VZS

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

Free Mount Cylinder

Auto Switch Internal Circuit D-A90(V) Contact protection box OUT () Brown Reed switch CD-P11 Unit: g Weight OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Auto switch model D-A93(V) Lead wire length: 0.5 m 6 6 6 6 8 8 LED diode Lead wire length: 3 m Brown OUT (+) Brown 30 30 30 30 41 41 Contact protection box Resistor Dimensions Reed switch Unit: mm Zener diode CD-P11 CD-P12 D-A90

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Orifice symbol (diameter) Solenoid valve (Port size) DC 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6mm) VX21 VX22 VX23 Model Class H 01 ( ) 02 ( ) 1 8 Rated voltage S L Z 1 4 02 ( ) 03 ( ) 02 ( ) 03 ( ) Port no.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

blank plate assembly SYJ5000-21-1A Applicable individual exhaust spacer assembly SYJ5000-17-1A Stations P port Rc(PT) 2 stations 02 1 8 : : 20 stations 20 R port Rc(PT) 1 8 40 Type (5 Port/Base mounted) Applicable solenoid valve SYJ5l40-l SYJ5l43-l SYJ5l50-l SYJ5l53-l Applicable blank plate assembly SYJ5000-21-1A How to Order SS5YJ5-40-05 -M5 P port Rc(PT) 1 8 Stations 02 2 stations : :

0.4

Applicable fitting size Noise reduction (dB) Effective area (mm2) (Cv factor) Series Model A L D d D VQ2000 10 AN20-C10 36.5 57.5 30 16.5 30 Elbow fitting assembly VVQ2000-F-L(C4/C6/C8/N3/N7/N9) It is used for piping that extends upward or downward from the manifold.

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

LEC-OM02704CN

AC200230V AC100120V 40 6 AC100120V AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 M5 3.24[Nm] U U CNP3 V CNP3 V W W 11 3 11 11.2 (1) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C Log 39.0 23.8 B 12.7 A B C D E 10126-3000PE 10326-52F0-008 25.8 37.2 14.0 10.0 12.0 AWG2430 (b) M2.6 [mm] E D A C F Log

Intrinsically Safe Valve

with cover (LL) 53-SY7 40(R)-LL3 4 5 02 03 L (Lead wire length) 170.6 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 41.7 91.8 Terminal type (TT) 53-SY7 40(R)-TT3 4 5 02 03 Max. 10 L (Lead wire length) 204.2 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 39 108.6 28 Series 53-SY5000/7000/9000 Dimensions: 53-SY9000 2-position single L-type plug connector (L) 53-SY9140-L29 30 17.5

IIIIIII

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7)

Mechanical Valves Series NVM, NVFM, NVZNI

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7

42

D-side end plate assembly part no. (For F, L, S, T & T1 kits) D-Side End Plate Assembly 2. U-side end plate assembly part no.

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

44

Width across flat Effective area (mm2) Connection thread Rc Weight (g) L1 L2 M d Model H1 H2 H2 H1 I.D. 2.5 3 4 6 7.5 8 9 10 13 4 4 6 8 10 10 12 12 16 KFG2F0425-02 KFG2F0403-02 KFG2F0604-02 KFG2F0806-03 KFG2F1075-03 KFG2F1008-03 KFG2F1209-03 KFG2F1210-03 KFG2F1613-04 1.6 2.6 6 17 30 35 45 57 101 1/4 1/4 1/4 3/8 3/8 3/8 3/8 3/8 1/2 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 d 17 8 25.9 16.4 5 24 17 19

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no. CQSXB12-5D CQSXB20-30D CQ-M5 x 50 L CQ-M3 x 25 L 50 25 CQSXB00-10D CQSXB00-35D x 55 L x 30 L 55 30 CQSXB00-15D CQSXB00-40D x 60 L x 35 L 60 35 6.5 6.5 Example) CQ-M3x25 L 4 pcs.

•

Flat wi1h rib mm Model ;A ;B .c F:M5 x O .8 F:M6 x l F: }l 1 Y Model ;A ;B c F:M 6x l F :lJllxl251 F: ~ E Y D E . G .D. E G D E 0 D ..1 D Flat Flat wit. h rib ZPTIOg 10 ! 12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

Vacuum System Peripherals:

U side D side U D Made to order 24 VDC 12 VDC Nil 12V Total number of ejector/valve stations SUP/EXH block assembly mounting position A, B port size (Valve only) 02 U D side D B U side 2 to 10 stations 2 4 One-touch fitting 6 One-touch fitting C4 C6 Mixed M When creating the mixed specifications, complete the stations table on the right.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

+ l (179 + l) 56 63.5 14 6.6 40 49 22 30 4.5 58.4 30 71.4 18 10 40 Up to 500 CD-G04 (207 + l) 225 + l 173 (185) 205 (217) 193 + l (205 + l) 64 79 16 9 50 60 36 6 72.4 36 86 25 20 20 50 Up to 600 CD-G05 (237 + l) 235 + l 178 (190) 215 (227) 198 + l (210 + l) 74 96 18 11 60 8 90.4 46 46 105.4 74 30 22 20 63 Up to 600 CD-G06 (247 + l) 281.5 + l 214 (228) 272.5 (286.5) 223 + l (237 + l

Modular Type Filter Regulator Series AW

Note 2) 20 30 40 With square embedded type pressure gauge (with limit indicator) With round pressure gauge (with limit indicator) With set nut (for panel mount) 01 02 03 04 1/8 1/4 3/8 Note 1) Optional parts are not assembled and are supplied loose at the time of shipment (except for options C, D and E).

VQ4000

(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)