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www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

NARM Series

End plate ass'y 1 pc. 2500 3000 A B 146 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM2500, 3000 P Dimensions Symbol A B C D E F G H I J K L M N O P Model NARM2500 .24 .67 1.73 2.20 1.65 4.98 2.28 1.77 .67 .83 1.50 1.65 1.14 1.89 2.68 1.32 (6) (17) (44) (56) (42) (126.5) (58) (45) (17) (21) (38) (42) (29) (48) (68) (33.5) NARM3000 .28 .83 2.13 2.68 2.17 6.04

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

0.02 End plate (PBT) (UL94-V0) End plate (PBT) (UL94-V0) 0.01 0.005 50 100 200 500 1000 2000 5000 10 20 Sound absorbing material (PVF) Sound absorbing material (PVF) Air flow (l/min (ANR)) Noise Level (Initial conditions) Case (PBT) (UL94-V0) Case (PBT) (UL94-V0) Hexagonal flats D Hexagonal flats D AN202 to 402 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement distance:

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

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M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

SMC Electronic Switch Series Variations

1.5 16 18 20 16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact Pressure Switch ZSE2/ISE2 Dimensions/ISE2l01 T1 01 T1 01 T1 Grommet style/ISE2l-15 Connector style/ISE2l-15C trimmer Pressure setting trimmer Pressure setting Indicator light Indicator light PSE ZSE4 ISE4 15 Lead wire length 600 15 (3000) L H 20 20 ZSE5 ISE5 Lead wire length 600 ZSE6 ISE6 ZSE3 ISE3 (3000) GS 9.5 PS

ZL3-OM00801

No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

M5 type U10/32 type Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L4 (1) A (2) Max.

Process Pump

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Style: Pressure Switch w/ T-Spacer, Body Size: 30 (AC30), Thread Type: N (NPT), Port Size: 01 (1/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC30, Thread Type: NPT, Port Size: 1/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

IR1000/2000/3000

Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

Style: Pressure Switch w/ T-Spacer, Body Size: 20 (AC20), Thread Type: N (NPT), Port Size: 01 (1/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale)

Style: Pressure Switch w/ T-Spacer, Body Size: AC20, Thread Type: NPT, Port Size: 1/8, Set Pressure Range: 0.1 to 0.6 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa/psi Dual Scale

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

rotations Number of needle rotations OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Number of needle rotations Number of needle rotations Inlet pressure (MPa) IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Effective area (mm 2) Flow rate (l/min

Style: Pressure Switch w/ T-Spacer, Body Size: 20 (AC20), Thread Type: Rc, Port Size: 01 (1/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa