Cooling Capacity: 008 (8 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NZ (N+Z)

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NZ (N+Z)

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NZ (N+Z)

Cooling Capacity: 8 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Z

Cooling Capacity: 15 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: N+Z

Stainless Steel 316 Fittings

area (mm2) Weight (g) d M L Model H2 H1 O.D.

44

10 14 15.8 18.7 5.8 6.6 KK130 H2 H2 M L 15 17 22.2 7.6 DM d 16 17 24.3 8.5 KDM 21 22 28 9.3 KB Swivel Elbow: KFG2V KR Applicable tubing size (mm) O.D.

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

KJ

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x P (Rc, NPT, G) G H2 M5 x 0.8 (This drawing shows the cases of 20 and 25.)

SMC Pneumatic Clean Series

M26 x 1.5 M20 x 1.5 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 M26 x 1.5 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 17 Air cylinder CM2 2122CM2/ 101110112122Axial foot style (L) / CM2L, CM2L With rubber bumper Standard port H A K F G Relief port 2-P AL H2 G F 2-NN B (Rc, NPT, G) Width across flats B1 H1 LH Relief port M5 x 0.8 (This drawing shows the cases of 20 and 25.)

One-touch Fittings

-02m1 M14 x 1 17 17 28.4 14 9.7 12 15 13.3 13.1 10.4 4.5 32.4 3/8 KQ2E06-03m1 M14 x 1 19 17 30.7 16.3 9.7 12 15 13.3 13.1 10.4 4.5 35.9 Connection thread Rc L1 M L2 m: A (Brass), N (Brass + Electroless nickel plating) Release button dimensions X Y Bulkhead Male Elbow: KQ2LE 2 x Applicable tubing B M H1 (Width across flats) H2 (Width across flats) B E D Effective area [mm2] Min. port size

Standard Combinations

OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

Proposals for Energy Saving

D M L2 L1 (mm) H1 Width across flats Minimum bore H2 Width across flats Effective area mm L2 When connected Model Applicable hose I.D.

XL

None H0 High temp. type With heater for 80C (176F) H1 5 to 150C (41 to 302F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Option specifications/Combination table Option specifications Symbol Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 A Indicator H0 Without heater High temp. type H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F

Table of Contents

(Hexagon width across flats) (Hexagon width across flats) H2 H2 (Hexagon width across flats) (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 L5 A1 D1 A2 T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Electric Rotary Table

230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 20 H1 H2 H3 Model LER50 LERH50 16 5.5 15.5 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 10 Series LER Electric Rotary Table/ Specific Product Precautions 1 Be sure to read before handling.