2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 2mm 5mm C Note 1) D N.C. (B contact) Stroke N.C.

2 Phase Stepper Motor/Without Motor Brake Series LXS

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

Cylinder with lock

Operating Range The figure shows the mounting example for the D-M9(V)/ M9W(V)/ M9A(V)/ A9(V) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9/ M9V D-M9W/ M9WV D-M9A/ M9AV 4 4.5 4.5 4.5 5 6 D-Y59/ Y69 D-Y7P/ Y7PV D-Y7W/ Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5/ J59 D-F5W/ J59W D-F5BA/ F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/ K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5

Trimmer Auto Switch

D-M9K, D-Y7K, D-F7K Application For relay and PLC Applicable amplifier unit D-RNK, D-RPK Indicator lamp Red lights ON at sensitive position.

Cylinder with lock

As a guideline, turn 90o from the position where the mounting screw starts to become tight. 19 - < Applicable Auto switches > Solid state switch D-F59F5P D-J59J51F5BAL D-F59WF5PWJ59W D-F59FF5NTL Reed switch D-A53A54A56A64A67 D-A59W How to mount and move the auto switch Fig. 9 Fix the auto switch to the auto switch mounting bracket using auto switch mounting screw (M4).

ITV0000

D side 1 2 3 ...

Compact Electro-pneumatic Regulator Series ITV0000

D side 1 2 3 ...

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 14 Revision 18-Aug-2020 Revision D Completely revised by format change.

Process Pump

Also, one piece of amp "HPX-EG00-1S-L02" manufactured by Azbil Corporation is required for one sensor to detect the fluid leakage (two amps are required in total). 13 Revision 18-Aug-2020 Revision D Completely revised by format change. Change the part number of amp for the sensor.

Style: Pressure Switch w/ L-Shaped Piping Adapter, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 04 (1/2), Set Pressure Range: 0.1 to 0.4 MPa, Pressure Unit of the Scale Plate: MPa, Lead Wire Length: L (3m), Mounting Position: Right

Style: Pressure Switch w/ L-Shaped Piping Adapter, Body Size: AC40, Thread Type: Rc, Port Size: 1/2, Set Pressure Range: 0.1 to 0.4 MPa, Pressure Unit of the Scale Plate: MPa, Lead Wire Length: 3m, Mounting Position: Right

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CHKD/CHKG

Minimum Auto Switch Mounting Stroke (mm) D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number D-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 6 5.5 4.5 5.5 5.5 6.5 8.5 9.5 D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA 8 9.5

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Compact Cylinder Series CQS

Grease pack part no.: GR-S-010 (10 g) 578 Series CQSK Compact Cylinder: Non-rotating Rod Type Double Acting, Single Rod Mounting Bolt for CQSK C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting method: Mounting bolt for through-hole

XL

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

C95

D-Z80 BMB4-032 32, 4 0 Screw (M4 x 6L) 2 pcs.

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5