 1(R)-M-01 02 57 (Lead wire length) 300 58.5 <63.5> Cross section 0.23 mm2 Cover diameter 1.5 Indicator light 124.5 62 73.5 147

A

T O O R D E R S E R I E S ADH 4000 H E A V Y A U T O D R A I N S Y M B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

0.55

Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed

0.4

) w t r y @0 u i !

5 Port Solenoid Valve

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

I

01) and oilfree air supplied to the pilot port. 8. M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. 616 3 Port Pilot Solenoid Valve 10-SYJ500 Construction r w t q y e r w t q y e N.C. N.O.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

MN MO WO W L plug connector 3 M plug connector 220 VAC50/60Hz [230 VAC50/60Hz] 4 For type "W", DCvoltage is only available.

Table of Contents

5 y q !4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !

CG5-S

Model Black (B) Black (B) Black (B) Black (B) 4 2.5 White (W) White (W) White (W) White (W) T0425 T0604 Colour symbol -100 Red (R) Black (B) Red (R) Red (R) 6 4 2.5 TU0425 TU0425 Colour symbol -20 Blue (BU) White (W) Blue (BU) Blue (BU) 4 4 4 2.5 2.5 Colour symbol -100 Colour symbol -20 T0806 Colour symbol -100 Yellow (Y) Black (B) Yellow (Y) Yellow (Y) 8 6 Green (G) White (W) Green (G) Green

2/3 Port Valve

P Port Vacuum Vacuum Vacuum Pressure side 1.5 2.2 2.2 Orifice size Vacuum side 3 4 4 RA 0.08(1.4) 0.19(3.4) 0.19(3.4) Cv factor (Effective area mm2) AP 0.24(4.3) 0.5(9) 0.5(9) Symbol VXV313m-m-mD VXV313 m-m-m G-B How to Order VXV3 1 3 0 01 1 G Series VX Bracket B None With bracket Vacuum use Solenoid size 1 2 3 No.1 No.2 No.3 Options (Refer to table w in p.4.1-49) S L Z None With surge

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.