Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DeviceNet Communication

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: D+N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: NPT Fitting

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y+Z

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Y

PFxx-OMS0001CN

) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3 3 6 6 6 6 zhi chi ON OFF ON OFF OU2 -30No.PF-OMS0001CN-A <>OUT1 [F 1] [oUt1][()] [oU1] [] [1ot] [] 32 33 34 36 -31No.PF-OMS0001CN-A a.

LV50-OMQ0002

) Hysteresis H1(H2) n1L (n2L) n1H (n2H) Instantaneous flow Accumulated increment output mode Count up from "0".

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

PFxx-OMJ0005CN

) H1(H2) 0 On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -

Table of Contents

m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

MY1

Wall mounting z y P. 26 Wb: MGGLB25-200 (4.35kg) x y x z MY1H40-500 3. Ceiling mounting 4.

MY1

Weight m X-axis Y-axis Z-axis Z 20 W 20 mm 30 mm 50 mm 2 kg 50 Y 30 3.

V

E 200 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 300 D I M E N S I O N S (N)VH S E R I E S B O D Y S I Z E 400 Courtesy of Steven Engineering, Inc. !