Cooling Capacity: 15 kW, Type: Fluorinated Fluid, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 15 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: D+N

Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: DN (D+N)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: DN (D+N)

Cooling Capacity: 002 (2 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: DN (D+N)

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 2 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Air Cylinder Series CM2

-X Individual -X 1149 Series CM2X Basic Style (B) CM2XB Bore size Stroke G 2 x NN G H2 H1 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x Eh8 NA D Effective thread length 2 x FL S + Stroke F A AL MM Width across flats KA NA N F H K N ZZ + Stroke Boss-cut style ZZ + Stroke (mm) H1 H G AL F A E MM P S ZZ B2 D H2 I FL K KA NA NN B1 N Bore size (mm) 0 0.033 0 0.033 0 0.033

44

10 14 15.8 18.7 5.8 6.6 KK130 H2 H2 M L 15 17 22.2 7.6 DM d 16 17 24.3 8.5 KDM 21 22 28 9.3 KB Swivel Elbow: KFG2V KR Applicable tubing size (mm) O.D.

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Air Cylinder

manual release: Suffix L With rod boot 8 8 l Width across flats B3 e JH JW f h ZZ + Stroke (mm) Bore size (mm) Stroke range A AL B1 B2 D DL E F FL G H H1 H2 HR HN Symbol (Max.)

KJ

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

SMC Pneumatic Clean Series

M26 x 1.5 M20 x 1.5 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 M26 x 1.5 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 17 Air cylinder CM2 2122CM2/ 101110112122Axial foot style (L) / CM2L, CM2L With rubber bumper Standard port H A K F G Relief port 2-P AL H2 G F 2-NN B (Rc, NPT, G) Width across flats B1 H1 LH Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

One-touch Fittings

-02m1 M14 x 1 17 17 28.4 14 9.7 12 15 13.3 13.1 10.4 4.5 32.4 3/8 KQ2E06-03m1 M14 x 1 19 17 30.7 16.3 9.7 12 15 13.3 13.1 10.4 4.5 35.9 Connection thread Rc L1 M L2 m: A (Brass), N (Brass + Electroless nickel plating) Release button dimensions X Y Bulkhead Male Elbow: KQ2LE 2 x Applicable tubing B M H1 (Width across flats) H2 (Width across flats) B E D Effective area [mm2] Min. port size

Table of Contents

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

Compact Hydraulic Cylinder

6 to @0 and @2 and can be ordered by using the seal kit number for each bore size. 218 Hydraulic Cylinder: 7 MPa Series CHN Dimensions Basic style: CHNB MM GA2 GB2 NN Width across flats B2 Width across flats E Width across flats B1 T V D IA CHQ CHKm H1 H2 GA1 GB1 Effective thread GA3 3 GB3 A K F NA H NB 2 x Rc P CHN Air release Air release Air release S + Stroke ZZ + Stroke W mI CHM CHSm