Cooling Capacity: 10 kW, Communication: Analog, Option: Circulating Fluid Automatic Recovery

Cooling Capacity: 10 kW, Communication: None, Option: DI Control Kit

Rotary Table/Rack & Pinion Style Series MSQ

D DE 2 x JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2 x P BG AX DG Front port (Plugged with a hexagon socket head set screw when end ports are used.) SF AV AU BB (Max. approx.

Rotary Table/

DE 2-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D DDE 202-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

1

D: Push-turn locking slotted type E: Push-turn locking lever type F: Slide locking type INDEX Protective class class # (Mark: ) 294 For Series EX600 Series SV1000/2000/3000 RoHS When I/O Unit EX600-DE or EX600-DF are selected, enclosure is IP40. Refer to page 320 for details.

Air Cylinder Series CA2

(mm) DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. 40 CA2-B04 +0.058 0 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 50 CA2-B05 +0.070 0 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 63 +0.070 0 CA2-B06 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 80 +0.084 0 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 100 +0.084 0 CA2-B10 93 60 16.5 100

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, HRZ010-WS PCW VALVE, HRZ, REFRIGERATED THERMO-COOLER, 0.00000

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, cable with CN3 HRZ010-WS-A1-x005, REFRIGERATED THERMO-COOLER

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010

Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (MPa)Rated flow Note 6) (l/min)Flow setting range Note 7) (l/min)Main tank capacity Note 8) ( l )Sub-tank capacity Note 9) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 10) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunications( C)(MPa)(A)(kg)HRZ010