High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics JSX Series G Grommet GS Grommet with PCB DN DIN terminal without connector WN M12 connector/ Without connector cable Recognized Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX11 S N 101 R 1 G1 * F 201 N 2 GS E F 3 DN 4 WN 5 6 7 8 B J JSX11 Table of UL-compliant Products JSXD Series

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Metal Seal/Rubber Seal Series VQ Body Ported

When both options are specified, indicate as DN.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

EX120/121/122

D-DN This catalog is printed on recycled paper with concern for the global environment.

NCQ2/CQ2

L B + Stroke L + Stroke K A + 2 (Stroke) M E Rod end male thread 2 x MM Width across flat B1 Width across flat B1 H1 H1 C1 C1 X X L1 + Stroke L1 A1 + 2 (Stroke) NCQ2 Rod End Male Thread CQ2 Rod End Male Thread Bore size (mm) Bore size (mm) A1 C1 X H1 L1 A1 L1 X H1 inch 12 16 20 25 12 16 20 25 48.2 49 51 58 53.2 9 10 12 15 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 14 10.5 8 11.5 11.5 12.5 14.5

Air Cylinder Series CM2

LZ + 2 x Stroke ZZ + 2 x Stroke LP S + Stroke Z + 2 x Stroke RR L U N RcP N G F H + Stroke K A AL H1 NA CX Plug with fixed orifice CD I NA CI E D LH MM NN x LD Effective thread length FL Width across flats B1 Width across flats KA LG LF LY LT LV Built-in One-touch fittings One-touch fitting port size Spring extend One-touch fitting port size P Spring return Q (mm) Bore size (mm) E H1 H G

Air Cylinder

manual release: Suffix L With rod boot 8 8 l Width across flats B3 e JH JW f h ZZ + Stroke (mm) Bore size (mm) Stroke range A AL B1 B2 D DL E F FL G H H1 H2 HR HN Symbol (Max.)

Table of Contents

Applicable bore size (mm) D B1 C d H1 Part no.

CA2

Piston gasket NBR O-ring @2 Rod end nut Rolled steel Nickel plated @3 6-8-28 29 Series CA2KW Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod Basic Style: CA2KWB 2-P (Rc, NPT, G) Width across flats KA 4-J M M G G Width across flats KA 2-cushion valve MM MM D D E E CJ1 H1 H1 CJP AL AL B1 A N F N F K A CJ2 B C S + Stroke H H + Stroke ZZ + 2 strokes CM2 CG1 B C A AL B1 D E F G H1

Air Cylinder Series CA2

Center Trunnion Style: CA2T With rod boot Z + 1/2Stroke Width across flats KA 4 x J G G 2 x P (Rc, NPT, G) 2 x cushion valve MM TDe8 D E e TY B C d B1 f 10.2 l H1 B C AL h + l K A N F TT N ZZ + l + Stroke TX TZ S + Stroke H ZZ + Stroke (mm) Stroke range (mm) A Bore size (mm) AL B B1 C D E F G H1 J K KA MM N P Without rod boot With rod boot 40 Up to 500 20 to 500 30 27 60 22 44 16 32 10 15

Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

0.4

Features 4 Fieldbus System Series EX600 RoHS How to Order S EX600 SI Unit Version Protocol Symbol Description PROFIBUS DP DeviceNet CC-Link EtherNet/IP Note 1) Symbol Description When MJ or EN or EC is selected When PR or DN is selected PR DN MJ EN EC Nil A EtherCAT Note 1) Output type Symbol Description PNP (Negative common) NPN (Positive common) 1 2 DX EX600 Digital Input Unit Input type

5

1.75 10 26 RZQ Bore size (mm) M MM N P S WA ZZ 40 11 M14 x 1.5 27 1/4 84 18.5 146 50 11 M18 x 1.5 30 3/8 90 18.5 159 63 14 M18 x 1.5 31 3/8 98 23 170 80 17 M22 x 1.5 37 1/2 116 28.5 204 100 17 M26 x 1.5 40 1/2 126 28.5 215 Axial Foot: CA2YL G 2 x P G 2 x P MM H1 AL A H MM H1 AL A H G G 2 x Cushion valve K 2 x Cushion valve K 4 x J B1 4 x J B1 F F 4 x LD 4 x LD D D E E B C B C LY LH LY LH

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

B + Stroke A + Stroke K M E J 2 x 4-OA counterbore depth RA L S Rod end male thread Rod End Male Thread H1 Bore siz e (m m) A C1 1 H1 L1 X 125 140 160 141 141 155 42 42 47 M30 x 1.5 M30 x 1.5 M36 x 1.5 58 58 64 45 45 50 Rod end nut C1 X L1 Switches in the above figure are the case for the reed switches D-A73 type and D-A80 type.

Made to Order

CS1, CS2 series XC86B, XC86C H A L1 H1 CS1 CS2 Symbol H A L1 H1 Series Applicable knuckle joint part no.