CV/MVGQ

D-C7/C80 50 + 45 (n 2) 50 10 15 15 + 45 ( ) n 2 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 10 15 (n = 2, 4, 6) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 65 10 15 65 + 50 (n 2) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 Precautions 75 10 15 Warning 75 + 55 (n 2) 20 + 50 ( ) (n = 2, 4, 6) n 2 2 D-B59W 75 15 20 1. Do not rotate the cover.

CV/MVGQ

D-C7/C80 50 + 45 (n 2) 50 15 10 15 + 45 ( ) n 2 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 15 60 10 (n = 2, 4, 6) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 15 65 10 65 + 50 (n 2) 15 + 50 ( ) (n = 2, 4, 6) n 2 2 Precautions 15 75 10 Warning 75 + 55 (n 2) 20 + 50 ( ) (n = 2, 4, 6) n 2 2 D-B59W 20 75 15 1. Do not rotate the cover.

Table of Contents

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

Electric Actuators

D 4 4 6 6 Model LXFHAB25--X LXFHAB50--X LXFHAB75--X LXFHAB-100--X B 1 1 2 2 E 60 90 90 90 F 30 60 60 60 G 60 90 90 90 Note) The overall length of an actuator is Stroke + 105.5 + Motor dimension.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

With light/ surge voltage suppressor (L)(M) (D)(F) 100 VAC 50/60 Hz VZ5000 200 VAC 50/60 Hz 24 VDC 2.4 4/2 5/3 M plug connector (M) (Option) Page 3-3-53 24 VAC 50/60 Hz Locking B type (Slotted) (A/B EA/EB) 48 VAC 50/60 Hz 110 VAC 50/60 Hz 3 position closed center 220 VAC 50/60 Hz 6 VDC 12 VDC 48 VDC VZ3000 Base Mounted DIN terminal (D) 0.83 4/2 5/3 Page 3-3-29 3 position exhaust center

Table of Contents

9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up

Hydraulic

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

ZP

Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ6-10Z 22 18 25 9 23 16 38 10 30 64.5 4 2 50 60 MXQ6-20Z 25 15 15 9 26 26 38 10 30 74.5 4 2 50 60 MXQ6-30Z 21 34 12 20 48 13 40 95.5 6 3 63 73 MXQ6-40Z 26 10 38 24 28 28 48 15 50 107.5 6 3 75 85 MXQ6-50Z 27 20 48 34 28 28 48 15 60 117.5 6 3 85 95 87 Air Slide Table/Height Interchangeable Type MXQ Series Dimensions: MXQ [Adjuster

Made to Order

/J79W/F7WV D-F7BA/F7BAV D-F7NT D-M9WV D-M9AV D-F7WV D-F7BAV D-A79W 10 15 10 + 15 (n2)Note) (n=4, 6...) 4.5 4 4.5 5 5 6 6 6 10 15 15 + 15 (n2)Note) (n=4, 6...)

15

tension adjustment bolt (M4: Width across flats 7) 48 46.8 60 FF (60) 57.5 55 31.5 30 5H9 ( ) depth 5 n x 5.5 +0.030 0 70 6 60 200 D x 200 (= E) B 5 15 Note) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

VFS

Option: External pilot is possible only to the one with sub-plate. 3 position exhaust center Electrical entry Coil rated voltage 4 G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position pressure center 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 5 6 24 VDC 12 VDC 7 240 VAC, 50/60 Hz 3 position double check 9 Other 6 Option

Battery-less

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

: Right side parallel LEFS32RV LEC SS-T 6 60 Encoder cable (7) Encoder cable (7) LEC Y LEC Y 132.5 132.5 Motorless 60 60 62 62 LAT Motor cable (7) Motor cable (7) LZ Dimensions [mm] Model L A B n D E LEFS32lll-50l 245 56 180 4 LEFS32lll-100l 295 106 230 4 LEFS32lll-150l 345 156 280 4 LEFS32lll-200l 395 206 330 6 2 300 LEFS32lll-250l 445 256 380 6 2 300 LEFS32lll-300l 495 306 430 6 2

Table of Contents

(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O. (A contact) 1 2 1 pc. 2 pcs. N.C. (B contact) N.C. (B contact) None Nil Auto/Proximity switch type N.C. (B contact) 6 6 pcs. Refer to the table on the right for auto/proximity switch part numbers.

CJ2

Reed switch Applicable auto switch Band mounting Rail mounting D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-A79W D-F7/J7, D-F7V, D-J79C D-F7W/J79W, D-F7WV, D-F7BAL, D-F7F, D-F7NTL D-C7/C8, D-C73C/C80C D-H7, D-H7C D-H7W, D-H7BAL, D-H7F Solid state switch 1.3-1 Standard: Double Acting Single Rod Series CJ2 6, 10, 16 How to Order Bore size 6 10 16 6mm 10mm 16mm Standard stroke (mm) 6 10 16 15, 30, 45

Best Pneumatics Vol. 14

G AF30 to 60 F (2) R Z (6) AF20 to 60 Note 1) Drain guide is NPT 1/4 (applicable to AC30 to 60) Note 2) Drain guide is G 1/4 (applicable to AF30 to 60).

Modular F.R.L. Unit

Description Symbol Description Applicable model Model combination AC20 to 60 AC20 to 60 AC20 to 60 AC20 to 60 AC25 to 60 AC20 AC25 to 60 AC20 to 60 AC20 to 60 1 Note 8) 0.02 to 0.2MPa setting Combination 2 3 6 8 C J Note 9) Metal bowl Symbol Filter Regulator Mist Separator Regulator Air filter Lubricator Lubricator with drain cock Nil A B C D M G A Nylon bowl (including sight dome) M G

VFR

Caution When using exhaust cleaner, mount it downwards. 3-5-88 Manifold with Exhaust Cleaner Plug-in type/Non plug-in type 235.5 204 (72) 70 [71.5] 60 60 24 [23] 11 R5.5 21 B B B B A A A A P = 51 71.5 (Pitch) 71.5 6 [2] 209 250 D side mounting U side mounting P = 51 (Pitch) 6 [2] D side mounting U side mounting n: Stations Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245

Table of Contents

Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) 200, 220 230, 240 VAC (50 Hz) 200 to 260 VAC (60 Hz) 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase Single turn IDF-TR500-2 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA 118 140 150 70 112 142 6 IDF-TR500-3, 4 C VOLUTAGE SELECTOR FUSE B OUT PUT IN PUT E D 4-F A Input cord 2 m Transformer part no.