No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Magnetic Contactor for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Pump Inverter for HRZ008-L-F, REFRIGERATED THERMO-COOLER, 737

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Compressor for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER, 737

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Tank Cover R for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER,

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Tank Insulation for HRZ008-L(1)-F, REFRIGERATED THERMO-COOLER

No ventilation holes on the right or left sides make tight fitting installation possible, since contact can be made with other equipment or walls.Cooling method: water-cooled refrigeration, Circulation fluid: clear water, deionized water, Main tank capacity: approximately 15 , Circulating fluid recovery tank: approximately 16, Casters (496, 498, HRZ008-L/L1, & HRZD), REFRIGERATED THERMO-COOLER

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLGR Series

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-

High Vacuum L Type Valve

C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-

XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 consumption (W) Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

XL-OMY0001

XL-OMY0001 L // XLA-2 2 11 4 , 2.2 5 , , , , 33 7 4. 9 5 11 6. 13 7 14 1 XL-OMY0001 *1) *2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

Cooling Capacity: 008 (8 kW), Communication: None, Option: N (NPT Fitting)

Cooling Capacity: 008 (8 kW), Communication: None, Option: N (NPT Fitting)

Cooling Capacity: 008 (8 kW), Communication: None, Option: N (NPT Fitting)