No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Tank Insulation for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER

Rotary Table/

DE 2-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

D DDE 202-JU FD BC FA H Q AW (UU) SD BH DF (through) JD AY 2-P BG AX DG Front port (Plugged with a hexagon socket head set screw when side ports are used.) SF AV AU BB (Max. approx.

1

D: Push-turn locking slotted type E: Push-turn locking lever type F: Slide locking type INDEX Protective class class # (Mark: ) 294 For Series EX600 Series SV1000/2000/3000 RoHS When I/O Unit EX600-DE or EX600-DF are selected, enclosure is IP40. Refer to page 320 for details.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

Ionizer

A connector is not used. 19 20 19 m 20 m Power supply cable 642 A Ionizer Series IZS31 Accessories Feedback sensor IZS31-DF Autobalance sensor [High-precision type] IZS31-DG Autobalance sensor [Body-mounting type] IZS31-DE Connection cable A/B (1 pc. each) Accessories Hexagon socket head cap screw for sensor bracket (2 pcs.)

25

length symbol 400 6 640 790 910 460 7 690 840 960 580 9 790 940 1060 640 10 830 980 1100 820 13 980 1130 1250 1120 18 1220 1370 1490 1300 21 1360 1510 1630 1600 26 1600 1750 1870 1900 31 1840 1990 2110 2320 38 2170 2320 2440 2500 41 2320 2470 2590 Number of emitter cartridges Weight (g) IZS40 IZS41 IZS42 AC adapter (Sold separately) External sensor IZF10-CG, IZS41-CG Sensor model IZS31-DF

Table of Contents

D2012-7-65 65 Series MHS Made to Order Specifications: 1 Oil Resistant Specifications -X5 MHS MHSJ3 MHSH3 MHSL3 D DF DF D Solid state switch Bore size X5 Seals are changed to an oil resistant material for use in environments where there is exposure to cutting oil, etc.

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.  No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled

Smooth Cylinder/Low Speed Cylinder

(mm) DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. +0.058 0 40 CA2-B04 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 +0.070 0 50 CA2-B05 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 +0.070 0 63 CA2-B06 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 +0.084 0 80 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 +0.084 0 100 CA2-B10 93 60 16.5 100

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

Possible to transfer a workpiece at low-speed.

Replacement parts/Grease pack part no: P523010-21 (10 g) 337 MSQX Series Dimensions Basic: MSQXBA XB effective depth XC WB effective depth WC 8 x WD depth WE (Circumference: 8 equivalents) 2 XA 4 x JJ depth 8 2 WA 2 x J JA counter bore depth JB 45 22.5 BE WF BD 2 x M5 x 0.8 Port (plugged) Effective depth FB DD D BB DE CA 2 x P Port FA 2 x JC depth JD H Q 2 x JU FD (UU) BC AW SE SD CB DF (

CA2

DDH10 (Hole) Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z Part no. 40 CA2-B04 +0.058 0 57 35 65 15 85 10 9 17 40 52 165 11 8 60 10 50 CA2-B05 +0.070 0 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 63 +0.070 0 CA2-B06 67 40 80 25 105 12.5 11 22 50 66 196 13.5 10 85 16 80 +0.084 0 CA2-B08 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 100 +0.084 0 CA2-B10 93 60 16.5 100 35.5

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

MLU

CE CF DL CL DA DB CA CB CDH10 (mm) DDH10 (mm) CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

5

Bore size (mm) DA DL DU DC DX DE DO DR DT DS DH DF B Z DDH10 (Hole) CA2-B04 40 57 35 11 65 15 85 10 9 17 8 40 52 60 165 10 +0.058 0 CA2-B05 50 57 35 11 65 18 85 10 9 17 8 40 52 70 183 12 +0.070 0 CA2-B06 63 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 196 16 +0.070 0 CA2-B08 80 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 235 20 +0.084 0 CA2-B10 100 93 60 16.5 100 35.5 130 15 13.5 24 12

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

When connected to EX600-DE or EX600-DF, manifold enclosure is IP40. Also, the Handheld Terminal conforms to IP20, so prevent foreign matter from entering inside, and water, solvent or oil from coming in direct contact with it. 2. Provide adequate protection when operating in locations such as the following. Failure to do so may cause damage or malfunction.

3-Position Rotary Table

DK (through) DH DI DJ DK DL FE HA UV Size 10 20 30 50 45h8 46h8 20H8 6 15H8 10 18.5 52.5 60h8 61h8 28H8 9 17H8 15.5 26 63 65h8 67h8 32H8 12 22H8 16.5 27 67 DL 75h8 77h8 35H8 13 26H8 17.5 30 76 (mm) AA A AV AW AX AY AZ BA BB BC CA CB CC D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 D7 24.7 50 14 17 8 1 9.5 60 27 7 7 38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5